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253B Downstream Exhaust Throttle Valves
253B Downstream Exhaust Throttle Valves
This product is only available on www.mks.com
- Flapper is positioned to modulate gas flow
- Patented non-linear actuator
- Provides smooth linear pressure control See All Features
Specifications
- TypeExhaust Throttle Valve
- Valve DriveMechanical (non belt) drive with integral cosine generator
- Valve Speed7.5 s
- Resolution1/10,000
- Helium Leak Rate1 x 10-8 scc/sec
- Operating Temperature RangeValve Body: 0 - 90°C
Valve Motor:0 - 70°C - Maximum Differential Pressure Across Valve1 Atmosphere