Vacuum Pressure Gauges & Sensors

MKS, Granville-Phillips® Vacuum Gauges & Sensors cover a broad spectrum of vacuum measurement solutions.

Please see Granville-Phillips® Gauges & Sensors on mks.com for additional configurations, literature, and product support.

Vacuum Pressure Gauges & Sensors

MKS, Granville-Phillips® Vacuum Gauges & Sensors cover a broad spectrum of vacuum measurement solutions.

Please see Granville-Phillips® Gauges & Sensors on mks.com for additional configurations, literature, and product support.

Showing 74 products in 19 families

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Cold Cathode Vacuum Sensors

1 Products

Cold Cathode Vacuum Sensors

1 Products

274 Glass Tubulated Bayard-Alpert Type Ionization Vacuum Sensors

<1.0 x 10-9 to 0.001 Torr measurement range
3/4 or 1 inch diameter tubulation in Kovar, Pyrex or flanged
Resistance heating or electron bombardment degas

5 Products

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Description	Avail.	Price
274003 Vacuum Gauge, Glass Bayard-Alpert, Single Thoria-coated Iridium Filament, 0.75 in. Metal Inlet Port	In Stock	$206	274003 Vacuum Gauge, Glass Bayard-Alpert, Single Thoria-coated Iridium Filament, 0.75 in. Metal Inlet Port In Stock $206
274006 Glass Bayard-Alpert Ionization Vacuum Gauge, <1 x 10^-9 - 1 x 10^-3 Torr, 1.0 in. Kovar Metal	In Stock	$315	274006 Glass Bayard-Alpert Ionization Vacuum Gauge, <1 x 10^-9 - 1 x 10^-3 Torr, 1.0 in. Kovar Metal In Stock $315
274032 Vacuum Gauge, Glass Bayard-Alpert Ionization, NW25-KF with 1 in.	In Stock	$363	274032 Vacuum Gauge, Glass Bayard-Alpert Ionization, NW25-KF with 1 in. In Stock $363
274008 Vacuum Gauge, Glass Bayard-Alpert, Single Thoria-coated Iridium Filament, 2.75 in. CF, 1.0 in. Port	In Stock	$322	274008 Vacuum Gauge, Glass Bayard-Alpert, Single Thoria-coated Iridium Filament, 2.75 in. CF, 1.0 in. Port In Stock $322
274013 Vacuum Gauge, Glass Bayard-Alpert, Dual Tungsten Filament, 0.75 in. Metal Inlet Port	3 Weeks	$194	274013 Vacuum Gauge, Glass Bayard-Alpert, Dual Tungsten Filament, 0.75 in. Metal Inlet Port 3 Weeks $194

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274 Glass Tubulated Bayard-Alpert Type Ionization Vacuum Sensors

5 Products

274 Nude Bayard-Alpert Type Ionization Vacuum Pressure Sensors

Cage grid or non-sag bifilar grid
Burn-out resistant filament or dual tungsten filaments
Resistance heating or electron bombardment degas

2 Products

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	Compare	Description		Avail.	Price	Qty.
		274042 Nude Bayard-Alpert Ionization Vacuum Gauge, <3 x 10^-11 - 1 x 10^-3 Torr, Dual Thoria-coated Iridium Filaments, 2.75 in. CF, Pin Guard		In Stock	$758		274042 Nude Bayard-Alpert Ionization Vacuum Gauge, <3 x 10^-11 - 1 x 10^-3 Torr, Dual Thoria-coated Iridium Filaments, 2.75 in. CF, Pin Guard In Stock $758
		274043 Vacuum Gauge, Nude Bayard-Alpert Ionization, Iridium, 2.75 in. CF, Pin Guard		In Stock	$721		274043 Vacuum Gauge, Nude Bayard-Alpert Ionization, Iridium, 2.75 in. CF, Pin Guard In Stock $721

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274 Nude Bayard-Alpert Type Ionization Vacuum Pressure Sensors

2 Products

275 Convectron® Convection-enhanced Pirani Vacuum Pressure Sensors

Wide vacuum pressure measurement range from atmosphere to 1x10-4 Torr
Individually calibrated gauges assure the highest measurement performance
Easy installation in space-restricted locations

3 Products

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Description	Avail.	Price
275071 Convection-enhanced Pirani Vacuum Gauge, Atmosphere to 1 x 10^-4 Torr, 0.125 in. NPT	Contact Us	$169	275071 Convection-enhanced Pirani Vacuum Gauge, Atmosphere to 1 x 10^-4 Torr, 0.125 in. NPT Contact Us $169
275203 Convection-enhanced Pirani Vacuum Gauge, Atmosphere to 1 x 10^-4 Torr, NW16-KF	Contact Us	$194	275203 Convection-enhanced Pirani Vacuum Gauge, Atmosphere to 1 x 10^-4 Torr, NW16-KF Contact Us $194
275185 Convection-enhanced Pirani Vacuum Gauge, Atmosphere to 1 x 10^-4 Torr, 0.25 in. VCR female	Contact Us	$200	275185 Convection-enhanced Pirani Vacuum Gauge, Atmosphere to 1 x 10^-4 Torr, 0.25 in. VCR female Contact Us $200

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275 Convectron® Convection-enhanced Pirani Vacuum Pressure Sensors

3 Products

275 Mini-Convectron Vacuum Pressure Transducers

Absolute pressure measurement from atmosphere to 10-4 Torr
Compact and rugged all-metal package is virtually immune to RF interference
All functions programmable through RS485 or DeviceNet interfaces

6 Products

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Description	Avail.	Price
275600-0-GD-T Pressure Gauge, Mini-Convectron, Display, NW16 ISO-KF, Non-linear Analog, Tungsten	In Stock	$664	275600-0-GD-T Pressure Gauge, Mini-Convectron, Display, NW16 ISO-KF, Non-linear Analog, Tungsten In Stock $664
275400-1-GD-T Pressure Gauge, Mini-Convectron, NW16 ISO-KF, Non-linear Analog, 1 Relay, Tungsten	In Stock	$421	275400-1-GD-T Pressure Gauge, Mini-Convectron, NW16 ISO-KF, Non-linear Analog, 1 Relay, Tungsten In Stock $421
275400-2-GP-T Pressure Gauge, Mini-Convectron, 0.125 in. NPT, Non-linear Analog, 2 Relays, Tungsten	In Stock	$436	275400-2-GP-T Pressure Gauge, Mini-Convectron, 0.125 in. NPT, Non-linear Analog, 2 Relays, Tungsten In Stock $436
275600-2-GD-T Pressure Gauge, Mini-Convectron, Display, NW16 ISO-KF, Non-linear Analog, 2 Relays, Tungsten	In Stock	$706	275600-2-GD-T Pressure Gauge, Mini-Convectron, Display, NW16 ISO-KF, Non-linear Analog, 2 Relays, Tungsten In Stock $706
275600-2-GE-T Pressure Gauge, Mini-Convectron, Display, NW25 ISO-KF, Non-linear Analog, 2 Relays, Tungsten	In Stock	$718	275600-2-GE-T Pressure Gauge, Mini-Convectron, Display, NW25 ISO-KF, Non-linear Analog, 2 Relays, Tungsten In Stock $718

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275 Mini-Convectron Vacuum Pressure Transducers

6 Products

390 Micro-Ion ATM Modular Vacuum Pressure Transducers

5 Products

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Description	Avail.	Price
390511-3-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF Flange, RS-485, Analog	In Stock	$2,214	390511-3-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF Flange, RS-485, Analog In Stock $2,214
390100-YE Replacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, NW25 ISO-KF	In Stock	$958	390100-YE Replacement Vacuum Gauge, 390 Micro-Ion, Yttria-coated Iridium, NW25 ISO-KF In Stock $958
390100-YG Replacement Vacuum Gauge,390 Micro-Ion, Yttria-coated Iridium, 2.75 in. CF Flange	12 Weeks	$994	390100-YG Replacement Vacuum Gauge,390 Micro-Ion, Yttria-coated Iridium, 2.75 in. CF Flange 12 Weeks $994
390411-0-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog	In Stock	$1,852	390411-0-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog In Stock $1,852
390511-2-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, RS485, 2 Relays	In Stock	$2,182	390511-2-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, RS485, 2 Relays In Stock $2,182

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390 Micro-Ion ATM Modular Vacuum Pressure Transducers

5 Products

902B Absolute Piezo Vacuum Pressure Transducers

Low cost transducer with 0.1 to 1000 Torr measurement range
Solid state Piezo sensor resistant to damage from air inrush and vibrations
Robust design and stainless steel construction for harsh processes

2 Products

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	Compare	Description		Avail.	Price	Qty.
		902B-11030 Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, 3 Relays		Contact Us	$435		902B-11030 Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, 3 Relays Contact Us $435
		902B-11034 Piezo Vacuum Transducer, Display, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, 3 Relays		Contact Us	$740		902B-11034 Piezo Vacuum Transducer, Display, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, 3 Relays Contact Us $740

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902B Absolute Piezo Vacuum Pressure Transducers

2 Products

910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducer

4 Products

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Description	Avail.	Price
910-11030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS232	Contact Us	$803	910-11030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS232 Contact Us $803
910-11034 Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS232	Contact Us	$1,006	910-11034 Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS232 Contact Us $1,006
910-12030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS485	Contact Us	$803	910-12030 Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS485 Contact Us $803
910-21034 Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW25 ISO-KF, RS232	Contact Us	$1,018	910-21034 Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW25 ISO-KF, RS232 Contact Us $1,018

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910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducer

4 Products

925 Micro Pirani Vacuum Pressure Transducers

Absolute measurement range from 10-5 Torr to Atmosphere
MicroPirani sensor is resistant to damage from air inrush or vibration
Optional integrated touch-screen display available for local pressure indication

7 Products

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Description	Avail.	Price
925-11034 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15, 3 Relays	In Stock	$854	925-11034 Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15, 3 Relays In Stock $854
925-11030 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15, 3 Relays	Contact Us	$650	925-11030 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15, 3 Relays Contact Us $650
925-31030 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS232, DB15, 3 Relays	Contact Us	$671	925-31030 Vacuum Pressure Transducer, MicroPirani, 0.125 in. NPT-F, RS232, DB15, 3 Relays Contact Us $671
925-11010 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB9, 1 Relay	Contact Us	$623	925-11010 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB9, 1 Relay Contact Us $623
925-11020 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15	Contact Us	$598	925-11020 Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15 Contact Us $598

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925 Micro Pirani Vacuum Pressure Transducers

7 Products

972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers

Absolute measurement from 10^-8 Torr to atmosphere
Cold cathode anode module design is user serviceable to decrease downtime
RS232, RS485 or EtherCAT®/Analog communications

3 Products

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Description	Avail.	Price
972B-21020 Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232	Contact Us	$1,268	972B-21020 Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232 Contact Us $1,268
972B-21034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays	2 Weeks	$1,523	972B-21034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays 2 Weeks $1,523
972B-71034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232, 3 Relays	In Stock	$1,621	972B-71034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232, 3 Relays In Stock $1,621

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972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers

3 Products

974B QuadMag Vacuum Pressure Transducers

Absolute measurement from 10-8 Torr to atmosphere
Cold cathode anode module is user serviceable to decrease downtime
MEMS based MicroPirani sensor allows low auto cold cathode turn-on pressure

2 Products

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	Compare	Description		Avail.	Price	Qty.
		974B-21030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232, 3 Relays		In Stock	$1,678		974B-21030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232, 3 Relays In Stock $1,678
		974B-21034 Cold Cathode-MicroPirani-Piezo Transducer, Display, 1x10^-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays		Contact Us	$1,881		974B-21034 Cold Cathode-MicroPirani-Piezo Transducer, Display, 1x10^-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays Contact Us $1,881

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974B QuadMag Vacuum Pressure Transducers

2 Products

475 Convectron Vacuum Gauge Controllers

Vacuum pressure measurement from 1x10^-4 Torr to Atmosphere
High-performance compact controller for bench-top or panel mount applications
I/O options include analog outputs, setpoint relays, and serial communications

6 Products

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Description	Avail.	Price
475001-02-T Vacuum Gauge Controller, Convectron®, 2 Relays, Torr Units	In Stock	$837	475001-02-T Vacuum Gauge Controller, Convectron®, 2 Relays, Torr Units In Stock $837
475008-1 Power Supply, Vacuum Gauge Controller, Convectron®, 90-250 VAC, 120 V Plug	Contact Us	$121	475008-1 Power Supply, Vacuum Gauge Controller, Convectron®, 90-250 VAC, 120 V Plug Contact Us $121
475012-10 Controller Cable, Convectron Vacuum Gauge, 10 ft. Length	12 Weeks	$121	475012-10 Controller Cable, Convectron Vacuum Gauge, 10 ft. Length 12 Weeks $121
475001-A0-T Vacuum Gauge Controller, Convectron®, RS232, Torr Units	In Stock	$824	475001-A0-T Vacuum Gauge Controller, Convectron®, RS232, Torr Units In Stock $824
475001-00-T Vacuum Gauge Controller, Convectron®, Torr Units	12 Weeks	$667	475001-00-T Vacuum Gauge Controller, Convectron®, Torr Units 12 Weeks $667

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475 Convectron Vacuum Gauge Controllers

6 Products

PDR900 Vacuum Gauge Controllers

Easy to read 5 digit LED LED and LCD menu displays
Three high power setpoint relays for process control
Auto setup features plug and play functionality

2 Products

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	Compare	Description		Avail.	Price	Qty.
		PDR900-12-US Vacuum Gauge Controller, RS232 and RS485, US Power Cord, Series 900		In Stock	$958		PDR900-12-US Vacuum Gauge Controller, RS232 and RS485, US Power Cord, Series 900 In Stock $958
		100013620 Cable, 901P, 902B, 910, 925, 971B, 972B, or 974B Gauges, RS232 to PDR900 15 Pin, 10 ft.		In Stock	$254.99		100013620 Cable, 901P, 902B, 910, 925, 971B, 972B, or 974B Gauges, RS232 to PDR900 15 Pin, 10 ft. In Stock $254.99

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PDR900 Vacuum Gauge Controllers

2 Products

946 Vacuum System Controller

Simultaneous control and display six vacuum gauges and/or mass flow controllers
Pressure readings from 10,000 Torr down to 10^-11 Torr
Closed-loop pressure control option for use with MKS valves

1 Products

946 Vacuum System Controller

1 Products

937B Digital Combination Vacuum Gauge Controller

Simultaneous readout & control of up to 6 sensors and gauges
Wide measurement range from 10^-11 to 20,000 Torr
Operate hot/cold cathodes, manometers, and Piezo/Pirani sensors concurrently

1 Products

937B Digital Combination Vacuum Gauge Controller

1 Products

358501-01B-T1 - Vacuum Gauge Controller, Micro-Ion, Half-rack Mount, Dual Convectron, Torr, 6 Relays, 120V

$3,025

7 Weeks

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358501-01B-T1-Vacuum Gauge Controller, Micro-Ion, Half-rack Mount, Dual Convectron, Torr, 6 Relays, 120V

7 Weeks

$3,025

Vacuum Product Accessories

21 Products

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Description	Avail.	Price
275933 AC Power Adapter, Convectron Module, 120 VAC to 12 VDC	12 Weeks	$102	275933 AC Power Adapter, Convectron Module, 120 VAC to 12 VDC 12 Weeks $102
100007555 Manometer Cable, 937B or 946 Controllers to 626 or 627 Manometers, 10 ft.	Contact Us	$115	100007555 Manometer Cable, 937B or 946 Controllers to 626 or 627 Manometers, 10 ft. Contact Us $115
100011869 Vacuum Gauge Cable, 902B Sensor to 937B or 946 Controller, 10 ft.	In Stock	$138	100011869 Vacuum Gauge Cable, 902B Sensor to 937B or 946 Controller, 10 ft. In Stock $138
100014318-10 Vacuum Gauge Cable, 422 Sensor to 937B Controller, LEMO/BNC/SHC Connectors, 10 ft., Radiation Resistant	Contact Us		100014318-10 Vacuum Gauge Cable, 422 Sensor to 937B Controller, LEMO/BNC/SHC Connectors, 10 ft., Radiation Resistant Contact Us
100015132 Vacuum Sensor Card, Dual Convection Pirani, Series 937B and 946 Controllers	In Stock	$425	100015132 Vacuum Sensor Card, Dual Convection Pirani, Series 937B and 946 Controllers In Stock $425