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153D Exhaust Throttle Valves with Integrated Controller
153D Exhaust Throttle Valves with Integrated Controller
The 153D "Smart" Exhaust Throttle Valve integrates all control, communication, and driver circuits via a compact "add-on" electronics module within a 253 Throttle Valve assembly, eliminating the need for a separate pressure control electronics module. The 153 is operable in two modes, flapper positioning or pressure control.
Please see 153D Throttle Valves on mks.com for additional configurations.
- Flapper positioning or pressure control modes
- Integrated control and driver circuits
- 253 throttle valve assembly See All Features
Specifications
- TypeSmart Exhaust Throttle Valve
- Valve DriveMechanical (non belt) drive with integral cosine generator to linearize valve transfer characteristic
- Valve Speed7.5 s
- Resolution1/10,000
- Helium Leak Rate1 x 10-8 scc/sec
- Closed Leakage<10-7 (Torr l/s)
- Operating Temperature RangeValve Motor: 0 - 70°C
Valve Body: 0 - 90°C - Maximum Differential Pressure Across Valve1 Atmosphere (15 psig)