Newport’s new ZVR-PP and ZVR-PC are integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks.
Our design takes the opposite approach of most vertical (elevation) stages on the market today. We rigidly support and drive the payload at three points (separated by 120 degrees) along the outer circumference of the stage. Ordinary designs use a single cam, wedge, or screw located at the centre of the stage. Newport’s three point design has advantages for applications that have slight to extreme unbalanced loading such as wafer probing, which can have vertical forces applied at locations along the outer edges of the chuck. Angular deflections due to these off-centre loads are minimized and binding during vertical motion is eliminated.
The ZVR's unique design also permits the centre of the stage to remain open down through the bottom plate. The diameter of the clear aperture with the integrated rotary stage is 50 mm. Guiding the stage through its vertical trajectory are three miniature, ultraquiet, recirculating bearing guides. Like the drive screws that actuate vertical motion, these three guides are located 120 degrees apart and are inline with the drive screws. The upper limit switch has a 4 mm adjustment range enabling the user to set the upper limit of vertical travel.
The ZVR is also equipped with a hardware origin allowing the stage to be returned to an absolute reference (home) position. For optimum performance and compatibility, we recommend the Newport family of controllers for these devices. The ZVR-PP is ESP compatible allowing the user to take advantage of Newport’s smart-stage features when used with an ESP-Series controller. Each stage axis is supplied with a 3-meter, shielded cable with 25-pin sub-D connectors that allow for direct connection to your Newport or other OEM motion controller and driver.
For a vertical only version, please contact Newport.
|
Design Details |
|
Vertical |
Rotary |
| Base Material |
Aluminum |
Stainless Steel |
| Bearings |
Steel recirculating ball bearings |
Stainless steel ball bearings |
| Motor |
Stepper |
Stepper or DC |
| Feedback |
None |
ZVR-PC: 8,000 cts/rev rotary encoder |
| Limit Switches |
Optical |
Optical ±165° (can be disabled) |
| Origin |
Centered |
| Cable |
3 m |
| MTBF |
20,000 |
Refer to the ZVR datasheet for more details.
|
Vertical Stage Specifications |
| Drive Type |
NEMA17, stepping motor |
| Travel Range (mm) |
10 |
| Minimum Incremental Motion, Linear1 (µm) |
0.05 |
| Uni-directional Repeatability, Guaranteed (µm) |
1.5 |
| Bi-directional Repeatability, Guaranteed (µm) |
4 or ± 2 |
| On-Axis Accuracy, Guaranteed (µm) |
4 or ± 2 |
| Maximum linear speed (mm/s) |
10 |
| Pitch, Yaw (µrad) |
70 or ±35 |
| XY Cross Talk2(µm) |
± 0.1 |
1. Optional Linear Scale, 0.1µm MIM
2. This is a measure of XY deviation when the Z direction of motion is reversed. This specification is important for image focusing.
|
Rotation Stage Specifications |
|
ZVR-PP
|
ZVR-PC
|
| Drive Type |
stepping motor |
DC Servo |
| Angular Range° |
±160 or 360 ° continuous |
±160 or 360 ° continuous |
| Minimum Incremental Motion° |
0.0002 |
0.002 |
| On-Axis Accuracy, Guaranteed° |
.035 or ± 0.0175 |
.030 or ± 0.015 |
| Uni-directional Repeatability° |
0.003 |
0.003 |
| Bi-directional Repeatability° |
0.013 or ± 0.0065 |
0.007 or ± 0.0035 |
| Maximum Speed (°/s) |
40 |
80 |
| Wobble, Guaranteed (µrad) |
80 or ±40 |
80 or ±40 |
| Eccentricity, Guaranteed (µm) |
8 or ± 4 |
8 or ± 4 |
| Normal Load Capacity (Cz) (N) |
100 |
100 |
