Compare Model Drawings, CAD & Specs Availability Price
9067-COM-V
Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, No Baseplate
$920
In Stock
 9067-COM-V Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, No Baseplate
In Stock
 $920
9067-X-V
Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum
$1,015
In Stock
 9067-X-V Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum
In Stock
 $1,015
9067-XY-R-V
XY Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum
$1,904
In Stock
 9067-XY-R-V XY Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum
In Stock
 $1,904
9067-XY-L-V
XY Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, Left-Handed
$1,904
4 Weeks
 9067-XY-L-V XY Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, Left-Handed
4 Weeks
 $1,904
9067-XYZ-R-V
XYZ Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum
$2,976
3 Weeks
 9067-XYZ-R-V XYZ Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum
3 Weeks
 $2,976
9067-XYZ-L-V
XYZ Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, Left-Handed
$2,976
In Stock
 9067-XYZ-L-V XYZ Linear Stage, 1.0 in. Travel, 8-32 and 1/4-20, Vacuum, Left-Handed
In Stock
 $2,976
9067-COM-V-M
Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum, No Baseplate
$920
In Stock
 9067-COM-V-M Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum, No Baseplate
In Stock
 $920
9067-X-V-M
Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum
$1,015
In Stock
 9067-X-V-M Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum
In Stock
 $1,015
9067-XY-R-V-M
XY Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum
$1,904
Contact Us
 9067-XY-R-V-M XY Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum
Contact Us
 $1,904
9067-XY-L-V-M
XY Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum, Left-Handed
$1,904
4 Weeks
 9067-XY-L-V-M XY Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum, Left-Handed
4 Weeks
 $1,904
9067-XYZ-R-V-M
XYZ Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum
$2,976
In Stock
 9067-XYZ-R-V-M XYZ Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum
In Stock
 $2,976
9067-XYZ-L-V-M
XYZ Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum, Left-Handed
$2,976
Contact Us
 9067-XYZ-L-V-M XYZ Linear Stage, 25.4 mm Travel, M4 and M6, Vacuum, Left-Handed
Contact Us
 $2,976
Notes:

Actuators are not included. Please see specifications for recommended actuators.

Specifications

  • Maximum Stage Travel
    25.4 mm
  • Centered Normal Load Capacity
    222 N
  • Vertical Axial Load Capacity
    80 N
  • Angular Deviation
    150 µrad
  • Material
    Stainless Steel
  • Bearings
    Crossed-Roller Bearings
  • Vacuum Compatibility
    10-6 hPa
  • Recommended Piezo Actuator
    8302-V

Features

Clean Assembled Using Low vapor Pressure Grease

Vacuum compatible crossed roller bearing stages are clean assembled and made with low vapor pressure grease appropriate for use in vacuum pressures as low as down to 10-6 Torr. 9066 and 9067 versions are also available without a baseplate for easier integration into the volume restrictions typical of vacuum systems.

Precision Control and Smooth Translation

These vacuum compatible, crossed-roller translation stages provide low profile, yet solid and sturdy linear translation. Like their standard versions, the weight load rests on the actuators of the stages to support load capacities up to 50 lb. in both horizontal and vertical orientations (including the X-configured stage), and can be locked in place. This also allows for the high load capacity of up to 50 lb. The micron-scale travel precision typically needed is achieved with an angular deviation of <150 µrad and straight-line accuracy better than 3 microns.

Right or Left Handed Stage Configurations

These stages come in mirror-image right and left-hand versions for more flexibility in how you lay out your experiment on the table, so there's never a need to reach over your work to make adjustments on the far side. 

Low Profile X Translation Stages

We offer low profile -COM commercial versions of these stages designed to fit directly into your system. They not include the mounting base plate for reduced height and lower cost.

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