Vacuum Compatible Linear Stages

Newport vacuum compatible linear translation stages offer excellent motion performance. Each linear stage is built, treated and tested under vacuum to 10^-6 hPa (7.5*10^-7 Torr). With a wide vacuum compatible linear stage selection from nanopositioners to micropositioners, Newport vacuum compatible linear stages can address the translation needs of the most demanding vacuum motion applications.

Newport has the capability to prepare stages and motion systems not listed here for application in vacuum environments. Check out our Environmental Preparation technical notes. To discuss your application specific motion requirements, contact us online or call 877-835-9620.

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	Series	Travel Range (mm)	Minimum Incremental Motion (µm)	Normal Load Capacity (N)	Maximum Speed (mm/s)
	MTN Series Vacuum Stages MTN100PPV6 MTN200PPV6 MTN300PPV6	100-300	0.4	1000	20
	UTS Series Vacuum Linear Stages UTS50PPV6 UTS100PPV6 UTS150PPV6	50-150	0.3	100	20-40
	MFA Miniature Vacuum Linear Stages MFA-CCV6	25	0.1	50	1.25
	Agilis Series Vacuum Linear Stages AG-LS25V6 AG-LS25-27V6	12, 27	0.05	3	0.5
	NPX Vacuum Linear Stages NPX-V6	0.1-0.4	0.0002-0.008	10-100	See Specifications
	Manual Vacuum Linear Stages 9066-V 9067-V	12.7, 25.4	Actuator dependent	111, 222	Actuator dependent

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