Residual Gas Analyzer, 1-200 amu, Faraday Detector, Open Ion Source
The e-Vision 2 EV2-210-000FT is one of a new range of residual gas analysis products, from MKS Instruments, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. It has a Faraday Detector with a mass range of 1-200 amu and an open ion source. e-Vision 2 RGA is designed to provide maximum value for money, collecting data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA.
Specifications
Type
Residual Gas Analyzer
Measurement Technique
Mass Spectrometry
Mass Range
1-200 amu
Detector
Faraday
Ion Source
Open
Filaments
Tungsten
Software
Built-in web application
Filter length
4 in. (100 mm)
Maximum Analyzer Operating Pressure
1e-4 Torr (1.3e-4 mbar)
Ion Source Sensitivity
2e-4 A/mbar
Mass Stability
±0.1 amu over 8 hours at stable ambient
Resolution
Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature
250°C with electronics removed
Operating Temperature Range
200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e-5 mbar
Operating Temperature
200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e-5 mbar
Maximum Operating Conditions
10 - 40°C, 80% RH (non condensing)
Electronics Weight on Flange
1.7 kg
Power
24 VDC, 2A external universal voltage supply (included)
Data Acquisition Method
Dedicated realtime acquisition processor
Data Acquisition Speed
<3 ms per point for analog scans
Data Collection Methods
Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan
Settling Time
<20 ms
Control Method
CE operating system processor with web-server interface
Command Structure
Documented ASCII command protocols
Electron Energy & Emission Current
40 or 70 eV fixed (set in web configuration), 1 mA
Filament Protection
Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe
Communication
10/100 Base-T Ethernet, static or automatically assigned IP addresses
Compliance
CE
Type
Residual Gas Analyzer
Measurement Technique
Mass Spectrometry
Mass Range
1-200 amu
Detector
Faraday
Ion Source
Open
Filaments
Tungsten
Software
Built-in web application
Filter length
4 in. (100 mm)
Maximum Analyzer Operating Pressure
1e-4 Torr (1.3e-4 mbar)
Ion Source Sensitivity
2e-4 A/mbar
Mass Stability
±0.1 amu over 8 hours at stable ambient
Resolution
Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature
250°C with electronics removed
Operating Temperature Range
200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e-5 mbar
Operating Temperature
200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e-5 mbar
Maximum Operating Conditions
10 - 40°C, 80% RH (non condensing)
Electronics Weight on Flange
1.7 kg
Power
24 VDC, 2A external universal voltage supply (included)
Data Acquisition Method
Dedicated realtime acquisition processor
Data Acquisition Speed
<3 ms per point for analog scans
Data Collection Methods
Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan
Settling Time
<20 ms
Control Method
CE operating system processor with web-server interface
Command Structure
Documented ASCII command protocols
Electron Energy & Emission Current
40 or 70 eV fixed (set in web configuration), 1 mA
Filament Protection
Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe
Communication
10/100 Base-T Ethernet, static or automatically assigned IP addresses
Compliance
CE
