Mass Flow Controller, 10 sccm N2, 4 VCR Male, 0-5 VDC, DB15, Viton Seal
The G-Series GE50A013101RMV020 Mass Flow Controller features a full scale flow range of 10 sccm and is calibrated for Nitrogen (N2) gas. It has a Swagelok 4 VCR male fitting and 15-pin type D connector with tied grounds for 0 to 5 VDC mass flow control. The normally closed valve features Viton seal materials. G Series mass flow controllers utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the nitrogen calibration gas.
Specifications
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Series
G Series
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Type
Mass Flow Controller
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Calibration Gas
N2
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Full Scale Flow Range
10 sccm
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Maximum Inlet Pressure
150 psig
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Normal Operating Pressure Differential
10 to 40 psid
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Proof Pressure
1000 psig
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Burst Pressure
1500 psig
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Fitting Type
4 VCR Male
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Control Range
0.2 - 10 sccm
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Flow Input Output Signal
0-5 VDC
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Connector Type
15-pin Type D (Tied Grounds)
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Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
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Repeatability
±0.3% of Reading
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Resolution
0.1% of Full Scale
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Zero Temperature Coefficient
<0.05% of Full Scale/°C
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Span Temperature Coefficient
<0.08% of Reading/°C
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Inlet Pressure Coefficient
<0.02% of Reading/psi
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Typical Settling Time
<750 msec, typical above 5% Full Scale
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Warm-up Time
30 minutes
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Operating Temperature Range
10 - 50°C
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Storage Humidity
0 to 95% Relative Humidity, non-condensing
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Storage Temperature Range
-20 to 80°C
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External Leak Integrity
<1 x 10-09 (scc/sec He)
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Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
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Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
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Seal Material
Viton
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Surface Finish
16µ inch average Ra
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Weight
3 lbs (1.4 kg)
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CE Certified
Yes
-
Series
G Series
-
Type
Mass Flow Controller
-
Calibration Gas
N2
-
Full Scale Flow Range
10 sccm
-
Maximum Inlet Pressure
150 psig
-
Normal Operating Pressure Differential
10 to 40 psid
-
Proof Pressure
1000 psig
-
Burst Pressure
1500 psig
-
Fitting Type
4 VCR Male
-
Control Range
0.2 - 10 sccm
-
Flow Input Output Signal
0-5 VDC
-
Connector Type
15-pin Type D (Tied Grounds)
-
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
-
Repeatability
±0.3% of Reading
-
Resolution
0.1% of Full Scale
-
Zero Temperature Coefficient
<0.05% of Full Scale/°C
-
Span Temperature Coefficient
<0.08% of Reading/°C
-
Inlet Pressure Coefficient
<0.02% of Reading/psi
-
Typical Settling Time
<750 msec, typical above 5% Full Scale
-
Warm-up Time
30 minutes
-
Operating Temperature Range
10 - 50°C
-
Storage Humidity
0 to 95% Relative Humidity, non-condensing
-
Storage Temperature Range
-20 to 80°C
-
External Leak Integrity
<1 x 10-09 (scc/sec He)
-
Leak Integrity Through Closed Valve
Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
-
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
-
Seal Material
Viton
-
Surface Finish
16µ inch average Ra
-
Weight
3 lbs (1.4 kg)
-
CE Certified
Yes