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Long Lived Deep UV Excimer Laser Mirror, 25.4 mm, 0°, 193 nm

Long Lived Deep UV Excimer Mirrors

The 10QE20LL.50 is a Long Lived Deep UV Excimer Laser Mirror, 25.4 mm in diameter, 6.35mm thick, and is coated for 193 nm, optimized for 0° angle of incidence.

Long Lived Deep UV Mirrors are manufactured using high purity Excimer grade fused silica substrates and ultra hard dielectric coatings. Meticulous production procedures guarantee they will withstand greater than 30 Billion pulses. The coating is highly durable and will withstand repeated cleaning.

Specifications

Technical Specs

Wavelength Region
UV
Wavelength Range
193 nm
Mirror Shape
Round
Diameter
25.4 mm
Material
UV Excimer Grade Fused Silica
Coating Type
Low Loss Dielectric
Coating Code
LL.50
Reflectivity
R>98% @ 0° AOI @ 193 nm
Surface Quality
10-5 scratch-dig
Surface Flatness
λ/10 at 632.8 nm

Wedge
<3 arc min
Angle of Incidence
0°
Thickness
6.35 mm
Thickness Tolerance
±0.25 mm
Diameter Tolerance
+0/-0.25 mm
Chamfers
0.5 mm face width
Chamfers Angle Tolerance
45° ±15°

Wavelength Region
UV
Wavelength Range
193 nm
Mirror Shape
Round
Diameter
25.4 mm
Material
UV Excimer Grade Fused Silica
Coating Type
Low Loss Dielectric
Coating Code
LL.50
Reflectivity
R>98% @ 0° AOI @ 193 nm
Surface Quality
10-5 scratch-dig
Surface Flatness
λ/10 at 632.8 nm

Wedge
<3 arc min
Angle of Incidence
0°
Thickness
6.35 mm
Thickness Tolerance
±0.25 mm
Diameter Tolerance
+0/-0.25 mm
Chamfers
0.5 mm face width
Chamfers Angle Tolerance
45° ±15°

Resources & Downloads

Technical Articles

193nm Laser Induced Spectral Shift in HR Coated Mirrors(2.2 MB, PDF)

Technical Notes

Absorption Measurement of High-Reflectance Coated Mirrors at 193 nm with a Shack-Hartmann Wavefront Sensor(953 kB, PDF)