The RGV100BL is a very compact direct-drive rotation stage that provides ultra-fast rotation with very high resolution and outstanding positioning performance. Applications include semiconductor wafer inspection, micro-robotics, and precision metrology.
The direct-drive technology of the RGV100BL eliminates the worm gear of traditional rotation stages. The advantages are higher speeds, superior reliability, and enhanced position sensitivity. Speed, resolution, and repeatability are increased by a factor of up to ten times compared to worm-driven rotation stages of the same size.
A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C. This is significantly less than other stage designs and guarantees high performance and high reliability for the most demanding applications.
Precision is ensured by a high-resolution glass scale with 15,000 line pairs per revolution that directly measures the position of the rotating platen. The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage’s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. The encoder signals are interpolated by the XPS motion controller with less than 0.1 arcsec resolution for outstanding position sensitivity and stability.
The RGV100BL features a proprietary 4-point contact ball bearing. This unique, 2-piece design takes advantage of Newport’s excellent and proven capabilities in the design, manufacturing and assembly of precision mechanics and integrates multiple functions, like the bearing ways and the direct drive motor, minimizing the number of parts. The result is a more compact rotation stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications.
A 30 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage. A once-per revolution index pulse permits precision homing to a unique home position. The RGV100BL also features two limit switches that can be enabled or disabled by an external switch.
Design Details
| Base Material |
Aluminum |
| Bearings |
Large diameter steel ball bearings |
| Motor |
High-torque brushless DC motor with rare earth magnets |
| Motor Initialization |
Done by the XPS controller by a patented process that avoids major motion during initialization and that does not require Hall effect sensors |
| Motor Commutation |
Done by the XPS controller on encoder signals |
| Feedback |
Glass scale encoder with 15,000 line pairs per revolution, 1 Vpp, 32768-fold signal subdivision when used with XPS controller |
| Limit Switches |
Two optical limit switches at approx. +/- 168°, disabled by external switch |
| Origin |
Optical, fixed at position 0°, including mechanical zero signal |
| Cable Length (m) |
5 |
Specifications
| Travel Range (°) |
360 continuous |
| Minimum Incremental Motion (°) |
0.00011 |
| Uni-directional Repeatability, Guaranteed1 (°) |
0.0003 |
| Bi-directional Repeatability, Guaranteed1 (°) |
0.0011 or ± 0.00055 |
| Absolute Accuracy, Guaranteed1 (°) |
0.01 or ± 0.005 |
| Maximum Speed (no load) (°/s) |
720 |
| Maximum Acceleration (°/s²) |
1000 |
| Maximum Torque (Mz) Nm |
0.42 Nm @ 0 |
| Inertia (no load) (kg.m2) |
0.00116 |
| Wobble, Guaranteed1 (µrad) |
20 or ± 10 |
| Eccentricity, Guaranteed1 (µm) |
3 or ± 1.5 |
| MTBF (h) |
20,000 with 5 kg load, 720°/s speed and a duty cycle of 30 |
| Weight [lb (kg)] |
5.7 (2.6) |
1 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values see
Motion Control Metrology Primer.
For the definition of specifications see
Motion Basics and Standards.
Load Characteristics and Stiffness
| Cz, Normal centered load capacity |
100 N |
| Kα, Transversal compliance |
15 µrad/Nm |
| Mz, Maximum torque |
0.42 Nm @ 0°/s |
| Jz, Maximum Inertia |
0.032 kgm2 |
| Q, Off-center load |
Q ≤ Cz/(1+D/35) and Q≤(Jz-Jq)/D2 |
| Where: D = Cantilever distance in mm; Jq = Inertia of payload |
XPS Series
|
Model |
Description |
| XPS-C2
|
2-axis Universal Controller/Driver, ethernet |
| XPS-C4
|
4-axis Universal Controller/Driver, ethernet |
| XPS-C6
|
6-axis Universal Controller/Driver, ethernet |
| XPS-C8
|
8-axis Universal Controller/Driver, ethernet |
| XPS-DRV02
|
PWM drive module for brushless motors, 5A/44Vpp max. |
Note: XPS controller requires XPS-DRV02 for each axis with RGV100BL
