Picomotor Actuator, Ultra-High Vacuum, 0.5 in., 12 x 0.5 mm Thread

The 8321-UHV Ultra-High Vacuum Picomotor™ Actuator offers 0.5 inch (12.7 mm) travel and can be used in UHV environments (10-9 Torr) as well as for VUV/EUV applications. It is ideal for beam-steering and scientific vacuum motion-control applications. This actuator offers the same better than 30-nm resolution with minimal backlash along with excellent long-term stability and high stiffness, including the ability to maintain their set positions even in the power-off state. And, with tested lifetimes of over 15,000 cycles over a 2-mm round-trip travel, you can integrate them into your system with confidence. 12 x 0.5 mm threads are used for mounting.
Resources & Downloads
Literature
UHV Picomotors(1.6 MB, PDF) 832x-V_832x-UHV Datasheet(1.5 MB, PDF) Picomotor FAQ(3.1 MB, PDF)
Technical Notes
Open vs Closed Loop Picomotors(1.6 MB, PDF)
2D Product Drawings
8321-UHV dwg(692.2 kB, PDF)
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