The 100006126 Vacuum Valve Internal Assembly Kit includes a Viton seal set. It is designed for 150 or 160 vacuum valves with a NW63 port.
100006126 is compatible with these MKS valves:
| 152-0063C | 152-0063P | 152-0063T | 152-1063C |
| 152-1063T | 153-0063C-100V/50 | 153-0063C-120V/50-60 | 153-0063C-208V/50-60 |
| 153-0063C-220V/50-60 | 153-0063C-24V/50-60 | 153-0063C-24VDC | 153-0063P-100V/50 |
| 153-0063P-120V/50-60 | 153-0063P-208V/50-60 | 153-0063P-220V/50-60 | 153-0063P-24V/50-60 |
| 153-0063P-24VDC | 153-0063T-100V/50 | 153-0063T-120V/50-60 | 153-0063T-208V/50-60 |
| 153-0063T-220V/50-60 | 153-0063T-24V/50-60 | 153-0063T-24VDC | 153-1063C-100V/50 |
| 153-1063C-120V/50-60 | 153-1063C-208V/50-60 | 153-1063C-220V/50-60 | 153-1063C-24V/50-60 |
| 153-1063C-24VDC | 153-1063P-100V/50 | 153-1063P-120V/50-60 | 153-1063P-208V/50-60 |
| 153-1063P-220V/50-60 | 153-1063P-24V/50-60 | 153-1063T-100V/50 | 153-1063T-120V/50-60 |
| 153-1063T-208V/50-60 | 153-1063T-220V/50-60 | 153-1063T-24V/50-60 | 153-1063T-24VDC |
| 162-0063C | 162-0063P | 162-0063T | 162-1063C |
| 162-1063P | 162-1063T | 163-0063C-100V/50 | 163-0063C-120V/50-60 |
| 163-0063C-208V/50-60 | 163-0063C-220V/50-60 | 163-0063C-24V/50-60 | 163-0063C-24VDC |
| 163-0063P-100V/50 | 163-0063P-120V/50-60 | 163-0063P-208V/50-60 | 163-0063P-220V/50-60 |
| 163-0063P-24V/50-60 | 163-0063P-24VDC | 163-0063T-100V/50 | 163-0063T-120V/50-60 |
| 163-0063T-208V/50-60 | 163-0063T-220V/50-60 | 163-0063T-24V/50-60 | 163-0063T-24VDC |
| 163-1063C-100V/50 | 163-1063C-120V/50-60 | 163-1063C-208V/50-60 | 163-1063C-220V/50-60 |
| 163-1063C-24V/50-60 | 163-1063C-24VDC | 163-1063K-24VDC | 163-1063P-100V/50 |
| 163-1063P-120V/50-60 | 163-1063P-208V/50-60 | 163-1063P-220V/50-60 | 163-1063P-24V/50-60 |
| 163-1063P-24VDC | 163-1063T-100V/50 | 163-1063T-120V/50-60 | 163-1063T-208V/50-60 |
| 163-1063T-220V/50-60 | 163-1063T-24V/50-60 | 163-1063T-24VDC |
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