ILS 50-250 mm Travel Aluminum DC Motor Linear Stages

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high performance ils series motorized linear stage

Overview

The ILS Series of fast, sub-micron resolution linear stages are constructed with a light, stiff aluminum body and reliable components that prevent thermal bending effects. They provide 50-250 mm travel and are capable of high-duty cycles in light industrial applications. These DC motor stages are suited for applications that need faster speeds and higher repeatability. For even more demanding precision positioning requirements, an integrated linear scale is available to provide very fine resolution and repeatability.

Stiff, FEM optimized extruded aluminum body prevents thermal bending effects
Preloaded, backlash-free ballscrew drive allows rapid movements
Precision recirculating ball bearing slides provide accurate linear motion
Plug and Play - ESP compatible
DC motors for high speed and linear encoder version for very fine resolution

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Products

Compare	Model	Compatibility	rankScore	ranking		Travel Range	Feedback	Thread Type	Availability	Price	Brand
ILS50CC Motorized Linear Stage, 50 mm Travel, DC Motor, Rotary Encoder, 1/4-20 $4,771 6 Weeks	ILS50CC Motorized Linear Stage, 50 mm Travel, DC Motor, Rotary Encoder, 1/4-20	IMPERIAL	51.74791	0.074425	2.0	50 mm	Rotary Encoder	1/4-20	6 Weeks	$4,771	Newport
ILS50CCL Motorized Linear Stage, 50 mm, DC Motor, SMC100CC, 1/4-20 $4,771 6 Weeks	ILS50CCL Motorized Linear Stage, 50 mm, DC Motor, SMC100CC, 1/4-20	IMPERIAL	337.6301	0.0115	3.0	50 mm	Rotary Encoder	1/4-20	6 Weeks	$4,771	Newport
ILS50HA Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, 1/4-20 $7,803 6 Weeks	ILS50HA Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL	43.805412	0.008	4.0	50 mm	Linear Encoder	1/4-20	6 Weeks	$7,803	Newport
ILS100CC Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, 1/4-20 $5,122 6 Weeks	ILS100CC Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, 1/4-20	IMPERIAL	57.11382	0.204873333	6.0	100 mm	Rotary Encoder	1/4-20	6 Weeks	$5,122	Newport
ILS100CCL Motorized Linear Stage, 100 mm, DC Motor, SMC100CC, 1/4-20 $5,122 6 Weeks	ILS100CCL Motorized Linear Stage, 100 mm, DC Motor, SMC100CC, 1/4-20	IMPERIAL	344.26453	0.01125	7.0	100 mm	Rotary Encoder	1/4-20	6 Weeks	$5,122	Newport
ILS100HA Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, 1/4-20 $8,146 6 Weeks	ILS100HA Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL	49.17132	0.042583333	8.0	100 mm	Linear Encoder	1/4-20	6 Weeks	$8,146	Newport
ILS150CC Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, 1/4-20 $5,593 6 Weeks	ILS150CC Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, 1/4-20	IMPERIAL	51.74791	0.098646667	10.0	150 mm	Rotary Encoder	1/4-20	6 Weeks	$5,593	Newport
ILS150CCL Motorized Linear Stage, 150 mm, DC Motor, SMC100CC, 1/4-20 $5,593 6 Weeks	ILS150CCL Motorized Linear Stage, 150 mm, DC Motor, SMC100CC, 1/4-20	IMPERIAL	337.6301	0.01225	11.0	150 mm	Rotary Encoder	1/4-20	6 Weeks	$5,593	Newport
ILS150HA Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, 1/4-20 $8,768 6 Weeks	ILS150HA Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL	43.805412	0.014666667	12.0	150 mm	Linear Encoder	1/4-20	6 Weeks	$8,768	Newport
ILS200CC Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, 1/4-20 $6,166 6 Weeks	ILS200CC Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, 1/4-20	IMPERIAL	51.74791	0.060416667	14.0	200 mm	Rotary Encoder	1/4-20	6 Weeks	$6,166	Newport
ILS200CCL Motorized Linear Stage, 200 mm, DC Motor, SMC100CC, 1/4-20 $6,166 6 Weeks	ILS200CCL Motorized Linear Stage, 200 mm, DC Motor, SMC100CC, 1/4-20	IMPERIAL	337.6301	0.012333333	15.0	200 mm	Rotary Encoder	1/4-20	6 Weeks	$6,166	Newport
ILS200HA Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, 1/4-20 $9,490 6 Weeks	ILS200HA Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL	43.805412	0.013083333	16.0	200 mm	Linear Encoder	1/4-20	6 Weeks	$9,490	Newport
ILS250CC Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, 1/4-20 $6,921 4 Weeks	ILS250CC Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, 1/4-20	IMPERIAL	51.74791	0.216896667	18.0	250 mm	Rotary Encoder	1/4-20	4 Weeks	$6,921	Newport
ILS250CCL Motorized Linear Stage, 250 mm, DC Motor, SMC100CC, 1/4-20 $6,921 In Stock	ILS250CCL Motorized Linear Stage, 250 mm, DC Motor, SMC100CC, 1/4-20	IMPERIAL	337.6301	0.049	19.0	250 mm	Rotary Encoder	1/4-20	In Stock	$6,921	Newport
ILS250HA Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, 1/4-20 $10,212 5 Weeks	ILS250HA Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, 1/4-20	IMPERIAL	43.805412	0.015416667	20.0	250 mm	Linear Encoder	1/4-20	5 Weeks	$10,212	Newport
M-ILS50CC Motorized Linear Stage, High Performance, 50 mm Travel, DC Motor, M6 $4,771 6 Weeks	M-ILS50CC Motorized Linear Stage, High Performance, 50 mm Travel, DC Motor, M6	METRIC	51.74791	0.0675	22.0	50 mm	Rotary Encoder	M6	6 Weeks	$4,771	Newport
M-ILS50CCL Motorized Linear Stage, 50 mm, DC Motor, SMC100CC, M6 $4,771 6 Weeks	M-ILS50CCL Motorized Linear Stage, 50 mm, DC Motor, SMC100CC, M6	METRIC	337.6301	0.014666667	23.0	50 mm	Rotary Encoder	M6	6 Weeks	$4,771	Newport
M-ILS50HA Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, M6 $7,803 6 Weeks	M-ILS50HA Motorized Linear Stage, 50 mm Travel, DC Motor, Linear Encoder, M6	METRIC	43.805412	0.022166667	24.0	50 mm	Linear Encoder	M6	6 Weeks	$7,803	Newport
M-ILS100CC Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, M6 $5,122 In Stock	M-ILS100CC Motorized Linear Stage, 100 mm Travel, DC Motor, Rotary Encoder, M6	METRIC	57.11382	0.108333333	26.0	100 mm	Rotary Encoder	M6	In Stock	$5,122	Newport
M-ILS100CCL Motorized Linear Stage, 100 mm, DC Motor, SMC100CC, M6 $5,122 6 Weeks	M-ILS100CCL Motorized Linear Stage, 100 mm, DC Motor, SMC100CC, M6	METRIC	344.26453	0.029416667	27.0	100 mm	Rotary Encoder	M6	6 Weeks	$5,122	Newport
M-ILS100HA Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, M6 $8,146 6 Weeks	M-ILS100HA Motorized Linear Stage, 100 mm Travel, DC Motor, Linear Encoder, M6	METRIC	49.17132	0.045166667	28.0	100 mm	Linear Encoder	M6	6 Weeks	$8,146	Newport
M-ILS150CC Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, M6 $5,593 6 Weeks	M-ILS150CC Motorized Linear Stage, 150 mm Travel, DC Motor, Rotary Encoder, M6	METRIC	51.74791	0.157023333	30.0	150 mm	Rotary Encoder	M6	6 Weeks	$5,593	Newport
M-ILS150CCL Motorized Linear Stage, 150 mm, DC Motor, SMC100CC, M6 $5,593 6 Weeks	M-ILS150CCL Motorized Linear Stage, 150 mm, DC Motor, SMC100CC, M6	METRIC	337.6301	0.016916667	31.0	150 mm	Rotary Encoder	M6	6 Weeks	$5,593	Newport
M-ILS150HA Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, M6 $8,768 6 Weeks	M-ILS150HA Motorized Linear Stage, 150 mm Travel, DC Motor, Linear Encoder, M6	METRIC	43.805412	0.028583333	32.0	150 mm	Linear Encoder	M6	6 Weeks	$8,768	Newport
M-ILS200CC Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, M6 $6,166 6 Weeks	M-ILS200CC Motorized Linear Stage, 200 mm Travel, DC Motor, Rotary Encoder, M6	METRIC	51.74791	0.078	34.0	200 mm	Rotary Encoder	M6	6 Weeks	$6,166	Newport
M-ILS200CCL Motorized Linear Stage, 200 mm, DC Motor, SMC100CC, M6 $6,166 6 Weeks	M-ILS200CCL Motorized Linear Stage, 200 mm, DC Motor, SMC100CC, M6	METRIC	337.6301	0.019166667	35.0	200 mm	Rotary Encoder	M6	6 Weeks	$6,166	Newport
M-ILS200HA Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, M6 $9,490 6 Weeks	M-ILS200HA Motorized Linear Stage, 200 mm Travel, DC Motor, Linear Encoder, M6	METRIC	46.889523	0.026083333	36.0	200 mm	Linear Encoder	M6	6 Weeks	$9,490	Newport
M-ILS250CC Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, M6 $6,921 6 Weeks	M-ILS250CC Motorized Linear Stage, 250 mm Travel, DC Motor, Rotary Encoder, M6	METRIC	51.74791	0.085666667	38.0	250 mm	Rotary Encoder	M6	6 Weeks	$6,921	Newport
M-ILS250CCL Motorized Linear Stage, 250 mm, DC Motor, SMC100CC, M6 $6,921 6 Weeks	M-ILS250CCL Motorized Linear Stage, 250 mm, DC Motor, SMC100CC, M6	METRIC	337.6301	0.029833333	39.0	250 mm	Rotary Encoder	M6	6 Weeks	$6,921	Newport
M-ILS250HA Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, M6 $10,212 6 Weeks	M-ILS250HA Motorized Linear Stage, 250 mm Travel, DC Motor, Linear Encoder, M6	METRIC	43.805412	0.040416667	40.0	250 mm	Linear Encoder	M6	6 Weeks	$10,212	Newport

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Notes:

We also offer versions that are compatible with our SMC100CC Controller as well as Stepper Motor and Linear Motor versions.

Specifications

Models	ILS50CC	ILS100CC	ILS150CC	ILS200CC	ILS250CC
Travel Range	50 mm	100 mm	150 mm	200 mm	250 mm
Maximum Speed ¹	100 mm/s	100 mm/s	100 mm/s	100 mm/s	100 mm/s
Minimum Incremental Motion	1000 nm	1000 nm	1000 nm	1000 nm	1000 nm
Centered Load Capacity	250 N	250 N	250 N	250 N	250 N
Axial Load Capacity (+Cx)	40 N	40 N	40 N	40 N	40 N
Inverse Axial Load Capacity (-Cx)	-40 N	-40 N	-40 N	-40 N	-40 N
Accuracy, Typical	±0.6 µm	±0.8 µm	±1.5 µm	±1.2 µm	±1.7 µm
Accuracy, Guaranteed	±1.5 µm	±2.0 µm	±2.5 µm	±3.7 µm	±5.0 µm
Uni-directional Repeatability, Typical	±0.20 µm	±0.25 µm	±0.25 µm	±0.35 µm	±0.35 µm
Uni-directional Repeatability, Guaranteed	±0.50 µm	±0.50 µm	±0.50 µm	±0.5 µm	±0.5 µm
Bi-directional Repeatability, Typical	±0.40 µm	±0.40 µm	±0.45 µm	±0.45 µm	±0.60 µm
Bi-directional Repeatability, Guaranteed	±1.0 µm	±1.0 µm	±1.0 µm	±1.0 µm	±1.0 µm
Pitch, Typical	±15 µrad	±20 µrad	±37 µrad	±37 µrad	±42 µrad
Pitch, Guaranteed	±25 µrad	±50 µrad	±75 µrad	±100 µrad	±125 µrad
Compliance in Pitch	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Yaw, Typical	±12 µrad	±17 µrad	±20 µrad	±25 µrad	±25 µrad
Yaw, Guaranteed	±25 µrad	±37 µrad	±65 µrad	±80 µrad	±95 µrad
Compliance in Yaw	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Compliance in Roll	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm
Origin Repeatability	±0.5 µm	±0.5 µm	±0.5 µm	±0.5 µm	±0.5 µm
Cable Length	3 m	3 m	3 m	3 m	3 m
Thread Type ²	1/4-20	1/4-20	1/4-20	1/4-20	1/4-20
Weight	4.2 kg	4.5 kg	4.8 kg	5.1 kg	5.4 kg
MTBF	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)
RoHS

Notes:

Also available in ILS-CCL versions.

Max speed is reduced to 50mm/sec for ILS-CCL versions
Also available in a metric M- version.

Models	ILS50HA	ILS100HA	ILS150HA	ILS200HA	ILS250HA
Travel Range	50 mm	100 mm	150 mm	200 mm	250 mm
Maximum Speed	100 mm/s	100 mm/s	100 mm/s	100 mm/s	100 mm/s
Minimum Incremental Motion	300 nm	300 nm	300 nm	300 nm	300 nm
Centered Load Capacity	250 N	250 N	250 N	250 N	250 N
Axial Load Capacity (+Cx)	40 N	40 N	40 N	40 N	40 N
Inverse Axial Load Capacity (-Cx)	-40 N	-40 N	-40 N	-40 N	-40 N
Accuracy, Typical	±0.3 µm	±0.6 µm	±1.2 µm	±0.8 µm	±1.5 µm
Accuracy, Guaranteed	±1.25 µm	±1.5 µm	±2.0 µm	±3.0 µm	±3.75 µm
Uni-directional Repeatability, Guaranteed	±0.20 µm	±0.20 µm	±0.20 µm	±0.20 µm	±0.20 µm
Uni-directional Repeatability, Typical	±0.08 µm	±0.08 µm	±0.08 µm	±0.08 µm	±0.10 µm
Bi-directional Repeatability, Typical	±0.10 µm	±0.10 µm	±0.15 µm	±0.15 µm	±0.15 µm
Bi-directional Repeatability, Guaranteed	±0.35 µm	±0.35 µm	±0.35 µm	±0.35 µm	±0.35 µm
Pitch, Typical	±17 µrad	±25 µrad	±50 µrad	±35 µrad	±45 µrad
Pitch, Guaranteed	±25 µrad	±50 µrad	±75 µrad	±100 µrad	±125 µrad
Compliance in Pitch	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Yaw, Typical	±7 µrad	±17 µrad	±25 µrad	±25 µrad	±30 µrad
Yaw, Guaranteed	±25 µrad	±37 µrad	±65 µrad	±80 µrad	±95 µrad
Compliance in Yaw	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Compliance in Roll	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm
Origin Repeatability	±0.1 µm	±0.1 µm	±0.1 µm	±0.1 µm	±0.1 µm
Cable Length	3 m	3 m	3 m	3 m	3 m
Thread Type ¹	1/4-20	1/4-20	1/4-20	1/4-20	1/4-20
Weight	4.2 kg	4.5 kg	4.8 kg	5.1 kg	5.4 kg
MTBF	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)
RoHS

Notes:

Also available in a metric M- version.

Specifications

Models	ILS50CC	ILS100CC	ILS150CC	ILS200CC	ILS250CC
Travel Range	50 mm	100 mm	150 mm	200 mm	250 mm
Maximum Speed ¹	100 mm/s	100 mm/s	100 mm/s	100 mm/s	100 mm/s
Minimum Incremental Motion	1000 nm	1000 nm	1000 nm	1000 nm	1000 nm
Centered Load Capacity	250 N	250 N	250 N	250 N	250 N
Axial Load Capacity (+Cx)	40 N	40 N	40 N	40 N	40 N
Inverse Axial Load Capacity (-Cx)	-40 N	-40 N	-40 N	-40 N	-40 N
Accuracy, Typical	±0.6 µm	±0.8 µm	±1.5 µm	±1.2 µm	±1.7 µm
Accuracy, Guaranteed	±1.5 µm	±2.0 µm	±2.5 µm	±3.7 µm	±5.0 µm
Uni-directional Repeatability, Typical	±0.20 µm	±0.25 µm	±0.25 µm	±0.35 µm	±0.35 µm
Uni-directional Repeatability, Guaranteed	±0.50 µm	±0.50 µm	±0.50 µm	±0.5 µm	±0.5 µm
Bi-directional Repeatability, Typical	±0.40 µm	±0.40 µm	±0.45 µm	±0.45 µm	±0.60 µm
Bi-directional Repeatability, Guaranteed	±1.0 µm	±1.0 µm	±1.0 µm	±1.0 µm	±1.0 µm
Pitch, Typical	±15 µrad	±20 µrad	±37 µrad	±37 µrad	±42 µrad
Pitch, Guaranteed	±25 µrad	±50 µrad	±75 µrad	±100 µrad	±125 µrad
Compliance in Pitch	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Yaw, Typical	±12 µrad	±17 µrad	±20 µrad	±25 µrad	±25 µrad
Yaw, Guaranteed	±25 µrad	±37 µrad	±65 µrad	±80 µrad	±95 µrad
Compliance in Yaw	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Compliance in Roll	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm
Origin Repeatability	±0.5 µm	±0.5 µm	±0.5 µm	±0.5 µm	±0.5 µm
Cable Length	3 m	3 m	3 m	3 m	3 m
Thread Type ²	1/4-20	1/4-20	1/4-20	1/4-20	1/4-20
Weight	4.2 kg	4.5 kg	4.8 kg	5.1 kg	5.4 kg
MTBF	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)
RoHS

Notes:

Also available in ILS-CCL versions.

Max speed is reduced to 50mm/sec for ILS-CCL versions
Also available in a metric M- version.

Models	ILS50HA	ILS100HA	ILS150HA	ILS200HA	ILS250HA
Travel Range	50 mm	100 mm	150 mm	200 mm	250 mm
Maximum Speed	100 mm/s	100 mm/s	100 mm/s	100 mm/s	100 mm/s
Minimum Incremental Motion	300 nm	300 nm	300 nm	300 nm	300 nm
Centered Load Capacity	250 N	250 N	250 N	250 N	250 N
Axial Load Capacity (+Cx)	40 N	40 N	40 N	40 N	40 N
Inverse Axial Load Capacity (-Cx)	-40 N	-40 N	-40 N	-40 N	-40 N
Accuracy, Typical	±0.3 µm	±0.6 µm	±1.2 µm	±0.8 µm	±1.5 µm
Accuracy, Guaranteed	±1.25 µm	±1.5 µm	±2.0 µm	±3.0 µm	±3.75 µm
Uni-directional Repeatability, Guaranteed	±0.20 µm	±0.20 µm	±0.20 µm	±0.20 µm	±0.20 µm
Uni-directional Repeatability, Typical	±0.08 µm	±0.08 µm	±0.08 µm	±0.08 µm	±0.10 µm
Bi-directional Repeatability, Typical	±0.10 µm	±0.10 µm	±0.15 µm	±0.15 µm	±0.15 µm
Bi-directional Repeatability, Guaranteed	±0.35 µm	±0.35 µm	±0.35 µm	±0.35 µm	±0.35 µm
Pitch, Typical	±17 µrad	±25 µrad	±50 µrad	±35 µrad	±45 µrad
Pitch, Guaranteed	±25 µrad	±50 µrad	±75 µrad	±100 µrad	±125 µrad
Compliance in Pitch	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Yaw, Typical	±7 µrad	±17 µrad	±25 µrad	±25 µrad	±30 µrad
Yaw, Guaranteed	±25 µrad	±37 µrad	±65 µrad	±80 µrad	±95 µrad
Compliance in Yaw	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm	10 µrad/Nm
Compliance in Roll	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm	15 µrad/Nm
Origin Repeatability	±0.1 µm	±0.1 µm	±0.1 µm	±0.1 µm	±0.1 µm
Cable Length	3 m	3 m	3 m	3 m	3 m
Thread Type ¹	1/4-20	1/4-20	1/4-20	1/4-20	1/4-20
Weight	4.2 kg	4.5 kg	4.8 kg	5.1 kg	5.4 kg
MTBF	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)	20,000 h (25% load, 30% duty cycle)
RoHS

Notes:

Also available in a metric M- version.

Features

DC Motor for High Speed and Repeatability

ILS stages with DC Motors are best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio. As such, they are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability. The ILS-CC and ILS-HA DC motor stages are compatible with Newport's XPS and ESP 302 motion controllers.

We also offer an ILS-CCL version of these stages with a maximum speed of 50 mm/s that are compatible only with our SMC100CC single axis motion controller.

ILS Stage Motor Options

ILS Series stages are available with the following motors:

Stepper Motor (ILS-BPP) - For less demanding applications, a stepper motor can be a more economical solution than a DC motor.
High-torque DC motor (ILS-CC) - Best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio, DC motors are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability.
Linear Motor (ILS-LM) - The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws.

	ILS-CC (DC Motor)	ILS-BPP (Stepper Motor)	ILS-LM (Linear Motor)
Travel Range (mm)	50 / 100 / 150 / 200 / 250	50 / 100 / 150 / 200 / 250	100 / 200 / 300
Maximum Speed (mm/s)	100	50	500
Minimum Incremental Motion (nm)	1000	1000	10
Uni-directional Repeatability, Guaranteed (µm)	±0.5	±0.5
Bi-directional Repeatability Guaranteed (µm)	±1.00	±1.0	±0.3
Accuracy, Guaranteed (µm)	±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0	±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0	±1.5 / ±2.0 / ±2.5

FEM Optimized Aluminum Body

Finite element method (FEM) was used to optimize the structural design of the ILS Series stage aluminum body allowing for extreme stiffness and minimizing bi-metal bending without compromising weight. The rigid body design reduces deflection under load allowing for the highest performance possible in an aluminum stage design. FEM optimized IMS stages are also available which offer longer travel ranges, higher load capacities, and larger moving platforms.

Rotary or Linear Encoder Options

ILS-CC stages feature a 4000 pts/rev. encoder mounted directly on the screw in order to prevent screw/motor coupling errors, consequently boosting stage motion accuracy. For more demanding precision positioning requirements, the ILS-HA versions utilize an integrated linear scale that provides 0.1 µm resolution feedback and delivers 0.3 µm minimum incremental motion.

Rotary Encoder

Linear Encoder

Recirculating Ball Bearing Slides

The recirculating ball bearing slides provide excellent payload capabilities and longer life with accurate linear trajectory. It mitigates the issue of ball cage migration, which is typically found on linear ball bearings or crossed roller bearings.

Backlash-free Precision Ground Ballscrew

These motorized linear stages include a preloaded, backlash-free, precision ground ball screw, which provides smooth, rapid motion with short step and settling time. The screw profile is designed to reduce heating effects, extending the life of the stage.

Other ILS Stage Features

A rigid top cover prevents damage to the drive train and protects it from dust and debris. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.

Error Mapping Services

For critical positioning applications, Newport offers error mapping upon request for select ILS-HA stages driven by our XPS advanced motion controller. We will measure, implement, and verify the results of this error map that will individually optimize each stage's position accuracy. In addition, multi-axis error mapping is also available. Measurements are made at 20.0 ±0.2 °C. A certificate of calibration will be provided with your stage. Actual data may also be provided upon request.

Multi-Axis Assemblies

Newport's standard motorized stages and components can be easily combined to create hundreds of possible multi-axis systems. Depending on the products and application, our standard assemblies are available with the following precision alignments:

Orthogonality to 50 μrad
Axes Coincidence to 20 μm

XY Assembly Example

An IMS300 linear stage (X-axis) and ILS150 linear stage (Y-axis) mounted directly to each other for high precision and accuracy in two axes of linear motion.

X-Θz Assembly

An ILS150 linear stage (X-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XYZ Assembly Example

An IMS linear stage (X-axis), an ILS linear stage (Y-axis) mounted directly to the IMS, and an ILS linear stage mounted on an EQ120 right angle bracket (Z-axis) provide high precision and accuracy in three axes of linear motion.

X-Θy Assembly

An ILS linear stage and an RV rotation stage mounted on an EQ120 right angle bracket for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XZ-Θz Assembly

An ILS250 linear stage (X-axis), a GTS30V vertical stage (Z-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.

XY-Θz Assembly Example

An IMS300 linear stage (X-axis), an ILS150 linear stage (Y-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in two axes of linear motion and one axis of rotary motion.

Individual Stage Metrology Report is Included

Newport guarantees specification values which are measured and recorded following ASME B5.57 and ISO 230-2 standards. The typical performance values are two times better than the guaranteed specifications.

ILS Stage Load Characteristics

Features

DC Motor for High Speed and Repeatability

We also offer an ILS-CCL version of these stages with a maximum speed of 50 mm/s that are compatible only with our SMC100CC single axis motion controller.

ILS Stage Motor Options

ILS Series stages are available with the following motors:

Stepper Motor (ILS-BPP) - For less demanding applications, a stepper motor can be a more economical solution than a DC motor.
High-torque DC motor (ILS-CC) - Best characterized by their high speeds, smooth motion, good efficiency and a high power/weight ratio, DC motors are preferable to stepper motor stages for applications requiring high dynamic speed and tight repeatability.
Linear Motor (ILS-LM) - The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor. This drive system is noise-free and provides higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws.

	ILS-CC (DC Motor)	ILS-BPP (Stepper Motor)	ILS-LM (Linear Motor)
Travel Range (mm)	50 / 100 / 150 / 200 / 250	50 / 100 / 150 / 200 / 250	100 / 200 / 300
Maximum Speed (mm/s)	100	50	500
Minimum Incremental Motion (nm)	1000	1000	10
Uni-directional Repeatability, Guaranteed (µm)	±0.5	±0.5
Bi-directional Repeatability Guaranteed (µm)	±1.00	±1.0	±0.3
Accuracy, Guaranteed (µm)	±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0	±1.5 / ±2.0 / ±2.5 / ±3.75 / ±5.0	±1.5 / ±2.0 / ±2.5

FEM Optimized Aluminum Body

Rotary or Linear Encoder Options

Rotary Encoder

Linear Encoder

Recirculating Ball Bearing Slides

Backlash-free Precision Ground Ballscrew

Other ILS Stage Features

Error Mapping Services

Multi-Axis Assemblies

Orthogonality to 50 μrad
Axes Coincidence to 20 μm

XY Assembly Example

An IMS300 linear stage (X-axis) and ILS150 linear stage (Y-axis) mounted directly to each other for high precision and accuracy in two axes of linear motion.

X-Θz Assembly

An ILS150 linear stage (X-axis) and a URS100 rotation stage (Θz angle) mounted directly to each other for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XYZ Assembly Example

X-Θy Assembly

An ILS linear stage and an RV rotation stage mounted on an EQ120 right angle bracket for high precision and accuracy in one axis of linear motion and one axis of rotary motion.

XZ-Θz Assembly

XY-Θz Assembly Example

Individual Stage Metrology Report is Included

ILS Stage Load Characteristics

Compatible Controllers

The ILS-CC and ILS-HA versions are compatible with XPS-D, XPS-RLD and legacy XPS-RL motion controllers. To use an XPS controller, the appropriate driver module (sold separately from the controller) shown in the table below must drive the stage.

The ILS-CC and ILS-HA are also plug-and-play compatible with the ESP302 and legacy ESP301 motion controllers.

The ILS-CCL is compatible only with the SMC100CC single-axis DC motor motion controller.

Version	Maximum Power Consumption (W)	Compatible XPS-D or XPS-RLD Driver Module	Compatible XPS-RL Driver Module	ESP302 or ESP301 Compatibility	SMC100 Compatibility
ILS-CCL	30	No	No	No	SMC100CC
ILS-CC	70	XPS-DRV11	XPS-DRV01	Yes	No
ILS-HA	60	XPS-DRV11	XPS-DRV01	Yes	No

Compatible Controllers

The ILS-CC and ILS-HA are also plug-and-play compatible with the ESP302 and legacy ESP301 motion controllers.

The ILS-CCL is compatible only with the SMC100CC single-axis DC motor motion controller.

Version	Maximum Power Consumption (W)	Compatible XPS-D or XPS-RLD Driver Module	Compatible XPS-RL Driver Module	ESP302 or ESP301 Compatibility	SMC100 Compatibility
ILS-CCL	30	No	No	No	SMC100CC
ILS-CC	70	XPS-DRV11	XPS-DRV01	Yes	No
ILS-HA	60	XPS-DRV11	XPS-DRV01	Yes	No

Accessories

ILS Stage Right Angle Bracket

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		EQ120 Right-Angle Bracket, ILS, FC and RV	UNIVERSAL		In Stock	$1,991

Resources

Resources

Application Notes

Fiber Spool Winding Application with Custom 5-Axis Motion System (145.1 kB, PDF)
Z-Scan for the Characterization of Transparent Optical Materials (407.7 kB, PDF)
Photoresponse Mapping of Photovoltaic Cells (5.4 MB, PDF)

Manuals

EQ120 & EQ180 Brackets User Manual (832.5 kB, PDF)
ILS Linear Stages User's Manual (1.9 MB, PDF)

Literature

ILS Data Sheet (1.7 MB, PDF)

Technical Notes

Stage and Controller Compatibility Guide

Product Comparison

ILS 50-250 mm Travel Aluminum DC Motor Linear Stages

ILS 50-250 mm Travel Aluminum DC Motor Linear Stages

Overview

Products

Notes:

Specifications

Notes:

Notes:

Notes:

Notes:

Features

DC Motor for High Speed and Repeatability

ILS Stage Motor Options

FEM Optimized Aluminum Body

Rotary or Linear Encoder Options

Recirculating Ball Bearing Slides

Backlash-free Precision Ground Ballscrew

Other ILS Stage Features

Error Mapping Services

Multi-Axis Assemblies

XY Assembly Example

X-Θz Assembly

XYZ Assembly Example

X-Θy Assembly

XZ-Θz Assembly

XY-Θz Assembly Example

Individual Stage Metrology Report is Included

ILS Stage Load Characteristics

DC Motor for High Speed and Repeatability

ILS Stage Motor Options

FEM Optimized Aluminum Body

Rotary or Linear Encoder Options

Recirculating Ball Bearing Slides

Backlash-free Precision Ground Ballscrew

Other ILS Stage Features

Error Mapping Services

Multi-Axis Assemblies

XY Assembly Example

X-Θz Assembly

XYZ Assembly Example

X-Θy Assembly

XZ-Θz Assembly

XY-Θz Assembly Example

Individual Stage Metrology Report is Included

ILS Stage Load Characteristics

Compatible Controllers

Accessories

ILS Stage Right Angle Bracket

Resources

Application Notes

Manuals

Literature

Technical Notes

Application Notes

Manuals

Literature

Technical Notes

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