Vacuum Compatible Linear Stages

Vacuum Linear Stages

Newport vacuum compatible linear translation stages offer excellent motion performance. Each stage is built, treated and tested under vacuum to 10-6 hPa (7.5*10-7 Torr). With a wide vacuum compatible linear stage selection from nanopositioners to micropositioners, Newport vacuum compatible linear stages can address the translation needs of the most demanding vacuum motion applications.

Newport has the capability to prepare stages and motion systems not listed here for application in vacuum, to learn more about systems capability, see custom motion systems. To discuss your application specific motion requirements, email:tech@newport.com or call 877-835-9620.


Vacuum Compatible Linear Stages

Series Travel Range
(mm)
Minimum Incremental Motion
(µm)
Normal Load Capacity
(N)
Maximum Speed
(mm/s)
MC-MTM250-Silver MTM Series Vacuum Stages 100-250 0.3-1.0 500 0.1-20
MTM100PE.1BV6
MTM100PE1BV6
MTM150PE1BV6
MTM150PE.1BV6
MTM200PE1BV6
MTM200PE.1BV6
MTM250PE1BV6
MTM250PE.1BV6
MC-UTS150CC_1-Silver UTS Series Vacuum Linear Stages 50-150 0.3 100 20-40
UTS50PPV6
UTS100PPV6
UTS150PPV6
MC-MFA_1-Silver MFA Miniature Vacuum Linear Stages 25 0.1 50 1.25
MFA-CCV6
AGLS25V6 Agilis Series Vacuum Linear Stages 12, 27 .05 3 >0.5
AG-LS25V6
AG-LS25-27V6
MC-NP Series-Silver NPX Vacuum Linear Stages .100-.200 0.0002-0.008 10-100 See Specifications
NPX200SGV6
NPXY100SGV6
NPXYZ100V6
NPXYZ100SGV6