Article Summary
Photonics Spectra, October 2010
Diode-Pumped Solid-State UV Lasers Improve LED Sapphire Wafer Scribing
Rajesh S. Patel, Ashwini Tamhankar, Tim Edwards
High brightness LEDs enable low power illumination of cell phones, televisions and touch-screen displays. There is also a huge potential market for high brightness LED as a replacement for incandescent light bulbs. Scribing LED wafers with lasers can improve yields and reduce costs by creating narrower scribe lines than mechanical scribing. UV Q-switched DPSS lasers using short pulses and high repetition rates can be optimized at fluences to reduce microcracking and damage to the LED wafer substrate. This makes UV Q-switched DPSS lasers the choice for advanced LED wafer scribing.
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Correspondence:
Rajesh S. Patel: raj.patel@newport.com
Ashwini Tamhankar:ashwini.tamhankar@newport.com
Tim Edwards: tim.edwards@newport.com