One-XY Series Integrated Linear Motor XY Linear Translation Stages

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one-xy integrated xy motorized linear stage

Overview

The ONE-XY uniquely integrates both the X and Y axes in a low-profile design with excellent positioning accuracy, flatness, straightness, stiffness, MIM, and repeatability.

Integrated XY stages with built-in orthogonality
Excellent planarity with micron-level straightness and flatness
Low profile three plate design reduces stacking errors and increases stiffness
High efficiency, non-cogging linear motor
Linear encoder for nano-scale MIM and repeatability

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Products

Compare	Model	Compatibility	rankScore		Travel Range	Accuracy, Guaranteed	Availability	Brand
ONE-XY60 Motorized XY Linear Stage, Linear Motor, 50 mm Travel 5 Weeks	ONE-XY60 Motorized XY Linear Stage, Linear Motor, 50 mm Travel	UNIVERSAL	1.0	1.0	50 mm	±1.5 µm	5 Weeks	Newport
ONE-XY60HA Motorized XY Linear Stage, Linear Motor, 50 mm Travel, High Accuracy Contact Us	ONE-XY60HA Motorized XY Linear Stage, Linear Motor, 50 mm Travel, High Accuracy	UNIVERSAL	1.0	2.0	50 mm	±0.3 µm	Contact Us	Newport
ONE-XY100 Motorized XY Linear Stage, Linear Motor, 90 mm Travel Contact Us	ONE-XY100 Motorized XY Linear Stage, Linear Motor, 90 mm Travel	UNIVERSAL	1.0	3.0	90 mm	±2.0 µm	Contact Us	Newport
ONE-XY100HA Motorized XY Linear Stage, Linear Motor, 90 mm Travel, High Accuracy Contact Us	ONE-XY100HA Motorized XY Linear Stage, Linear Motor, 90 mm Travel, High Accuracy	UNIVERSAL	1.0	4.0	90 mm	±0.3 µm	Contact Us	Newport
ONE-XY200 Motorized XY Linear Stage, Linear Motor, 190 mm Travel 4 Weeks	ONE-XY200 Motorized XY Linear Stage, Linear Motor, 190 mm Travel	UNIVERSAL	1.0	5.0	190 mm	±2.5 µm	4 Weeks	Newport
ONE-XY200HA Motorized XY Linear Stage, Linear Motor, 190 mm Travel, High Accuracy Contact Us	ONE-XY200HA Motorized XY Linear Stage, Linear Motor, 190 mm Travel, High Accuracy	UNIVERSAL	1.0	6.0	190 mm	±0.4 µm	Contact Us	Newport
ONE-XY300 Motorized XY Linear Stage, Linear Motor, 290 mm Travel Contact Us	ONE-XY300 Motorized XY Linear Stage, Linear Motor, 290 mm Travel	UNIVERSAL	1.0	7.0	290 mm	±3.0 µm	Contact Us	Newport
ONE-XY300HA Motorized XY Linear Stage, Linear Motor, 290 mm Travel, High Accuracy Contact Us	ONE-XY300HA Motorized XY Linear Stage, Linear Motor, 290 mm Travel, High Accuracy	UNIVERSAL	1.0	8.0	290 mm	±0.5 µm	Contact Us	Newport

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Specifications

Models	ONE-XY60	ONE-XY100	ONE-XY200	ONE-XY300
Motorized Axes	XY	XY	XY	XY
Travel Range	50 mm	90 mm	190 mm	290 mm
Maximum Speed	200 mm/s	200 mm/s	200 mm/s	200 mm/s
Minimum Incremental Motion	50 nm	50 nm	50 nm	50 nm
Maximum Acceleration	0.3 G	0.3 G	0.2 G	0.2 G
Continuous Motor Force	10 N	10 N	20 N	53 N
Peak Motor Force	21 N	21 N	42 N	107 N
Centered Load Capacity	100 N	120 N	150 N	350 N
Accuracy, Typical	±0.4 µm	±0.5 µm
Accuracy, Guaranteed ¹	±1.5 µm	±2.0 µm	±2.5 µm	±3.0 µm
Bi-directional Repeatability, Typical	±0.040 µm	±0.040 µm
Flatness, Typical	±0.5 µm	±1.0 µm	±2.0 µm	±3.0 µm
Straightness, Typical	±0.5 µm	±1.0 µm	±2.0 µm	±3.0 µm
Pitch, Typical	±15 µrad	±20 µrad
Pitch, Guaranteed	±55 µrad	±65 µrad	±75 µrad	±90 µrad
Yaw, Typical	±15 µrad	±25 µrad
Yaw, Guaranteed	±55 µrad	±65 µrad	±75 µrad	±90 µrad
Roll, Typical	±29 µrad	±29 µrad	±36 µrad	±24 µrad
Orthogonality ²	96 µrad	96 µrad	96 µrad	96 µrad
Origin Repeatability	±0.1 µm	±0.1 µm	±0.1 µm	±0.1 µm
Cable Length	3 m	3 m	3 m	3 m
Width	125 mm	184 mm	275 mm	500 mm
Weight	2.9 kg	5.8 kg	12 kg	75 kg
MTBF	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)
RoHS

Notes:

Also available in a high accuracy (HA) version. Specifications measured on stage centerline, 50 mm above mounting surface. Newport provides NIST traceable, test results.

Guaranteed accuracy varies for the ONE-XY-HA versions.
Orthogonality is reduced to 5 µrad for the ONE-XY-HA versions.

Specifications

Models	ONE-XY60	ONE-XY100	ONE-XY200	ONE-XY300
Motorized Axes	XY	XY	XY	XY
Travel Range	50 mm	90 mm	190 mm	290 mm
Maximum Speed	200 mm/s	200 mm/s	200 mm/s	200 mm/s
Minimum Incremental Motion	50 nm	50 nm	50 nm	50 nm
Maximum Acceleration	0.3 G	0.3 G	0.2 G	0.2 G
Continuous Motor Force	10 N	10 N	20 N	53 N
Peak Motor Force	21 N	21 N	42 N	107 N
Centered Load Capacity	100 N	120 N	150 N	350 N
Accuracy, Typical	±0.4 µm	±0.5 µm
Accuracy, Guaranteed ¹	±1.5 µm	±2.0 µm	±2.5 µm	±3.0 µm
Bi-directional Repeatability, Typical	±0.040 µm	±0.040 µm
Flatness, Typical	±0.5 µm	±1.0 µm	±2.0 µm	±3.0 µm
Straightness, Typical	±0.5 µm	±1.0 µm	±2.0 µm	±3.0 µm
Pitch, Typical	±15 µrad	±20 µrad
Pitch, Guaranteed	±55 µrad	±65 µrad	±75 µrad	±90 µrad
Yaw, Typical	±15 µrad	±25 µrad
Yaw, Guaranteed	±55 µrad	±65 µrad	±75 µrad	±90 µrad
Roll, Typical	±29 µrad	±29 µrad	±36 µrad	±24 µrad
Orthogonality ²	96 µrad	96 µrad	96 µrad	96 µrad
Origin Repeatability	±0.1 µm	±0.1 µm	±0.1 µm	±0.1 µm
Cable Length	3 m	3 m	3 m	3 m
Width	125 mm	184 mm	275 mm	500 mm
Weight	2.9 kg	5.8 kg	12 kg	75 kg
MTBF	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)
RoHS

Notes:

Also available in a high accuracy (HA) version. Specifications measured on stage centerline, 50 mm above mounting surface. Newport provides NIST traceable, test results.

Guaranteed accuracy varies for the ONE-XY-HA versions.
Orthogonality is reduced to 5 µrad for the ONE-XY-HA versions.

Features

Increased Stiffness

For better stability, the wide separation of cross-roller bearings and a thick middle plate ensures higher stiffness against cantilevered loads.

Micron-level Straightness and Flatness

Because of the ONE-XY's precision grinding and cross-roller bearings, it achieves micron-level straightness and flatness.

Ironless Linear Motor

The high efficiency, ironless linear motor has the advantage of higher speed, acceleration and system responsiveness without wear to motor brushes or drive screws, significantly reducing heat generation. Additionally the non-cogging feature of the Ironless Linear Motor ensures excellent speed stability. Not only does the ironless motor provide these advantages, it also results in high-throughput and high reliability.

Integrated X and Y Axes

The ONE-XY's most distinguishing feature is its 3 plate design, allowing movement in both X and Y direction with a low profile relative to stacked stages. Orthogonality is built into the design, therefore enhancing the XY accuracy.