hybryx-xy-hybrid-air-bearing-stage

HybrYX® Hybrid Air Bearing XY Stage

Specifications

Technical Specs

Pitch
15 µrad
Surface Flatness
0.6 µm
Travel Range
350 mm

Travel Range Y
650 mm

Pitch
15 µrad
Surface Flatness
0.6 µm
Travel Range
350 mm

Travel Range Y
650 mm

Resources & Downloads

Literature

High Performance Air Bearing Stage Capabilities and Solutions(11.9 MB, PDF)

Technical Articles

Bringing Hybrid Bonding Into Production(1.9 MB, PDF)