DescriptionSpecifications
Models
Catalog PDF
The UZ Series linear stages offer high-precision vertical translation for applications requiring submicron resolution. Their low-profile design makes them particularly suited for space-limited XYZ positioning applications. Unlike vertically-mounted linear stages, UZ Series stages allow centering the payload over the bearings and at short distances to other stages below, avoiding positioning errors caused by cantilever loads or long moment arms.
High-resolution vertical motion is achieved with a precision inclined-plane design, consisting of two opposing wedges which move past each other via inclined, ball bearing races. A precision lead screw translates the lower edge horizontally, and this motion is converted into vertical translation by the inclined ball races between the two wedges. To avoid unwanted side motion, the upper wedge is constrained by vertically mounted precision ball bearing slides. For repeatable return to a pre-determined level height, all UZ Series stages feature a center home position.
UZ Series linear stages are available in two sizes:
The UZS80 offers 4.5 mm vertical adjustment of loads up to 30 N and mounts on top of our UTS series linear stages (see Mid-Travel Steel Linear Stages). The UZS80CC DC motor version provides high speed adjustments at up to 4 mm/s speed and accurate bi-directional positioning capabilities. It features a high resolution encoder with index pulse that is directly attached on the lead screw. This eliminates most of the possible error sources associated with indirect read feedback devices. The UZS80PP stepper motor version is a more economical version for less demanding applications. When used with motion controllers with high micro-step capability, like the XPS, ESP300 or SMC100PP, low noise operation and very small incremental motions are guaranteed. The UZS80PP does not use encoder feedback, but reaches a position by the number of commanded steps and micro-steps. For this purpose, the stepper motor is directly attached to the worm screw.
The UZM160 is specifically designed for high load applications. It provides 9 mm vertical travel and can bear loads up to 300 N. When used for multi-axis assemblies, for instance in combination with our MTM series linear stages (see Long-Travel Steel Linear Stages), it is recommended to mount the linear stages on top of the UZM160. The UZM160 is available with DC-motor drive, full-step motor drive and mini-step motor drive. In order to ensure consistent operation under high loads, all UZM160 versions are equipped with a 2,000 cts/rev. rotary encoder. |
Design Details
| Base Material | Stainless Steel |
| Bearings | Linear ball bearings |
| Drive Mechanism | 2 wedge design with Transmission ratio of 4:1, Backlash-compensated leadscrew |
| Drive Screw Pitch (mm) | UZS80: 0.8 UZM160: 4 |
| Reduction Gear | 10:1 on all UZM160(1) |
| Feedback | UZS80CC: Screw mounted rotary encoder, 4,000 cts/rev, index pulse UZS80PP: None UZM160: Screw mounted rotary encoder, 2,000 cts/rev, index pulse |
| Limit Switches | Mechanical |
| Origin | Optical, at center of travel |
| Cable | 3 m long cable included |
| Vacuum Compatibility | Vacuum compatible version of UZM160PE.05 available up to 10-6 hPa |
1) Additional motor mounted gear on some drive options. Call Newport for details.
Specifications
| | | |
| Travel Range (mm) | 4.5 | 4.5 | 9 |
| Resolution (µm) | 0.05 | 0.01(3) | 0.05 |
| Minimum Incremental Motion (µm) | 0.2 | 0.2 | 0.2 |
| Uni-directional Repeatability () | 1.4 guaranteed | 1.4 guaranteed | 0.9 typical(1) |
| Reversal Value (Hysteresis) (µm) | 2 guaranteed | 3 guaranteed | 5 typical(1) |
| On-Axis Accuracy (µm) | 3 guaranteed | 4 guaranteed | 8 typical(1) |
| Maximum Speed () | 4 | 2 | PP, CC: 1(2); PE: 0.1 |
| Pitch (µrad) | 70 typical, 150 guaranteed | 70 typical, 150 guaranteed | 100 typical(1) |
| Roll (µrad) | 70 typical, 200 guaranteed | 70 typical, 200 guaranteed | 200 typical(1) |
| Weight [lb (kg)] | 6.2 (2.8) | 6.2 (2.8) | 47.4 (21.5) |
1) Because of the complexity of the measurement, the actual performances of the UZM160 stages are not verified on 100% of the produced stage. Hence, only typical specifications are provided. For more information about typical and guaranteed specifications, see Motion Control Metrology Primer section (see Motion Control Metrology Primer).
2) 0.4 mm/s for UZM160PP.05 when used with SMC100PP.
3) Equals 1/100 of a full step
Load Characteristics
| UZS80 | UZM160 |
| Cz, Normal centered load capacity | ±30 N | -200 N, +300 N |
| Cx, Cy, Load capacity on X or Y axis | ±150 N | ±200 N |
| kαx, Compliance in roll | 100 µrad/Nm | 0.13 µrad/Nm |
| kαy, Compliance in pitch | 100 µrad/Nm | 0.65 µrad/Nm |
| Max torque (Q x D) | 0.75 Nm | 20 Nm |
| Q, Off-center load |
| D, Cantilever distance in m |
| | Model | Description |
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M-CAP-M41
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Set of 4 captive screws for XY assemblies
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M-CAP-M61
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Captive Screws for MTM Mounting
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M-PBN12
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Base Plate, Used with UMR12 Series, MVN120 & UTR80 Series
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M-UZM160CC.05
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UZM160 vertical stage, metric, DC drive
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M-UZM160PE.05
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UZM160 vertical stage, metric, full-step drive
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M-UZM160PP.05
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UZM160 vertical stage, metric, micro-step drive
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UTS-TP
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Top plate for UTS stages with English holes
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UZM160CC.05
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UZM160 vertical stage, DC drive
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UZM160PE.05
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UZM160 vertical stage, full-step drive
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UZM160PP.05
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UZM160 vertical stage, micro-step drive
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UZS80CC
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UZS80 vertical stage, DC motor
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UZS80PP
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UZS80 vertical stage, stepper motor
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