Piezo Liner Stage, 400 µm Nanopositioning, Strain-gauge, Vacuum

Technical Specs

  • Axes of Travel
    X
  • Travel Range
    0.4 mm  
  • Nonlinearity
    0.09%
  • Axial Load Capacity
    64 N
  • Axial Stiffness
    0.16 N/µm
  • Vertical Load Capacity
    10 N  
  • Push Force
    300 N
  • Pull Force
    30 N
  • Feedback
    Strain-gauge
  • Cable Length
    2 m
  • Vacuum Compatibility
    10-6 hPa
  • Capacitance
    5.2 µF  
  • Closed Loop Resolution
    4 nm  
  • Closed Loop Travel
    320 µm  
  • Open Loop Resolution
    0.4 nm  
  • Open Loop Travel
    400 µm  
  • Resonant Frequency, Unloaded
    200 Hz
  • RoHS
    Compliant
  • Weight
    180 g