Picomotor Piezo Linear Actuator, 0.5 in. Travel, 30 nm Res., M12 x 0.5 mm Thread

The 8321 Picomotor Piezo Linear Actuator is an ideal device for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use it with our optomechanical translation stages or your own custom devices. It has better than 30 nm resolution with minimal backlash over a 0.5 inch (12.7 mm) travel range, and can exert a 5 lb. (22-N) force. The M12 x 0.5mm threading of the Model 8321 lets it fit into metric micrometer mounting holes.
Resources & Downloads
Technical Notes
Open vs Closed Loop Picomotors(1.6 MB, PDF)
Certificates
MKS RoHS2-2021 Certificate for 83xx Picomotors.pdf(260.4 kB, PDF) EU27 Declaration of Conformity 8301.pdf(142.8 kB, PDF)
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