The XM ultra-precision linear stages provide high sensitivity and outstanding trajectory accuracy in a compact, robust and cost effective package. They are an excellent, ultra high-performance solution for applications such as semiconductor wafer inspection, sensor test and calibration, laser machining and ultra-precision assembly.
XM stages are machined from stress-relieved 7075 aluminum, ensuring long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control to further improve overall performance and accuracy. The T-shaped carriage used on the XM provides the optimum solution for precision XY assemblies without impacting the stage preload. It also more robust and is more tolerant to non-ideal mounting conditions than stages with a C-shaped carriage design.
To ensure the most accurate trajectory control, XM stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products.
Unlike screw driven stages, the XM employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra smooth velocity control and provides higher efficiency compared to alternative stage designs. This results in significantly less heat generation, which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM also has the benefit of a sophisticated length decoupling of the magnetic track from the stage carriage
Precision position feedback is supplied by a high accuracy LIF 481 Heidenhain Linear Scale. The precision alignment and mounting of this low thermal expansion scale in the center of the stage minimizes the impact of temperature changes on stage repeatability and accuracy. The encoder signals are interpolated by Newport’s XPS motion controller with sub-nm resolution and less than 10 nm noise for outstanding position sensitivity and stability. Absolute home position and limit signals are incorporated on the same scale without any further electronics or mechanics for improved reliability and accuracy. In general, all electronics are attached to the stationary base, so there are no moving cables inside the stage. This results in an extremely compact design with exceptional reliability and safety. The space-saving, fixed read head design avoids any moving cables inside the stage and underscores the robustness and reliability of the XM stages, exemplified by an MTBF of 20,000 hours.
XM stages are compatible with the GTS30V vertical stage, GTS series ultra-precision linear stages, URS and RGV100BL rotation stages, VP-25X precision compact linear stages and VP-5ZA vertical lift stages. XM stages are shipped with a test certificate at no additional charge.
Need Accuracy to 1 µm?
For critical positioning applications, Newport offers micropositioning calibration services. We will create, implement and verify an electronic compensation process to improve the absolute position accuracy of your Newport XM stages when commanded by our XPS advanced motion control system. Compensation is performed at 20.0 °C, +/-0.2 °C, for linear and non-linear errors, ensuring accuracy of up to 1 µm/100 mm over the middle 80% of travel.
A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided. Click here for complete information on our Micropositioning Calibration Services.
Accuracy of an XMS50 stage with linear error compensation and positioner mapping. The data was taken one day after the calibration and at different positions. The plot shows error readings over five cycles of back and forth motion. The accuracy is 0.3 µm p-p.
The flatness of the surface is often a major factor in the positioning accuracy and repeatability of a motion system. The polished granite surfaces are among the flattest and commercially available structures. Granite’s tight flatness tolerance and extreme hardness make it an attractive option to complement Newport’s Ultra-Precision Linear Motor XM series stage. The GB series granite base plates feature 3 point mounting, to make-up for non-flat tables. Edge handles facilitate handling and locating the base plate on the work surface.
Design Details
| Base Material |
High-strength 7075 Aluminum |
| Bearings |
Anti-creep crossed roller bearings |
| Drive Mechanism |
3-phase synchronous ironless linear motor (without Hall effect sensors) |
| Motor initialization |
Utilizes XPS controller patented feature that avoids large motions during initialization, without using Hall effect sensors. |
| Motor commutation |
Done by the XPS controller using encoder signals. |
| Feedback |
Heidenhain LIF 481 scale, 1 Vpp, 4 µm signal period, 32768-fold signal subdivision when used with XPS controller. |
| Limit Switches |
Optical, on encoder's fiducial track |
| Origin |
Optical, at center of travel, including mechanical zero signal |
| Drive Type |
Brushless DC Servo |
| Cable (m) |
5 (included) |
Specifications
|
Model |
XMS
|
XML
|
| Travel Range (mm) |
50, 100, 160 |
210, 350 |
| Resolution (µm) |
0.001 |
0.001 |
| Minimum Incremental Motion, Linear (µm) |
0.01 |
0.01 |
| Uni-directional Repeatability, guaranteed1 (µm) |
0.05 |
0.05 |
| Bi-directional Repeatability, guaranteed1 (µm) |
0.08 or ± 0.04 |
0.08 or ± 0.04 |
| On-Axis Accuracy, guaranteed1 (µm) |
1.5 or ± 0.75 |
3.0 or ± 1.5 |
| Maximum Speed (mm/s) |
300 |
300 |
| Maximum Acceleration (m/s2) |
5 |
5 |
| Max. Force (Cont.) (N) |
16 |
37 |
| Load Capacity, Horizontal (N) |
100 |
300 |
| Straightness, Flatness, guaranteed1,2 (µm) |
1.5 or ± 0.75 |
3 or ± 1.5 |
| Pitch, guaranteed1,2 (µrad)3 |
50 or ± 25 |
100 or ± 50 |
| Yaw, guaranteed1,2 (µrad)3 |
50 or ± 25 |
50 or ± 25 |
| MTBF (h) |
20,000 |
20,000 |
| Weight (kg) |
2.5, 3.5, 4.5 |
13, 22 |
| Moving Mass (kg) |
1.2, 1.8, 2.3 |
7.6, 11.8 |
1 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, see
Motion Control Metrology Primer.
2 Middle 80% of travel
3 To obtain arcsec units, divide the µrad value by 4.8.
Load Characteristics
|
Model |
XMS50
|
XMS100
|
XMS160
|
XML210
|
XML350
|
| Cz, Normal centered load capacity (N) |
100 |
300 |
| Kαx, Compliance in roll (µrad/Nm) |
3.5 |
2.0 |
1.5 |
0.5 |
0.1 |
| Kαy, Compliance in pitch (µrad/Nm) |
6.0 |
2.5 |
2.0 |
2.0 |
0.7 |
| Kαz, Compliance in yaw (µrad/Nm) |
8.0 |
3.5 |
2.0 |
1.0 |
0.2 |
| Q |
Off-center load, Q≤Cz/(1 + D/a) |
| D |
Cantilever distance in mm |
| Cz |
Normal centered load capacity on bearings |
Controller Compatibility
XM Series Ultra Precision Linear Stages are compatible with the XPS Universal High-Performance Motion Controller/Driver using XPS-DRV02.
|
Model |
Description |
| XPS-C2
|
2-axis Universal Controller/Driver, ethernet |
| XPS-C4
|
4-axis Universal Controller/Driver, ethernet |
| XPS-C6
|
6-axis Universal Controller/Driver, ethernet |
| XPS-C8
|
8-axis Universal Controller/Driver, ethernet |
| XPS-DRV02
|
PWM drive module for brushless motors, 5A/44Vpp max. |
