The IMS-LM series linear motor stages are designed for self-supporting applications with travel ranges from 300 mm to 1200 mm. The stages feature a robust design with high
performance but with low cost, making them cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and
assembly, pick and place, DNA sequencing, or laser machining. The IMS-LM-SA version with, 4-pt mounting, is ideal for delay lines and other applications with non-flat mounting
surfaces.
The IMS-LM series utilizes an FEM optimized aluminum extruded body that is extremely stiff and minimizes the bending effect caused by different thermal expansion coefficients
of the aluminum body and the steel rails. Unlike-screw driven stages, the IMS-LM employs a center-driven linear motor. This linear motor is absolutely noise-free and has the advantage of higher speed, acceleration and system responsiveness with no wear of motor brushes or drive screws. Due to the fully integrated linear motor, the IMS-LM is more than 100 mm shorter in length than a comparable screw driven stage. Thus, the IMS-LM is the optimum solution for space constrained applications that require high-throughput, high reliability, and ultra-quiet operation.
The IMS-LM uses a high efficiency 3-phase synchronous ironcore linear motor. While ironcore linear motors are often criticized for their cogging and high attractive forces, their
efficiency is almost twice the efficiency of ironless linear motors. This results in higher acceleration capabilities and significant less heat dissipation which often limits
performance of rapid point-to-point positioning.
Recirculating ball bearing slides with caged balls provide excellent payload capacity and long life. The ball separators in the recirculating elements ensure superior smooth
movement, lower noise, and longer service life compared to uncaged ball bearing slides.
Precision position feedback is supplied by a highly repeatable linear scale mounted inside the stage. The encoder signals are interpolated by Newport’s XPS motion controller with
20 nm MIM for outstanding Minimum Incremental Motion, repeatability, and stability. Absolute home position and limit signals are incorporated in the same to improve
repeatability and reliability, while simplifying the design with less electronics and mechanical parts.
Need Higher Accuracy?
For critical positioning applications, Newport offers micropositioning calibration services. We will create, implement and verify an electronic compensation process to improve the absolute position accuracy of your Newport IMS-LM Series stages when commanded by our XPS advanced motion control system. Compensation is performed at 20.0 °C, +/-0.2 °C, for linear and non-linear errors, ensuring accuracy of up to 1 µm + 1 µm/100 mm over center 80% of travel. A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided. Click here for complete information.
IMS-LM stages are capable of performing very small incremental motions with high accuracy and reliability.
Accuracy of an IMS300LM stage after compensating for linear errors. The data was taken dynamically at a rate of 10 kHz while the stage was moving at a speed of 50 mm/s. Both, the encoder and the interferometer position were acquired by a XPS motion controller with a latency of less an 50 ns between the different signals.
IMS-LM stages provide outstanding speed stability for continuous scanning and laser machining applications.
The high stiffness of the IMS-LM stages results in very short settling times that improve the performance and throughput of many stepping, scanning, and continuous machining processes.
Design Details
| Base Material |
Extruded Aluminum |
| Bearings |
Recirculating bearings with caged balls |
| Drive Mechanism |
3-phase synchronous iron core linear motor (no Hall effect sensors) |
| Motor initialization |
Using a patented process in the XPS controller that avoids large motions during initialization and that does not require Hall effect sensors. |
| Motor commutation |
Done by the XPS controller on encoder signals. |
| Feedback |
Linear steel scale, 20 µm signal period, 1 Vpp, 32768-fold signal subdivision when used with XPS controller |
| Home Switch |
Optical, at center of travel, on encoder's fiducial track |
| Cable (m) |
5 (included) |
| MTBF (h) |
20,000 |
Specifications
| Model |
IMS-LM |
IMS-LM-SA |
| Travel Range (mm) |
300, 400, 500, 600,
800, 1000, 1200 |
800, 1000, 1200 |
| Resolution1 (µm) |
0.005 |
| Minimum Incremental Motion (nm) |
20 |
| Bi-directional Repeatability, guaranteed2 (µm) |
300 to 600mm 0.5 or ± 0.25
800 to 1200mm 1 or ± 0.5 |
1 or ± 0.5 |
| On-Axis Accuracy, guaranteed2 (µm) |
300mm 9 or ± 4.5
400mm 11 or ± 5.5
500mm 15 or ± 7.5
600mm 20 or ± 10
800mm 20 or ± 10
1000mm 25 or ± 12.5
1200mm 30 or ± 15 |
800mm 20 or ± 10
1000mm 25 or ± 12.5
1200mm 30 or ± 15 |
| Maximum Speed (mm/s) |
500 |
| Maximum Acceleration, No Load (m/s2) |
20 |
| Max. Force (Cont.) (N) |
60 |
| Max Force (Peak)3 (N) |
120 |
| Pitch, guaranteed2 (µrad)4 |
300mm 250 or ± 125
400mm 250 or ± 125
500mm 250 or ± 125
600mm 300 or ± 150
800mm 500 or ± 250
1000mm 550 or ± 275
1200mm 600 or ± 300 |
800mm 400 or ± 200
1000mm 450 or ± 225
1200mm 500 or ± 250 |
| Yaw, guaranteed2 (µrad)4 |
300mm 200 or ± 100
400mm 250 or ± 125
500mm 300 or ± 150
600mm 450 or ± 225
800mm 300 or ± 150
1000mm 300 or ± 150
1200mm 300 or ± 150 |
800mm 300 or ± 150
1000mm 300 or ± 150
1200mm 300 or ± 150 |
| MTBF (h) |
20,000 |
| Weight (kg) |
17, 17, 23, 23, 25, 28, 32 |
25, 28, 32 |
1 The resolution used internally by the XPS is less than 1nm
2 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, see
Motion Control Metrology Primer3 Peak 22s
4 To obtain arcsec units, divide µrad value by 4.8
For the definition of specifications see
Motion Basics and Standards.
Load Characteristics and Stiffness
|
(M-) IMSxxxLM |
(M-) IMSxxxxLM-SA |
| Cz, Normal center load capacity on bearings |
600 N |
100 N |
| kαx, Compliance in roll |
1 µrad/N.m |
2 µrad/Nm |
| kαy, Compliance in pitch |
0.2 µrad/N.m |
2 µrad/Nm |
| kαz, Compliance in yaw |
1 µrad/N.m |
1 µrad/Nm |
| Q, Off-center load |
QH≤Cz/(1 + D/90) |
| D, cantilever distance in mm |
Note: For the 800 - 1200mm stage versions using only 4 pt mounting, the maximum load allowed to maintain dynamic performance is 10 kg.
XPS Series
|
Model |
Description |
| XPS-C2
|
2-axis Universal Controller/Driver, ethernet |
| XPS-C4
|
4-axis Universal Controller/Driver, ethernet |
| XPS-C6
|
6-axis Universal Controller/Driver, ethernet |
| XPS-C8
|
8-axis Universal Controller/Driver, ethernet |
| XPS-DRV02
|
PWM drive module for brushless motors, 5A/44Vpp max. |
Note: XPS controller requires XPS-DRV02 for each axis with IMS-LM
