Piezo Actuator, Vacuum, 100 µm Nano-Positioning, Strain-gauge

Technical Specs

  • Travel Range
    0.1 mm  
  • Axial Load Capacity
    1000 N  
  • Load Capacity, Pull
    150 N  
  • Axial Stiffness
    10 N/µm  
  • Capacitance
    9.0 µF
  • Resonant Frequency
    3000 Hz
  • Cable Length
    2 m
  • Closed Loop Repeatability
    28 nm  
  • Closed Loop Resolution
    2.0 nm  
  • Open Loop Resolution
    0.2 nm  
  • Closed Loop Travel Range
    80 µm  
  • Vacuum Compatibility
    10-6 hPa