Optics
Conventional Optics
Newport is a leading supplier of optics used in microlithography, wafer inspection, reticle inspection, flat panel display inspection, laser ablation systems, laser drilling, and micro-machining systems.
The capability of our operators and our automated process systems enable the repeatable production of optics with very high precision tolerances using fused silica, calcium fluoride, Zerodur, ULE, silicon, and other optical materials.
| Optical Element Types |
|
Sizes |
| Spheres¹ |
2mm to 1m |
| Aspheres¹ |
2mm to 1m |
| Cylinders² |
10mm to 1m |
| Flats |
2mm to 1m |
Notes:
1. Deterministic finished optics limited to diameters of 0.5" to 8" (12.7mm to 203.2mm)
2. Cylinders produced using conventional processes only
| Optical Tolerances² |
|
|
| Surface accuracy¹ |
l/40 PV and l/200 rms |
| Surface slope error¹ |
l/25 per cm (typical)
l/180 per cm (with additional super-polishing) |
| Surface roughness |
< 2 to 3 Å rms (typical)
< 1 Å rms (with additional super-polishing) |
| Surface quality |
< 10-5 scratch-dig |
| Radii accuracy |
< 0.0002" (0.00508 mm) |
| Optical centration |
< 0.000050" (0.00127 mm) |
| Diameter edging |
< 0.000050" (0.00127 mm) |
| Machined edges |
< 0.0004" (0.01016 mm) edge to optical center accuracy
< 0.000010" (0.000254 mm) edge to edge accuracy |
Notes:
1. Measured at 632.8nm
2. ISO 10110 standards also available
Diamond Turned Optics
Fiber Optic Components