Piezo Stack Actuator, Vacuum, 0.05 mm Travel Range, Strain-gauge

  • Travel Range
    0.05 mm  
  • Axial Load Capacity
    1000 N  
  • Load Capacity, Pull
    150 N  
  • Axial Stiffness
    20 N/µm  
  • Capacitance
    5.4 µF
  • Resonant Frequency
    8000 Hz
  • Closed Loop Repeatability
    20 nm  
  • Closed Loop Resolution
    1.0 nm  
  • Open Loop Resolution
    0.1 nm  
  • Closed Loop Travel Range
    40 µm  
  • Vacuum Compatibility
    10-6 Torr
  • Cable Length
    2 m