The FMS series of precision linear stages is Newport’s latest innovation in high precision motion control technology. These stages address the unique needs of surface metrology applications for smooth motion, low noise, high straightness and flatness. The FMS linear stages run highly flat and straight and combined with steel construction, enable higher accuracy performance. Travel options include 100 mm, 200 mm and 300 mm and can be ordered with either a DC, stepper motor including high accuracy model for applications with very tight tolerances. As with all Newport motorized stages, there is a wide choice of ESP-compatible, integrated controller/driver products, ranging from the single axis SMC100, to the 3-axis ESP301 and high-performance 8-axis XPS Universal Controller.
Featuring steel construction, the FMS linear stages have a very distinct advantage over other stages made with aluminum. It is well known that steel expands less than aluminum when subjected to temperature fluctuations in the operating environment. In addition, a combination of steel and aluminum in the construction of a stage introduces a phenomenon called bi-metallic bending, caused by the different thermal expansion coefficients of metals. Both these reasons led to the use of steel exclusively in the base and other components of the FMS stages. Since all FMS components are made from steel,all these components are expected to expand at the same rate when the operating temperature fluctuates, thereby eliminating bi-metallic bending and the associated inaccuracies and non-flat behavior.
The cross roller bearings in the FMS come standard with an anti-creep feature that ensures high reliability by eliminating bearing cage migration and the need for recentering the bearings. Moreover, this enables optimum bearing contact that results in superior repeatability of straightness, flatness, pitch and yaw over the life of the FMS. The FMS stages have a nominal speed of up to 100 mm/s, easily improving throughput compared to other products in the market. Controlling with Newport integrated motion controllers and drivers like the ESP301 or the XPS, adds more flexibility in gathering metrology data. The FMS linear stages are exceptional solutions for applications in surface metrology, surface profilometry and tribology. Available in CC, PP and PPHA models.
Design Details
| Base Material |
Stainless Steel |
| Bearings |
Crossed Roller Bearings |
| Drive Mechanism |
8mm, precision ground ball screw |
| Drive Screw Pitch (mm) |
2 |
| Feedback |
DC: Screw mounted rotary encoder, 4000 cts/rev, index pulse
PP: No feedback
PPHA: Steel scale, 50 nm |
| Origin |
PP: optical, located ~9.5 mm from negative software limit
CC & PPHA: Optical, located ~10.5 mm from negative software limit |
| Drive Type |
DC Servo
Stepper |
| Weight |
100mm: 6.5kg, 200mm: 7.7kg, 300mm: 8.9kg |
| Cable (m) |
3 (included) |
Specifications
|
Model |
FMS-CC Models |
FMS-PP Models |
FMS-PPHA Models |
| Travel Range (mm) |
100-300 |
| Minimum Incremental Motion, Linear (µm) |
0.5 |
0.1 |
0.1 |
| Uni-directional Repeatability, Guaranteed (µm) |
1.5 |
1.5 |
0.2 |
| Bi-directional Repeatability, guaranteed (µm) |
3 or ± 1.5 |
4.5 or ± 2.25 µm |
0.5 or ± 0.25 µm |
| Maximum Speed (mm/s) |
100 |
20 |
50 |
|
Model |
FMS100 |
FMS200 |
FMS300 |
| On-Axis Accuracy (CC and PP), guaranteed (µm) |
6 or ± 3.0 |
10 or ± 5.0 |
13 or ± 6.5 |
| On-Axis Accuracy ( PPHA), guaranteed (µm) |
1 or ± 0.5 |
2 or ± 1.0 |
3 or ± 1.5 |
| Straightness, Flatness, guaranteed (µm) |
1.5 or ± .75 |
3.0 or ± 1.5 |
6 or ± 3.0 |
| Pitch, guaranteed (µrad) |
80 or ± 40 |
100 or ± 50 |
120 or ± 60 |
| Yaw, guaranteed (µrad) |
20 or ± 10 |
30 or ± 15 |
40 or ± 20 |
For the definition of specifications see
Motion Basics and Standards.
Load Characteristics and Stiffness
| Model |
FMS |
| Cz, Normal centered load capacity |
150 N |
| -Cx, +Cx, Axial load capacity |
30 N |
| Kαx, Compliance in roll |
5 µrad/Nm |
| Kαy, Compliance in pitch |
5 µrad/Nm |
| Kαz, Compliance in yaw |
5 µrad/Nm |
| Q, Off-center load |
Q ≤ Cz/(1+D/80) |
| Where D = Cantilever distance in mm |
Ordering Information
| | Model | Description | avail raw | Availability | price raw | Price | Qty. MULTI ADD |
|---|
|
FMS100CC |
Metrology Linear Stage, 100 mm Travel, DC Motor, FMS Series |
0 |
In Stock |
5560 |
$5,560.00 |
ADD |
|
FMS100PP |
Metrology Linear Stage, 100 mm Travel, Stepper Motor, FMS Series |
0 |
In Stock |
5254 |
$5,254.00 |
ADD |
|
FMS100PPHA |
Metrology Linear Stage, High Accuracy, 100 mm Travel, Stepper Motor, FMS Series |
0 |
In Stock |
7350 |
$7,350.00 |
ADD |
|
FMS200CC |
Metrology Linear Stage, 200 mm Travel, DC Motor, FMS Series |
0 |
In Stock |
6274 |
$6,274.00 |
ADD |
|
FMS200PP |
Metrology Linear Stage, 200 mm Travel, Stepper Motor, FMS Series |
0 |
In Stock |
5968 |
$5,968.00 |
ADD |
|
FMS200PPHA |
Metrology Linear Stage, High Accuracy, 200 mm Travel, Stepper Motor, FMS Series |
99 |
Call |
8375 |
$8,375.00 |
ADD |
|
FMS300CC |
Metrology Linear Stage, 300 mm Travel, DC Motor, FMS Series |
0 |
In Stock |
7013 |
$7,013.00 |
ADD |
|
FMS300PP |
Metrology Linear Stage, 300 mm Travel, Stepper Motor, FMS Series |
0 |
In Stock |
6809 |
$6,809.00 |
ADD |
|
FMS300PPHA |
Metrology Linear Stage, High Accuracy, 300 mm Travel, Stepper Motor, FMS Series |
1 |
1 Week |
9425 |
$9,425.00 |
ADD |
Compatible Controllers and Driver Electronics
Note: Check the controller tab to see the compatible controller models
Controller Compatibility
All FMS Series Metrology Linear Stages are compatible with the XPS Universal High-Performance Motion Controller/Driver, ESP301 and SMC100. Refer to the table below for additional information.
|
Family |
Max. Power Consumption
(W) |
XPS1 driver module |
Compatibility |
|
ESP3011 |
SMC100CC1 |
SMC100PP1 |
NSC200 |
| FMS-CC |
50 |
XPS-DRV01 |
X |
X |
|
|
| FMS-PP |
20 |
XPS-DRV01 |
X |
|
Reducsed2 |
|
| FMS-PPHA |
20 |
XPS-DRV01 |
|
|
|
|
1. Enhanced System Performance (ESP) Controller
2. Compatible, but MIM is increased to 1/20th of a full step
XPS Series
|
Model |
Description |
| XPS-Q2
|
2-axis Universal Controller/Driver, ethernet |
| XPS-Q4
|
4-axis Universal Controller/Driver, ethernet |
| XPS-Q6
|
6-axis Universal Controller/Driver, ethernet |
| XPS-Q8
|
8-axis Universal Controller/Driver, ethernet |
| XPS-DRV01
|
PWM drive module for DC brush and stepper motors, 3A/48V max. |
Note: XPS-DRVxx card is required for each axis when used with XPS
ESP301 Series
|
Model |
Description |
| ESP301-1G
|
ESP301 Motor Controller/Driver, 1 axis, w/ GPIB and USB |
| ESP301-1N
|
ESP301 Motor Controller/Driver, 1 axis, USB |
| ESP301-2G
|
ESP301 Motor Controller/Driver, 2 axis, w/ GPIB and USB |
| ESP301-2N
|
ESP301 Motor Controller/Driver, 2 axis, USB |
| ESP301-3G
|
ESP301 Motor Controller/Driver, 3 axis, w/ GPIB and USB |
| ESP301-3N
|
ESP301 Motor Controller/Driver, 3 axis, USB |
SMC Series
|
Model |
Description |
| SMC100CC
|
Single-axis DC motor controller/driver |
| SMC100PP
|
Single-axis stepper motor controller/driver |
Note: Refer to SMC series product page for power supply and available cable accessories
