ufab-l-micromachining-workstation

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uFAB-L Micromachining Workstation

Specifications

Technical Specs

Wavelength Range
350 to 1100 nm
Beam Diameter (1/e<sup>2</sup>)
5 mm
Attenuation Range
OD0 to OD4 (Computer Controlled)
Travel Range X, Y, Z
150 mm, 150 mm, 13 mm
Maximum Speed X, Y, Z
50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z
0.10 µm, 0.10 µm, 0.05 µm
Galvanometric Mirror Marking Speed
2 m/s

Galvanometric Mirror Repeatability
< 2 µrad
Angular Resolution
2.8 µrad for angle range of +/- 0.36 rad
Weight
86 kg
Dimensions
762 x 762 x 762 mm

Wavelength Range
350 to 1100 nm
Beam Diameter (1/e<sup>2</sup>)
5 mm
Attenuation Range
OD0 to OD4 (Computer Controlled)
Travel Range X, Y, Z
150 mm, 150 mm, 13 mm
Maximum Speed X, Y, Z
50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z
0.10 µm, 0.10 µm, 0.05 µm
Galvanometric Mirror Marking Speed
2 m/s

Galvanometric Mirror Repeatability
< 2 µrad
Angular Resolution
2.8 µrad for angle range of +/- 0.36 rad
Weight
86 kg
Dimensions
762 x 762 x 762 mm