Air Bearing Stages for Lithography Applications

DynamYX was designed to provide equipment manufacturers in semiconductor lithography with a tool capable of achieving the highest levels of precision and throughput. DynamYX provides high resolution dynamic positioning of a wafer chuck or other similar substrate in two orthogonal translation axes from a singleplane carriage.

Search Suggestions:

Check the spelling of your keyword or search phrase.
Try searching with different synonymous keywords.
Broaden your search by using fewer keywords.
Select an auto-suggested keyword from the search box.
Instead, try browsing all product categories.