The VP-5ZA is an ultra-low profile, precision vertical translation stage ideally suited for semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. Based on the industry-proven technology used on our VP-25X linear stages, the VP-5ZA offers highly reliable motion with nanometer sensitivity, high responsiveness, and a perfectly straight trajectory.
The ultra-low profile of the VP-5ZA is achieved by an inclined-plane design consisting of a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings. The encoder read head is also fixed, eliminating the need for cable carriers. To avoid any side motion, the upper wedge is constrained by 2 pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion.
A cool running, high torque DC motor with a precision preloaded, long-life ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.
A pattern of threaded holes on the top plate provides compatibility with the VP-25X ...

The VP-5ZA is an ultra-low profile, precision vertical translation stage ideally suited for semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. Based on the industry-proven technology used on our VP-25X linear stages, the VP-5ZA offers highly reliable motion with nanometer sensitivity, high responsiveness, and a perfectly straight trajectory.
The ultra-low profile of the VP-5ZA is achieved by an inclined-plane design consisting of a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings. The encoder read head is also fixed, eliminating the need for cable carriers. To avoid any side motion, the upper wedge is constrained by 2 pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion.
A cool running, high torque DC motor with a precision preloaded, long-life ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.
A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or our ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be made using a flat screw driver.