The VP-5ZA is an ultra-low profile, precision vertical translation stage ideally suited for semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. Based on the industry-proven technology used in the VP-25X linear stages, the VP-5ZA offers highly reliable motion with nanometer sensitivity, high responsiveness, and a perfectly straight trajectory.
The ultra-low profile of the VP-5ZA is achieved by an inclined-plane design consisting of a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings. The encoder read head is also fixed, eliminating the need for cable carriers. To avoid any side motion, the upper wedge is constrained by 2 pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion.
A cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.
A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or to the ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be made using a flat screw driver.
Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any side.
A VP-5ZA stage mounted on top of an ILS High-Performance Mid-Range Travel Linear Stages (with optional VP-BP base plate). The vertical lift approach of the VP-5ZA allows centering of the payload over the bearings and close to the position feedback system. This avoids any cantilevered loads and results in more precise motion with higher load capacity.
Design Details
| Base Material |
Aluminum |
| Bearings |
Recirculating ball bearings, double-row linear ball bearings for vertical guidance |
| Drive Mechanism |
Inclined plane design with transmission ratio of 5:1; Backlash-free ball screw |
| Drive Screw Pitch (mm) |
1 |
| Feedback |
Linear steel scale, 20 µm signal period, 0.1 µm resolution |
| Limit Switches |
Optical |
| Origin |
Optical, at center of travel, including mechanical zero signal |
| Drive Type |
DC Servo |
| Motor |
UE25CC |
| Cable Length (m) |
1.5 (included) |
Specifications
| Travel Range (mm) |
4.8 |
| Resolution (µm) |
0.021 |
| Minimum Incremental Motion, Linear (µm) |
0.06 |
| Uni-directional Repeatability, Guaranteed (µm) |
0.3 |
| Bi-directional Repeatability, Guaranteed1 (µm) |
0.5 or ± 0.25 |
| On-Axis Accuracy, Guaranteed1 (µm) |
3 or ± 1.5 |
| Maximum Speed (mm/s) |
5 |
| Pitch, Guaranteed1,2 (µrad) |
100 or ± 50 |
| Roll, Guaranteed1,2 (µrad) |
100 or ± 50 |
| MTBF (h) |
20,000 |
| SAT-Weight [lb (kg)] |
5.28 (2.4) |
1 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values see
Motion Control Metrology Primer.
2 To obtain arcsec units, divide the µrad value by 4.8.
For the definition of specifications see
Motion Basics and Standards.
Load Characteristics and Stiffness
| Cz, Normal centered load capacity |
50 N |
| kαx, Compliance in roll |
50 µrad/N.m |
| kαy, Compliance in pitch |
45 µrad/N.m |
| kαz, Compliance in yaw |
10 µrad/N.m |
| Q, Off-center load |
Qx, Qy ≤ Cz / (1+D/30) |
| Where D = Cantilever distance in mm |
XPS Series
|
Model |
Description |
| XPS-C2
|
2-axis Universal Controller/Driver, ethernet |
| XPS-C4
|
4-axis Universal Controller/Driver, ethernet |
| XPS-C6
|
6-axis Universal Controller/Driver, ethernet |
| XPS-C8
|
8-axis Universal Controller/Driver, ethernet |
| XPS-DRV03
|
High performance PWM drive module for DC motors, 5A/48V max. |
Note: XPS-DRV03 is required for each axis with VP-5ZA stage
ESP301 Series
|
Model |
Description |
| ESP301-1G
|
ESP301 Motor Controller/Driver, 1 axis, w/ GPIB and USB |
| ESP301-1N
|
ESP301 Motor Controller/Driver, 1 axis, USB |
| ESP301-2G
|
ESP301 Motor Controller/Driver, 2 axis, w/ GPIB and USB |
| ESP301-2N
|
ESP301 Motor Controller/Driver, 2 axis, USB |
| ESP301-3G
|
ESP301 Motor Controller/Driver, 3 axis, w/ GPIB and USB |
| ESP301-3N
|
ESP301 Motor Controller/Driver, 3 axis, USB |
SMC Series
|
Model |
Description |
| SMC100CC
|
Single-axis DC motor controller/driver |
Note: Refer to SMC series product page for power supply and available cable accessories
