ILS Series

High-Performance Mid-Range Travel Linear Stages

High stiffness, FEM optimized extruded aluminum body avoids thermal bending effects
Preloaded, backlash-free ballscrew drive allows rapid movements with short step and settling time
Precision recirculating ball bearing slides provide accurate linear motion without ball cage migration

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Overview
Specifications
Ordering
Drawings
Literature & Downloads
Controller
Related Products

The ILS Series linear stage is available from 50–250 mm travel and combines fast, sub-micron resolution motion in a highly stiff and robust package. Its extruded aluminum body has been FEM optimized to avoid bending effects caused by the different thermal expansion coefficients of the aluminum body and steel rails. The special U-profile also provides stiffness to the structure while keeping the mass low.

A preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. The screw is accurately profiled to reduce heating to a minimum and extend the life of the stage. Recirculating ball bearing slides ensure accurate linear motion without the ball cage migration issues found on typical linear ball bearings or crossed roller bearings.
Position measurements are read with a 4000 pts/rev. encoder mounted directly on the screw, avoiding screw/motor coupling errors. For more demanding precision positioning requirements, the HA version features an integrated linear scale providing 0.1 µm resolution feedback.

An upper rigid cover prevents damage to the drive train and protects it from dust and debris. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.

Need Accuracy to 1 µm?

For critical positioning applications, Newport offers micropositioning calibration services. We will create, implement and verify an electronic compensation process to improve the absolute position accuracy of select ILS-HA Series stages when commanded by our XPS advanced motion control system. Compensation is performed at 20.0 °C, +/-0.2 °C, for linear and non-linear errors, ensuring accuracy of up to 1 µm/100 mm over center 80% of travel. A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided. Click here for complete information.

Design Details

Base Material	Extruded Aluminum
Bearings	Double-row recirculating ball bearings
Drive Mechanism	Backlash-free ball screw
Drive Screw Pitch (mm)	2
Feedback	CC, CCL, PP: Screw mounted rotary encoder, 4,000 pts/rev, index pulse HA: Linear steel scale, 20 µm signal period
Limit Switches	Optical
Origin	Optical, at center of travel, including mechanical zero signal
Motor	CC, CCL: UE404S2 CCHA: UE404S2-T PP: UE41UP, 1 Full step = 20 Encoder pulses
Cable Length (m)	3 (included)

Specifications

	ILS
	PP	CC,CCL¹	HA
Travel Range (mm)	50, 100, 150, 200, 250
Resolution (µm)	0.5		0.1
Minimum Incremental Motion (µm)	1		0.3
Uni-directional Repeatability, Guaranteed, guaranteed² (µm)	1.5	1.5	0.4
Reversal Value (Hysteresis), Guaranteed (µm)	1	1	0.3
Bi-directional Repeatability, guaranteed² (µm)	2.5 or ± 1.25	2.5 or ± 1.25	0.7 or ± 0.35
On-Axis Accuracy, guaranteed^2,3 (µm)	5 or ± 2.5 or ± 2.5	5 or ± 2.5 or ± 2.5	4 or ± 2 or ± 2
Maximum Speed (mm/s)	50	100⁴	100
Pitch, guaranteed^2,3 (µrad)⁵	100 or ± 50 or ± 50	100 or ± 50 or ± 50	100 or ± 50 or ± 50
Yaw, guaranteed^2,3 (µrad)⁵	100 or ± 50 or ± 50	100 or ± 50 or ± 50	100 or ± 50 or ± 50
MTBF (h)	20,000
Weight [lb (kg)]	ILS50CC : 9.3 (4.2), ILS100CC : 9.9 (4.5), ILS150CC : 10.6 (4.8), ILS200CC : 11.2 (5.1), ILS250CC : 11.9 (5.4)

¹Select ILSCCL only for use with the SMC100CC controller
²Shown are peak to peak, guaranteed specifications or ± half the value. For the definition of typical specifications which are about 2X better than the guaranteed values, see Motion Control Metrology Primer
³For 100mm travel
⁴50mm/s with ILSCCL
⁵ To obtain arcsec units, divide µrad value by 4.8.

For the definition of specifications see Motion Basics and Standards.

Load Characteristics and Stiffness

Cz, Normal center load capacity on bearings	250 N
+Cx/-Cx, Direct/Inverse load capacity on X axis	<40 N
kαx, Compliance in roll	15 µrad/N.m
kαy, Compliance in pitch	10 µrad/N.m
kαz, Compliance in yaw	10 µrad/N.m
Q, Off-center load	Q≤Cz/(1 + D/60)
D, Cantilever distance in mm

Motor cables are included.

Model	Description	avail raw	Availability	price raw	Price	Qty. MULTI ADD
EQ120	Right-Angle Bracket for ILS and RV	0	In Stock	1099	$1,099.00	ADD
ILS100CC	High Performance Linear Stage, 100 mm Travel, DC Motor, ILS Series	2	2 Weeks	3573	$3,573.00	ADD
ILS100CCL	High Performance Linear Stage, 100 mm Travel, DC Motor, SMC100CC	2	2 Weeks	3573	$3,573.00	ADD
ILS100HA	High Performance Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, ILS	5	5 Weeks	5680	$5,680.00	ADD
ILS100PP	High Performance Linear Stage, 100 mm Travel, Stepper Motor, ILS Series	0	In Stock	3408	$3,408.00	ADD
ILS150CC	High Performance Linear Stage, 150 mm Travel, DC Motor, ILS Series	0	In Stock	3904	$3,904.00	ADD
ILS150CCL	High Performance Linear Stage, 150 mm Travel, DC Motor, SMC100CC	4	4 Weeks	3904	$3,904.00	ADD
ILS150HA	High Performance Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, ILS	0	In Stock	6133	$6,133.00	ADD
ILS150PP	High Performance Linear Stage, 150 mm Travel, Stepper Motor, ILS Series	4	4 Weeks	3775	$3,775.00	ADD
ILS200CC	High Performance Linear Stage, 200 mm Travel, DC Motor, ILS Series	0	In Stock	4299	$4,299.00	ADD
ILS200CCL	High Performance Linear Stage, 200 mm Travel, DC Motor, SMC100CC	3	3 Weeks	4299	$4,299.00	ADD
ILS200HA	High Performance Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	6634	$6,634.00	ADD
ILS200PP	High Performance Linear Stage, 200 mm Travel, Stepper Motor, ILS Series	3	3 Weeks	4143	$4,143.00	ADD
ILS250CC	High Performance Linear Stage, 250 mm Travel, DC Motor, ILS Series	0	In Stock	4831	$4,831.00	ADD
ILS250CCL	High Performance Linear Stage, 250 mm Travel, DC Motor, SMC100CC	0	In Stock	4831	$4,831.00	ADD
ILS250HA	High Performance Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	7136	$7,136.00	ADD
ILS250PP	High Performance Linear Stage, 250 mm Travel, Stepper Motor, ILS Series	0	In Stock	4601	$4,601.00	ADD
ILS50CC	High Performance Linear Stage, 50 mm Travel, DC Motor, ILS Series	3	3 Weeks	3313	$3,313.00	ADD
ILS50CCL	High Performance Linear Stage, 50 mm Travel, DC Motor, SMC100CC	3	3 Weeks	3313	$3,313.00	ADD
ILS50HA	High Performance Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	5443	$5,443.00	ADD
ILS50PP	High Performance Linear Stage, 50 mm Travel, Stepper Motor, ILS Series	3	3 Weeks	3234	$3,234.00	ADD
M-ILS100CC	High Performance Linear Stage, 100 mm Travel, DC Motor, ILS Series, Metric	2	2 Weeks	3573	$3,573.00	ADD
M-ILS100CCL	High Performance Linear Stage, 100 mm Travel, DC Motor, SMC100CC, Metric	2	2 Weeks	3573	$3,573.00	ADD
M-ILS100HA	High Performance Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	5680	$5,680.00	ADD
M-ILS100PP	High Performance Linear Stage, 100 mm Travel, Stepper Motor, ILS Series, Metric	0	In Stock	3408	$3,408.00	ADD
M-ILS150CC	High Performance Linear Stage, 150 mm Travel, DC Motor, ILS Series, Metric	1	1 Weeks	3904	$3,904.00	ADD
M-ILS150CCL	High Performance Linear Stage, 150 mm Travel, DC Motor, SMC100CC, Metric	4	4 Weeks	3904	$3,904.00	ADD
M-ILS150HA	High Performance Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	6133	$6,133.00	ADD
M-ILS150PP	High Performance Linear Stage, 150 mm Travel, Stepper Motor, ILS Series, Metric	4	4 Weeks	3775	$3,775.00	ADD
M-ILS200CC	High Performance Linear Stage, 200 mm Travel, DC Motor, ILS Series, Metric	3	3 Weeks	4299	$4,299.00	ADD
M-ILS200CCL	High Performance Linear Stage, 200 mm Travel, DC Motor, SMC100CC, Metric	3	3 Weeks	4299	$4,299.00	ADD
M-ILS200HA	High Performance Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	6634	$6,634.00	ADD
M-ILS200PP	High Performance Linear Stage, 200 mm Travel, Stepper Motor, ILS Series, Metric	3	3 Weeks	4143	$4,143.00	ADD
M-ILS250CC	High Performance Linear Stage, 250 mm Travel, DC Motor, ILS Series, Metric	6	6 Weeks	4831	$4,831.00	ADD
M-ILS250CCL	High Performance Linear Stage, 250 mm Travel, DC Motor, SMC100CC, Metric	6	6 Weeks	4831	$4,831.00	ADD
M-ILS250HA	High Performance Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	7136	$7,136.00	ADD
M-ILS250PP	High Performance Linear Stage, 250 mm Travel, Stepper Motor, ILS Series, Metric	0	In Stock	4601	$4,601.00	ADD
M-ILS50CC	High Performance Linear Stage, 50 mm Travel, DC Motor, ILS Series, Metric	3	3 Weeks	3313	$3,313.00	ADD
M-ILS50CCL	High Performance Linear Stage, 50 mm Travel, DC Motor, SMC100CC, Metric	3	3 Weeks	3313	$3,313.00	ADD
M-ILS50HA	High Performance Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	5443	$5,443.00	ADD
M-ILS50PP	High Performance Linear Stage, 50 mm Travel, Stepper Motor, ILS Series, Metric	3	3 Weeks	3234	$3,234.00	ADD

Model	Description	avail raw	Availability	price raw	Price	Qty. MULTI ADD
EQ120	Right-Angle Bracket for ILS and RV	0	In Stock	1099	$1,099.00	ADD
ILS100CC	High Performance Linear Stage, 100 mm Travel, DC Motor, ILS Series	2	2 Weeks	3573	$3,573.00	ADD
ILS100CCL	High Performance Linear Stage, 100 mm Travel, DC Motor, SMC100CC	2	2 Weeks	3573	$3,573.00	ADD
ILS100HA	High Performance Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, ILS	5	5 Weeks	5680	$5,680.00	ADD
ILS100PP	High Performance Linear Stage, 100 mm Travel, Stepper Motor, ILS Series	0	In Stock	3408	$3,408.00	ADD
ILS150CC	High Performance Linear Stage, 150 mm Travel, DC Motor, ILS Series	0	In Stock	3904	$3,904.00	ADD
ILS150CCL	High Performance Linear Stage, 150 mm Travel, DC Motor, SMC100CC	4	4 Weeks	3904	$3,904.00	ADD
ILS150HA	High Performance Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, ILS	0	In Stock	6133	$6,133.00	ADD
ILS150PP	High Performance Linear Stage, 150 mm Travel, Stepper Motor, ILS Series	4	4 Weeks	3775	$3,775.00	ADD
ILS200CC	High Performance Linear Stage, 200 mm Travel, DC Motor, ILS Series	0	In Stock	4299	$4,299.00	ADD
ILS200CCL	High Performance Linear Stage, 200 mm Travel, DC Motor, SMC100CC	3	3 Weeks	4299	$4,299.00	ADD
ILS200HA	High Performance Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	6634	$6,634.00	ADD
ILS200PP	High Performance Linear Stage, 200 mm Travel, Stepper Motor, ILS Series	3	3 Weeks	4143	$4,143.00	ADD
ILS250CC	High Performance Linear Stage, 250 mm Travel, DC Motor, ILS Series	0	In Stock	4831	$4,831.00	ADD
ILS250CCL	High Performance Linear Stage, 250 mm Travel, DC Motor, SMC100CC	0	In Stock	4831	$4,831.00	ADD
ILS250HA	High Performance Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	7136	$7,136.00	ADD
ILS250PP	High Performance Linear Stage, 250 mm Travel, Stepper Motor, ILS Series	0	In Stock	4601	$4,601.00	ADD
ILS50CC	High Performance Linear Stage, 50 mm Travel, DC Motor, ILS Series	3	3 Weeks	3313	$3,313.00	ADD
ILS50CCL	High Performance Linear Stage, 50 mm Travel, DC Motor, SMC100CC	3	3 Weeks	3313	$3,313.00	ADD
ILS50HA	High Performance Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	5443	$5,443.00	ADD
ILS50PP	High Performance Linear Stage, 50 mm Travel, Stepper Motor, ILS Series	3	3 Weeks	3234	$3,234.00	ADD
M-ILS100CC	High Performance Linear Stage, 100 mm Travel, DC Motor, ILS Series, Metric	2	2 Weeks	3573	$3,573.00	ADD
M-ILS100CCL	High Performance Linear Stage, 100 mm Travel, DC Motor, SMC100CC, Metric	2	2 Weeks	3573	$3,573.00	ADD
M-ILS100HA	High Performance Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	5680	$5,680.00	ADD
M-ILS100PP	High Performance Linear Stage, 100 mm Travel, Stepper Motor, ILS Series, Metric	0	In Stock	3408	$3,408.00	ADD
M-ILS150CC	High Performance Linear Stage, 150 mm Travel, DC Motor, ILS Series, Metric	1	1 Weeks	3904	$3,904.00	ADD
M-ILS150CCL	High Performance Linear Stage, 150 mm Travel, DC Motor, SMC100CC, Metric	4	4 Weeks	3904	$3,904.00	ADD
M-ILS150HA	High Performance Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	6133	$6,133.00	ADD
M-ILS150PP	High Performance Linear Stage, 150 mm Travel, Stepper Motor, ILS Series, Metric	4	4 Weeks	3775	$3,775.00	ADD
M-ILS200CC	High Performance Linear Stage, 200 mm Travel, DC Motor, ILS Series, Metric	3	3 Weeks	4299	$4,299.00	ADD
M-ILS200CCL	High Performance Linear Stage, 200 mm Travel, DC Motor, SMC100CC, Metric	3	3 Weeks	4299	$4,299.00	ADD
M-ILS200HA	High Performance Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	6634	$6,634.00	ADD
M-ILS200PP	High Performance Linear Stage, 200 mm Travel, Stepper Motor, ILS Series, Metric	3	3 Weeks	4143	$4,143.00	ADD
M-ILS250CC	High Performance Linear Stage, 250 mm Travel, DC Motor, ILS Series, Metric	6	6 Weeks	4831	$4,831.00	ADD
M-ILS250CCL	High Performance Linear Stage, 250 mm Travel, DC Motor, SMC100CC, Metric	6	6 Weeks	4831	$4,831.00	ADD
M-ILS250HA	High Performance Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	7136	$7,136.00	ADD
M-ILS250PP	High Performance Linear Stage, 250 mm Travel, Stepper Motor, ILS Series, Metric	0	In Stock	4601	$4,601.00	ADD
M-ILS50CC	High Performance Linear Stage, 50 mm Travel, DC Motor, ILS Series, Metric	3	3 Weeks	3313	$3,313.00	ADD
M-ILS50CCL	High Performance Linear Stage, 50 mm Travel, DC Motor, SMC100CC, Metric	3	3 Weeks	3313	$3,313.00	ADD
M-ILS50HA	High Performance Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	5443	$5,443.00	ADD
M-ILS50PP	High Performance Linear Stage, 50 mm Travel, Stepper Motor, ILS Series, Metric	3	3 Weeks	3234	$3,234.00	ADD

Model	Description	avail raw	Availability	price raw	Price	Qty. MULTI ADD
EQ120	Right-Angle Bracket for ILS and RV	0	In Stock	1099	$1,099.00	ADD
ILS100CC	High Performance Linear Stage, 100 mm Travel, DC Motor, ILS Series	2	2 Weeks	3573	$3,573.00	ADD
ILS100CCL	High Performance Linear Stage, 100 mm Travel, DC Motor, SMC100CC	2	2 Weeks	3573	$3,573.00	ADD
ILS100HA	High Performance Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, ILS	5	5 Weeks	5680	$5,680.00	ADD
ILS100PP	High Performance Linear Stage, 100 mm Travel, Stepper Motor, ILS Series	0	In Stock	3408	$3,408.00	ADD
ILS150CC	High Performance Linear Stage, 150 mm Travel, DC Motor, ILS Series	0	In Stock	3904	$3,904.00	ADD
ILS150CCL	High Performance Linear Stage, 150 mm Travel, DC Motor, SMC100CC	4	4 Weeks	3904	$3,904.00	ADD
ILS150HA	High Performance Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, ILS	0	In Stock	6133	$6,133.00	ADD
ILS150PP	High Performance Linear Stage, 150 mm Travel, Stepper Motor, ILS Series	4	4 Weeks	3775	$3,775.00	ADD
ILS200CC	High Performance Linear Stage, 200 mm Travel, DC Motor, ILS Series	0	In Stock	4299	$4,299.00	ADD
ILS200CCL	High Performance Linear Stage, 200 mm Travel, DC Motor, SMC100CC	3	3 Weeks	4299	$4,299.00	ADD
ILS200HA	High Performance Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	6634	$6,634.00	ADD
ILS200PP	High Performance Linear Stage, 200 mm Travel, Stepper Motor, ILS Series	3	3 Weeks	4143	$4,143.00	ADD
ILS250CC	High Performance Linear Stage, 250 mm Travel, DC Motor, ILS Series	0	In Stock	4831	$4,831.00	ADD
ILS250CCL	High Performance Linear Stage, 250 mm Travel, DC Motor, SMC100CC	0	In Stock	4831	$4,831.00	ADD
ILS250HA	High Performance Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	7136	$7,136.00	ADD
ILS250PP	High Performance Linear Stage, 250 mm Travel, Stepper Motor, ILS Series	0	In Stock	4601	$4,601.00	ADD
ILS50CC	High Performance Linear Stage, 50 mm Travel, DC Motor, ILS Series	3	3 Weeks	3313	$3,313.00	ADD
ILS50CCL	High Performance Linear Stage, 50 mm Travel, DC Motor, SMC100CC	3	3 Weeks	3313	$3,313.00	ADD
ILS50HA	High Performance Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, ILS	4	4 Weeks	5443	$5,443.00	ADD
ILS50PP	High Performance Linear Stage, 50 mm Travel, Stepper Motor, ILS Series	3	3 Weeks	3234	$3,234.00	ADD
M-ILS100CC	High Performance Linear Stage, 100 mm Travel, DC Motor, ILS Series, Metric	2	2 Weeks	3573	$3,573.00	ADD
M-ILS100CCL	High Performance Linear Stage, 100 mm Travel, DC Motor, SMC100CC, Metric	2	2 Weeks	3573	$3,573.00	ADD
M-ILS100HA	High Performance Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	5680	$5,680.00	ADD
M-ILS100PP	High Performance Linear Stage, 100 mm Travel, Stepper Motor, ILS Series, Metric	0	In Stock	3408	$3,408.00	ADD
M-ILS150CC	High Performance Linear Stage, 150 mm Travel, DC Motor, ILS Series, Metric	1	1 Weeks	3904	$3,904.00	ADD
M-ILS150CCL	High Performance Linear Stage, 150 mm Travel, DC Motor, SMC100CC, Metric	4	4 Weeks	3904	$3,904.00	ADD
M-ILS150HA	High Performance Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	6133	$6,133.00	ADD
M-ILS150PP	High Performance Linear Stage, 150 mm Travel, Stepper Motor, ILS Series, Metric	4	4 Weeks	3775	$3,775.00	ADD
M-ILS200CC	High Performance Linear Stage, 200 mm Travel, DC Motor, ILS Series, Metric	3	3 Weeks	4299	$4,299.00	ADD
M-ILS200CCL	High Performance Linear Stage, 200 mm Travel, DC Motor, SMC100CC, Metric	3	3 Weeks	4299	$4,299.00	ADD
M-ILS200HA	High Performance Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	6634	$6,634.00	ADD
M-ILS200PP	High Performance Linear Stage, 200 mm Travel, Stepper Motor, ILS Series, Metric	3	3 Weeks	4143	$4,143.00	ADD
M-ILS250CC	High Performance Linear Stage, 250 mm Travel, DC Motor, ILS Series, Metric	6	6 Weeks	4831	$4,831.00	ADD
M-ILS250CCL	High Performance Linear Stage, 250 mm Travel, DC Motor, SMC100CC, Metric	6	6 Weeks	4831	$4,831.00	ADD
M-ILS250HA	High Performance Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	7136	$7,136.00	ADD
M-ILS250PP	High Performance Linear Stage, 250 mm Travel, Stepper Motor, ILS Series, Metric	0	In Stock	4601	$4,601.00	ADD
M-ILS50CC	High Performance Linear Stage, 50 mm Travel, DC Motor, ILS Series, Metric	3	3 Weeks	3313	$3,313.00	ADD
M-ILS50CCL	High Performance Linear Stage, 50 mm Travel, DC Motor, SMC100CC, Metric	3	3 Weeks	3313	$3,313.00	ADD
M-ILS50HA	High Performance Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, Metric	4	4 Weeks	5443	$5,443.00	ADD
M-ILS50PP	High Performance Linear Stage, 50 mm Travel, Stepper Motor, ILS Series, Metric	3	3 Weeks	3234	$3,234.00	ADD

Model ILS200 shown

						Dimensions for CC, CCL and PP		Dimensions for HA
Model (Metric)	A	n₁	B	n₂	L2	L1	L3	L1	L3
ILS50 (M-ILS50)		2		2	8 (203)	14 (358)	4.8 (123)	15.5 (394)	6.3 (159)
ILS100 (M-ILS100)		2		2	10 (253)	16 (408)	4.8 (123)	17.5 (444)	6.3 (159)
ILS150 (M-ILS150)		2	3 in.	4	12 (303)	18 (458)	4.8 (123)	19.4 (494)	6.3 (159)
ILS200 (M-ILS200)	100 mm	4	3 in.	4	14 (353)	20 (508)	4.8 (123)	21.4 (544)	6.3 (159)
ILS250 (M-ILS250)	100 mm	4	3 in.	4	16 (403)	22 (558)	4.8 (123)	23.4 (594)	6.3 (159)

(M-)ILS Stages Top Plate Interface

	Thread	Dimensions
Model (Metric)	A	B	C	D	E	F	G	H	J	K	L	M
ILS	1/4-20 (M6)	3.00 (75)	1.00 (25)	4.00 (100)	2.00 (50)	1.00 (25)	3.00 (75)	2.00 (50)	4.00 (100)	4.33 (110)	0.24 (6)	0.47 (12)

ILS (M-ILS) Stages Top Plate Interface

ILS (M-ILS) interfaces with	Mounting holes on stage	Interface & Screws
MFA	4 holes Ø 7.5 on 75.8 x 25.4	Base Plate— 1/4-20 x 12 (M6 x 12)
M-UZS80	4 holes Ø 7.5 on 101 x 50.4	Base Plate— 1/4-20 x 12 (M6 x 12)
M-BGS80	4 holes Ø 7.5 on 101 x 50.4	Base Plate— 1/4-20 x 12 (M6 x 12)
M-BGS50	4 holes Ø 7.5 on 75.8 x 25.4	Base Plate— 1/4-20 x 12 (M6 x 12)
RVS80	6 holes Ø 4.5 at 60° on Ø 92	UNC 8-32 x 16 (M4 x 16)

Data Sheets

EQ120 180 Data Sheet (83 KB)

Newport Resource e-Catalogs *

*e-Catalog pages include the most current information available at the time of printing.

Technical References

RoHS Compliance Certificate (139 KB)

User Manuals

EQ120 & EQ180 User Manual (832 KB)

Controller Compatibility

All ILS High Precision Linear Stages are compatible with the XPS Universal High-Performance Motion Controller/Driver and ESP301 Motion Controller. Select ILS Stage Models can be used with the SMC100CC and SCM100PP. Please refer to the table below for more information.

Family	Max. Power Consumption (W)	XPS¹ driver module	Compatibility
Family	Max. Power Consumption (W)	XPS¹ driver module	ESP301¹	SMC100CC¹	SMC100PP¹	NSC200
ILS-CC	70	XPS-DRV01	X
ILS-CCL	30	XPS-DRV01	X	X
ILS-HA	70	XPS-DRV03	X
ILS-PP	40	XPS-DRV01	X		X

1. Enhanced System Performance (ESP) Controller

XPS Series

Model	Description
XPS-C2	2-axis Universal Controller/Driver, ethernet
XPS-C4	4-axis Universal Controller/Driver, ethernet
XPS-C6	6-axis Universal Controller/Driver, ethernet
XPS-C8	8-axis Universal Controller/Driver, ethernet
XPS-DRV01	PWM drive module for DC brush and stepper motors, 3A/48V max.
XPS-DRV03	High performance PWM drive module for DC motors, 5A/48V max.

Note: XPS-DRVxx card is required for each axis when used with XPS

ESP301 Series

Model	Description
ESP301-1G	ESP301 Motor Controller/Driver, 1 axis, w/ GPIB and USB
ESP301-1N	ESP301 Motor Controller/Driver, 1 axis, USB
ESP301-2G	ESP301 Motor Controller/Driver, 2 axis, w/ GPIB and USB
ESP301-2N	ESP301 Motor Controller/Driver, 2 axis, USB
ESP301-3G	ESP301 Motor Controller/Driver, 3 axis, w/ GPIB and USB
ESP301-3N	ESP301 Motor Controller/Driver, 3 axis, USB

SMC Series

Model	Description
SMC100CC	Single-axis DC motor controller/driver
SMC100PP	Single-axis stepper motor controller/driver

Note: Refer to SMC series product page for power supply and available cable accessories

Selection Guides

	Description
	Motorized Linear Translation Stage Selection Guide
	Stage and Controller Compatibility

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