ILS 50-250 mm Travel Aluminum DC Motor Linear Stages
ILS 50-250 mm Travel Aluminum DC Motor Linear Stages
The ILS Series of fast, sub-micron resolution linear stages are constructed with a light, stiff aluminum body and reliable components that prevent thermal bending effects. They provide 50-250 mm travel and are capable of high-duty cycles in light industrial applications. These DC motor stages are suited for applications that need faster speeds and higher repeatability. For even more demanding precision positioning requirements, an integrated linear scale is available to provide very fine resolution and repeatability.
- Stiff, FEM optimized extruded aluminum body prevents thermal bending effects
- Preloaded, backlash-free ballscrew drive allows rapid movements
- Precision recirculating ball bearing slides provide accurate linear motion
- Plug and Play - ESP compatible
- DC motors for high speed and linear encoder version for very fine resolution See All Features
Compatible Controllers
The ILS-CC and ILS-HA versions are compatible with XPS-D, XPS-RLD and legacy XPS-RL motion controllers. To use an XPS controller, the appropriate driver module (sold separately from the controller) shown in the table below must drive the stage.
The ILS-CC and ILS-HA are also plug-and-play compatible with the ESP302 and legacy ESP301 motion controllers.
The ILS-CCL is compatible only with the
| Version | Maximum Power Consumption (W) | Compatible XPS-D or XPS-RLD Driver Module | Compatible XPS-RL Driver Module | ESP302 or ESP301 Compatibility | SMC100 Compatibility |
|---|---|---|---|---|---|
| ILS-CCL | 30 | No | No | No | |
| ILS-CC | 70 | Yes | No | ||
| ILS-HA | 60 | Yes | No |
Specifications
| Models |  | |  | | | |
|---|---|---|---|---|---|---|
| Travel Range | 50 mm | 100 mm | 150 mm | 200 mm | 250 mm | |
| Maximum Speed1 | 100 mm/s | 100 mm/s | 100 mm/s | 100 mm/s | 100 mm/s | |
| Minimum Incremental Motion | 1000 nm | 1000 nm | 1000 nm | 1000 nm | 1000 nm | |
| Centered Load Capacity | 250 N | 250 N | 250 N | 250 N | 250 N | |
| Axial Load Capacity (+Cx) | 40 N | 40 N | 40 N | 40 N | 40 N | |
| Inverse Axial Load Capacity (-Cx) | -40 N | -40 N | -40 N | -40 N | -40 N | |
| Accuracy, Typical | ±0.6 µm | ±0.8 µm | ±1.5 µm | ±1.2 µm | ±1.7 µm | |
| Accuracy, Guaranteed | ±1.5 µm | ±2.0 µm | ±2.5 µm | ±3.7 µm | ±5.0 µm | |
| Uni-directional Repeatability, Typical | ±0.20 µm | ±0.25 µm | ±0.25 µm | ±0.35 µm | ±0.35 µm | |
| Uni-directional Repeatability, Guaranteed | ±0.50 µm | ±0.50 µm | ±0.50 µm | ±0.5 µm | ±0.5 µm | |
| Bi-directional Repeatability, Typical | ±0.40 µm | ±0.40 µm | ±0.45 µm | ±0.45 µm | ±0.60 µm | |
| Bi-directional Repeatability, Guaranteed | ±1.0 µm | ±1.0 µm | ±1.0 µm | ±1.0 µm | ±1.0 µm | |
| Pitch, Typical | ±15 µrad | ±20 µrad | ±37 µrad | ±37 µrad | ±42 µrad | |
| Pitch, Guaranteed | ±25 µrad | ±50 µrad | ±75 µrad | ±100 µrad | ±125 µrad | |
| Compliance in Pitch | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | |
| Yaw, Typical | ±12 µrad | ±17 µrad | ±20 µrad | ±25 µrad | ±25 µrad | |
| Yaw, Guaranteed | ±25 µrad | ±37 µrad | ±65 µrad | ±80 µrad | ±95 µrad | |
| Compliance in Yaw | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | |
| Compliance in Roll | 15 µrad/Nm | 15 µrad/Nm | 15 µrad/Nm | 15 µrad/Nm | 15 µrad/Nm | |
| Origin Repeatability | ±0.5 µm | ±0.5 µm | ±0.5 µm | ±0.5 µm | ±0.5 µm | |
| Cable Length | 3 m | 3 m | 3 m | 3 m | 3 m | |
| Thread Type2 | 1/4-20 | 1/4-20 | 1/4-20 | 1/4-20 | 1/4-20 | |
| Weight | 4.2 kg | 4.5 kg | 4.8 kg | 5.1 kg | 5.4 kg | |
| MTBF | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | |
| RoHS |
Notes:
Also available in ILS-CCL versions.
- Max speed is reduced to 50mm/sec for ILS-CCL versions
- Also available in a metric M- version.
| Models | | | | | | |
|---|---|---|---|---|---|---|
| Travel Range | 50 mm | 100 mm | 150 mm | 200 mm | 250 mm | |
| Maximum Speed | 100 mm/s | 100 mm/s | 100 mm/s | 100 mm/s | 100 mm/s | |
| Minimum Incremental Motion | 300 nm | 300 nm | 300 nm | 300 nm | 300 nm | |
| Centered Load Capacity | 250 N | 250 N | 250 N | 250 N | 250 N | |
| Axial Load Capacity (+Cx) | 40 N | 40 N | 40 N | 40 N | 40 N | |
| Inverse Axial Load Capacity (-Cx) | -40 N | -40 N | -40 N | -40 N | -40 N | |
| Accuracy, Typical | ±0.3 µm | ±0.6 µm | ±1.2 µm | ±0.8 µm | ±1.5 µm | |
| Accuracy, Guaranteed | ±1.25 µm | ±1.5 µm | ±2.0 µm | ±3.0 µm | ±3.75 µm | |
| Uni-directional Repeatability, Guaranteed | ±0.20 µm | ±0.20 µm | ±0.20 µm | ±0.20 µm | ±0.20 µm | |
| Uni-directional Repeatability, Typical | ±0.08 µm | ±0.08 µm | ±0.08 µm | ±0.08 µm | ±0.10 µm | |
| Bi-directional Repeatability, Typical | ±0.10 µm | ±0.10 µm | ±0.15 µm | ±0.15 µm | ±0.15 µm | |
| Bi-directional Repeatability, Guaranteed | ±0.35 µm | ±0.35 µm | ±0.35 µm | ±0.35 µm | ±0.35 µm | |
| Pitch, Typical | ±17 µrad | ±25 µrad | ±50 µrad | ±35 µrad | ±45 µrad | |
| Pitch, Guaranteed | ±25 µrad | ±50 µrad | ±75 µrad | ±100 µrad | ±125 µrad | |
| Compliance in Pitch | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | |
| Yaw, Typical | ±7 µrad | ±17 µrad | ±25 µrad | ±25 µrad | ±30 µrad | |
| Yaw, Guaranteed | ±25 µrad | ±37 µrad | ±65 µrad | ±80 µrad | ±95 µrad | |
| Compliance in Yaw | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | 10 µrad/Nm | |
| Compliance in Roll | 15 µrad/Nm | 15 µrad/Nm | 15 µrad/Nm | 15 µrad/Nm | 15 µrad/Nm | |
| Origin Repeatability | ±0.1 µm | ±0.1 µm | ±0.1 µm | ±0.1 µm | ±0.1 µm | |
| Cable Length | 3 m | 3 m | 3 m | 3 m | 3 m | |
| Thread Type1 | 1/4-20 | 1/4-20 | 1/4-20 | 1/4-20 | 1/4-20 | |
| Weight | 4.2 kg | 4.5 kg | 4.8 kg | 5.1 kg | 5.4 kg | |
| MTBF | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | 20,000 h (25% load, 30% duty cycle) | |
| RoHS |
Notes:
- Also available in a metric M- version.
Features
DC Motor for High Speed and Repeatability
ILS stages with DC Motors are best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio. As such, they are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability. The ILS-CC and ILS-HA DC motor stages are compatible with Newport's XPS and ESP302 motion controllers.
We also offer an ILS-CCL version of these stages with a maximum speed of 50 mm/s that are compatible only with our SMC100CC single axis motion controller.
FEM Optimized Aluminum Body
Finite element method (FEM) was used to optimize the structural design of the ILS Series stage aluminum body allowing for extreme stiffness and minimizing bi-metal bending without compromising weight. The rigid body design reduces deflection under load allowing for the highest performance possible in an aluminum stage design. FEM optimized IMS stages are also available which offer longer travel ranges, higher load capacities, and larger moving platforms.
X-Θy Assembly
An ILS linear stage and an RV rotation stage mounted on an
XZ-Θz Assembly
An ILS250 linear stage (X-axis), a GTS30V vertical stage (Z-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.
Recirculating Ball Bearing Slides
Backlash-free Precision Ground Ballscrew
These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.
Rotary or Linear Encoder Options
ILS-CC stages feature a 4000 pts/rev. encoder mounted directly on the screw in order to prevent screw/motor coupling errors, consequently boosting stage motion accuracy. For more demanding precision positioning requirements, the ILS-HA versions utilize an integrated linear scale that provides 0.1 µm resolution feedback and delivers 0.3 µm minimum incremental motion.
Rotary Encoder
Linear Encoder
Error Mapping Services
For critical positioning applications, Newport offers error mapping upon request for select ILS-HA stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2 °C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.
Other ILS Stage Features
Multi-Axis Assemblies
Newport's standard motorized stages and components can be easily combined to create hundreds of possible multi-axis systems. Depending on the products and application, our standard assemblies are available with the following precision alignments:
- Orthogonality to 50 μrad
- Axes Coincidence to 20 μm
Individual Stage Metrology Report is Included
ILS Stage Load Characteristics
XY Assembly Example
An IMS300 linear stage (X-axis) and ILS150 linear stage (Y-axis) mounted directly to each other for high precision and accuracy in two axes of linear motion.
X-Θz Assembly
An ILS150 linear stage (X-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in one axis of linear motion and one axis of rotary motion.
XYZ Assembly Example
An IMS linear stage (X-axis), an ILS linear stage (Y-axis) mounted directly to the IMS, and an ILS linear stage mounted on an
XY-Θz Assembly Example
An IMS300 linear stage (X-axis), an ILS150 linear stage (Y-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.
ILS Stage Motor Options
ILS Series stages are available with the following motors:
- Stepper Motor (ILS-BPP) - For less demanding applications, a stepper motor can be a more economical solution than a DC motor.
- High-torque DC motor (ILS-CC) - Best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio, DC motors are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability.
- Linear Motor (ILS-LM) - The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws.
| ILS-CC (DC Motor) | ILS-BPP (Stepper Motor) | ILS-LM (Linear Motor) | |
|---|---|---|---|
| Travel Range (mm) | 50 / 100 / 150 / 200 / 250 | 50 / 100 / 150 / 200 / 250 | 100 / 200 / 300 |
| Maximum Speed (mm/s) | 100 | 50 | 500 |
| Minimum Incremental Motion (nm) | 1000 | 1000 | 10 |
| Uni-directional Repeatability, Guaranteed (µm) | ±0.5 | ±0.5 | |
| Bi-directional Repeatability Guaranteed (µm) | ±1.00 | ±1.0 | ±0.3 |
| Accuracy, Guaranteed (µm) | ±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0 | ±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0 | ±1.5 / ±2.0 / ±2.5 |
Accessories
ILS Stage Right Angle Bracket
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | EQ120Right-Angle Bracket, ILS, FC and RV | In Stock FREE 2-day shipping on thousands of products on Newport.com Learn More |
Resources
Application Notes
Fiber Spool Winding Application with Custom 5-Axis Motion System(145.1 kB, PDF) Z-Scan for the Characterization of Transparent Optical Materials(407.7 kB, PDF) Photoresponse Mapping of Photovoltaic Cells(5.4 MB, PDF)
Manuals
EQ120 & EQ180 Brackets User Manual(832.5 kB, PDF) ILS Linear Stages User's Manual(1.9 MB, PDF)
