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FMS Series Metrology Application Steel DC Motor Linear Translation Stages

FMS Series metrology application DC motor linear translation stages are the highest performing all-steel linear stage providing high stiffness and thermal stability. With its high straightness and flatness, it is ideally suited for sensitive metrology applications.

All steel build for high stiffness, thermal stability & repeatable positioning
Anti-creep crossed roller bearings for exceptional straight & smooth motion
Engineered for demanding applications of surface measurement & profilometry
Plug and Play - ESP compatible

See All Features

Compatible Controllers

Compatible motion controllers for these DC motor driven stages are shown below:

XPS-RLD Motion Controller: Requires an Driver Module, and a or Axis XPS-RLD Series Motion Controller.
XPS-D Motion Controller: Requires an Driver Module, and a , , or Axis XPS-D Series Motion Controller.
ESP301 Motion Controller: Plug and Play compatible with all ESP301 Motion Controllers.
SMC100 Motion Controller: Requires a Motion Controller.

Specifications

Travel Range
100 mm
Maximum Speed
100 mm/s
Minimum Incremental Motion
500 nm
Centered Load Capacity
150 N
Axial Load Capacity (+Cx)
30 N
Inverse Axial Load Capacity (-Cx)
-30 N
Accuracy, Typical
±1.5 µm
Accuracy, Guaranteed
±3.0 µm
Uni-directional Repeatability, Typical
±0.40 µm
Uni-directional Repeatability, Guaranteed
±0.75 µm
Bi-directional Repeatability, Typical
±0.8 µm
Bi-directional Repeatability, Guaranteed
±1.5 µm

Flatness, Typical
±0.25 µm
Straightness, Typical
±0.25 µm
Pitch, Typical
±15 µrad
Yaw, Typical
±4.0 µrad
Compliance in Yaw
2 µrad/Nm
Compliance in Roll
3 µrad/Nm
Bearings
Anti-creep Cross-roller Bearings
Drive Type
DC Motor
Feedback
Rotary Encoder
Origin Repeatability
±0.5 µm
Thread Type
M6

Features

All Steel Body

The all steel construction allows for extreme stiffness and thermal stability, by eliminating bi-metallic bending. Due to the hardness of steel, it can be machined flatter to give excellent trajectory.

Backlash-free Precision Ground Ballscrew

These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.

Anti-creep Crossed Roller Bearings

To ensure the most accurate trajectory control, FMS stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.

Plug and Play - ESP Compatible

The FMS is an ESP-compatible stage wherein when connected to a Newport controller, it is quickly recognized and its operating parameters are configured without the need for user input, facilitating the startup and usability of the FMS. This Plug and Play feature is not only transparent to the use, but it also ensures the safe operation of the stage.

Individual Stage Metrology Report is Included

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.