The SinguLYS™ stage and bridge configurations combine high performance with modularity, making them ideal for single axis, split XY, and gantry applications. Specially designed for frictionless operation, both the S and B SinguLYS series of air bearing products are extremely sturdy, highly reliable, and require no maintenance and/or lubrication.
Zero Maintenance
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensures years of maintenance free operation at high performance levels. Because there is no mechanical contact between moving elements, there is no wear or reduction in performance over time. Service life is virtually unlimited and since no lubrication is required, air bearings are ideal for cleanroom and medical applications.
SinguLYS S-370
The SinguLYS S-370 stage is manufactured from silicon carbide (SiC) ceramic components, similar to Newport's popular DynamYX and HybrYX stage product families. The body's extremely rigid and compact footprint with 3-point mounting allows this stage to be used in tight spaces typically reserved for mechanical bearing designs without the need for large, lapped mounting surfaces to maintain precise trajectory. The lightweight carriage features integrated pressure-vacuum air bearings which are guided by a precisely-lapped SiC body. Newport's new high precision stage is ideal for tasks with very high duty-cycles that require low angular deviation, tight velocity regulation, and high cleanliness standards.
- Travel range: 370mm
- Incremental motion: 10 nm
- Max. speed: 500 mm/s
- Payload: 5 kg
- Controller: XPS / DRV02
- Dimensions (mm): 640 (L) x 300 (W) x 150 (H)
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SinguLYS S-370 Air Bearing |
XML350 Crossed Roller Bearing |
| Max Vel (XPS) |
>500 mm/sec |
300 mm/sec |
| Max Acc (XPS) |
0.5G (5 kg load) |
0.4G (5 kg load) |
| Pitch, Roll, Yaw |
10 µrad (TIR) |
100 µrad (TIR) |
| Bi Dir Repeatability |
40 nm (3 sigma) |
80 nm (3 sigma) |
| Accuracy |
100 nm (3 sigma), Zerodur scale |
200 nm (3 sigma), Glass Scale |
| Speed Stability |
<0.1% |
<0.2% |
| Mounting Surface |
3 Point (body is self-supporting) |
Needs base with 10 µm Flatness |
| Position Stability |
Best |
Good |
| Cleanliness |
Best |
Good |
| Life Expectancy |
Best |
Good |
SinguLYS B-1200
The SinguLYS B-1200 air bearing bridge features a proprietary ceramic beam that is 3 times lighter than steel and offers triple the stiffness of granite. When used to replace a steel or granite-based design in an existing or next-generation tool, the properties of the B-1200 can improve acceleration and decrease settling times, which increases throughput and accuracy with minimal system redesign. The lightweight and rigid pressure-vacuum air bearing carriage accommodates high (10kg) cantilevered payloads with 2.5G acceleration and, unlike stages using mechanical bearings, minimizes contamination to the substrate below. Applications for Newport's B-1200 include Gen 8-11 flat panel display inspection, thin film photovoltaic scribing, and wafer processing.
- Travel range: 1200 mm
- Rated payload: 10 kg
- Max. speed: 2.5 m/s
- Max. acceleration: 2 G
- Efficient iron-core linear motor
- Natural frequency: > 100 Hz
