Sorry, this family of products is no longer available.
ECv Compact Electric Bellows-sealed Isolation Valves
ECv Compact Electric Bellows-sealed Isolation Valves
This product is only available on www.mks.com
- DC current valve actuation with no need for house air or bottled gas supply
- Proven coil saver circuit minimizes heat generation, reduces power consumption
- Electric actuation accessory provides silent isolation for any low vibration requirement
- Flexible actuator assembly design can be configured as normally open/closed
- High conductance body and formed bellows design exceeds 1,000,000 cycles See All Features
Specifications
- TypeVacuum Isolation Valve
- OrientationSeals against atmosphere at either port
- Flange TypeISO-KF
- Vacuum Range10-9 Torr to Atmosphere
- Solenoid Valve Coil Power24 VDC
- Valve ActuationElectromagnetic, Normally Closed
- Actuation Time60 msec (opening/closing)
- Blow-By Pressure35 psi
- Nose Seal MaterialViton
- Bonnet Seal MaterialViton
- Limit SwitchYes
- Operating Temperature Range-26° to 60°C
- Maximum Bakeout Temperature150°C (with solenoid coil removed)
- Typical Life1,000,000 cycles
- Power Requirements32 Watts (initial) 7 Watts (running)