The ILS Series linear stage is available from 50250 mm travel and combines fast, sub-micron resolution motion in a highly stiff and robust package. Its extruded aluminum body has been FEM optimized to avoid bending effects caused by the different thermal expansion coefficients of the aluminum body and steel rails. The special U-profile also provides stiffness to the structure while keeping the mass low. A preloaded, backlash-free ballscrew provides rapid motion with fast, step and settling times. The screw is accurately profiled to reduce heating to a minimum and extend the life of the stage. Recirculating ball bearing slides ensure accurate linear motion without the ball cage migration issues found on typical linear ball bearings or crossed roller bearings.Position measurements are read with a 4000 pts/rev. encoder mounted directly on the screw, avoiding screw/motor coupling errors. For more demanding precision positioning requirements, the HA version features an integrated linear scale providing 0.1 µm resolution feedback. An upper rigid cover prevents damage to the drive train and protects it from dust and debris. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.
For critical positioning applications, Newport offers micropositioning calibration services. We will create, implement and verify an electronic compensation process to improve the absolute position accuracy of select ILS-HA Series stages when commanded by our XPS advanced motion control system. Compensation is performed at 20.0 °C, +/-0.2 °C, for linear and non-linear errors, ensuring accuracy of up to 1 µm + 1 µm/100 mm over center 80% of travel. A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided. Click here for complete information.
All ILS High Precision Linear Stages are compatible with the XPS Universal High-Performance Motion Controller/Driver and ESP301 Motion Controller. Select ILS Stage Models can be used with the SMC100CC and SCM100PP. Please refer to the table below for more information.