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Mass Flow Controller, 100 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Viton Seal

Type
Mass Flow Controller
Calibration Gas
N2 (or equivalent)
Full Scale Flow Range
100 sccm
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Fitting Type
0.25 in. Swagelok-style
Control Range
2 - 100 sccm
Flow Input Output Signal
0 - 5 VDC
Connector Type
15-pin D-sub (tied grounds)
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C

Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature Range
10 - 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature Range
-20 to 80°C
External Leak Integrity
<1 x 10^-09 (scc/sec He)
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Seal Material
Viton
CE Certified
Yes

Type
Mass Flow Controller
Calibration Gas
N2 (or equivalent)
Full Scale Flow Range
100 sccm
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Fitting Type
0.25 in. Swagelok-style
Control Range
2 - 100 sccm
Flow Input Output Signal
0 - 5 VDC
Connector Type
15-pin D-sub (tied grounds)
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C

Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi
Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature Range
10 - 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature Range
-20 to 80°C
External Leak Integrity
<1 x 10^-09 (scc/sec He)
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Seal Material
Viton
CE Certified
Yes

Model: GE50A013102SMV020