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Laser Micromachining Workstation, µFAB-L
The µFAB-L laser Micromachining Workstation is a table-top easy to use micromachining tool for various applied materials research fields. This device employs high performance galvanometer scanners for fast laser writing and a XYZ stage assembly for sample positioning. The included software allows importing several types of CAD files and permits large areas microfabrication by stitching galvos and stages motion.
Specifications
Wavelength Range
350 to 1100 nm
Beam Diameter (1/e<sup>2</sup>)
5 mm
Attenuation Range
OD0 to OD4 (Computer Controlled)
Travel Range X, Y, Z
150 mm, 150 mm, 13 mm
Maximum Speed X, Y, Z
50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z
0.10 µm, 0.10 µm, 0.05 µm
Galvanometric Mirror Marking Speed
2 m/s
Wavelength Range
350 to 1100 nm
Beam Diameter (1/e<sup>2</sup>)
5 mm
Attenuation Range
OD0 to OD4 (Computer Controlled)
Travel Range X, Y, Z
150 mm, 150 mm, 13 mm
Maximum Speed X, Y, Z
50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z
0.10 µm, 0.10 µm, 0.05 µm
Galvanometric Mirror Marking Speed
2 m/s
