Mass Flow Controller, 5000 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Metal Seal

G Series

Mass Flow Controller

Nitrogen (N₂)

5000 sccm

150 psig

10 to 40 psid

1000 psig

1500 psig

4 VCR Male

2% to 100% of Full Scale

0 to 5 VDC

15-pin Type D Male

±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale

± 0.3% of Reading

0.1% of Full Scale

<0.05% of Full Scale/°C

<0.08% of Reading/°C

<0.02% of Reading/psi

<750 msec, typical above 5% Full Scale

30 minutes

10 to 50°C

0 to 95% Relative Humidity, non-condensing

-20 to 80°C

<1 x 10-9 (scc/sec He)

Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere

316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45

Metal

10µ inch average Ra (electropolished)

3 lbs (1.4 kg)

Yes