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253B Downstream Exhaust Throttle Valves

Overview

The 253B Exhaust Throttle Valve regulates the removal of gas from a processing system. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control.

Please see 253B Throttle Valves on mks.com for additional configurations.

Flapper is positioned to modulate gas flow
Patented non-linear actuator
Provides smooth linear pressure control

Specifications

Type

Exhaust Throttle Valve
Valve Drive

Mechanical (non belt) drive with integral cosine generator
Valve Speed

7.5 s
Resolution

1/10,000

Helium Leak Rate

1 x 10-8 scc/sec
Operating Temperature Range

Valve Body: 0 - 90°C
Valve Motor:0 - 70°C
Maximum Differential Pressure Across Valve

1 Atmosphere

Specifications

Type

Exhaust Throttle Valve
Valve Drive

Mechanical (non belt) drive with integral cosine generator
Valve Speed

7.5 s
Resolution

1/10,000

Helium Leak Rate

1 x 10-8 scc/sec
Operating Temperature Range

Valve Body: 0 - 90°C
Valve Motor:0 - 70°C
Maximum Differential Pressure Across Valve

1 Atmosphere

Product Comparison

253B Downstream Exhaust Throttle Valves

253B Downstream Exhaust Throttle Valves

Overview

Specifications

Specifications