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Specifications

  • Type
    Residual Gas Analyzer
  • Measurement Technique
    Mass Spectrometry
  • Mass Range
    1-100 or 1-200 amu
  • Filaments
    Tungsten or Thoria Coated Iridium
  • Software
    Built-in web applications allowing RGA control and data acquisition without installed software using web browser on any PC Optional Easy View Software available
  • Filter length
    4 in. (100 mm)
  • Maximum Analyzer Operating Pressure
    1e-4 Torr (1.3e-4 mbar)
  • Ion Source Sensitivity
    2e-4 A/mbar
  • Mass Stability
    ±0.1 amu over 8 hours at stable ambient
  • Minimum Detectable Concentration
    2e-11 Torr (2.6e-11 mbar) Faraday
    5e-14 Torr (6.7e-14 mbar) Multiplier
  • Resolution
    ±0.1 amu over 8 hours at stable ambient
  • Bake Out Temperature
    250°C with electronics removed
  • Operating Temperature Range
    200°C Faraday only with electronics 10-40°C
    150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
    90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
  • Operating Temperature
    200°C Faraday only with electronics 10-40°C
    150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
    90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
  • Data Acquisition Method
    Dedicated realtime acquisition processor
  • Data Acquisition Speed
    <3ms per point for analog scans
  • Data Collection Methods
    Analog scanning, full mass range 8, 16 or 32 points/amu
    Barchart scanning
    Peak-jump collection of up to 15 peaks per scan
  • Settling Time
    <20ms
  • Control Method
    CE operating system processor with web-server interface
  • Command Structure
    Documented ASCII command protocols
  • Electron Energy & Emission Current
    40 or 70eV fixed (set in web configuration)
  • Filament Protection
    Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe
  • Communication
    10/100 Base-T Ethernet, static or automatically assigned IP addresses
  • Compliance
    CE (control unit)

Accessories

EasyView Residual Gas Analyzer Software

RGA software platform for use with MKS' range of residual gas analyzers (RGAs).