The G-Series GM50A013101SM020 metal-sealed, digitally-controlled mass flow controller has a Full Scale Flow Range of 10 sccm and a control range of 0.2 to 10 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. It utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
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GM50A013101SMM020 - Drawings
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GM50A013101SMM020
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Mass Flow Controller, 10 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal