Specifications

Features

All Steel Body

The all steel construction allows for extreme stiffness and thermal stability, by eliminating bi-metallic bending. Due to the hardness of steel, it can be machined flatter to give excellent trajectory.

Anti-creep Crossed Roller Bearings

To ensure the most accurate trajectory control, FMS stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.

Backlash-free Precision Ground Ballscrew

These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.

Individual Stage Metrology Report is Included

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

Plug and Play - ESP Compatible

The FMS is an ESP-compatible stage wherein when connected to a Newport controller, it is quickly recognized and its operating parameters are configured without the need for user input, facilitating the startup and usability of the FMS. This Plug and Play feature is not only transparent to the use, but it also ensures the safe operation of the stage.

FMS Stage Load Characteristics