This product is only available on www.mks.com
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232, 3 Relays
The 974B-21030 QuadMag Cold Cathode / MicroPirani / Piezo Transducer offers a measurement range from 1x10-8 to 1500 Torr and features a size NW25 ISO-KF flange fitting. It has an RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. The 974B QuadMag has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974B can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.