|  
   
  Light Sources
    Accessories for Oriel Light Sources
    Arc Sources
    Calibration Sources
    Deuterium Sources
    Incandescent Sources
    Monochromator and Fiber Illuminators
    Photolithography Instruments
   
 
   
 
   
 
    Solar Simulators
    Technical Information
 Show All Product Lines
Home > Products > Light Sources > Photolithography Instruments > Oriel® Flood Exposure Sources

Oriel® Flood Exposure Sources
Oriel<sup>&#174;</sup> Flood Exposure Sources
97436 500 W Oriel® Flood Exposure Source, 6 x 6 inch Beam Size (9.5 inch high pedestal not shown).

  • High intensity outputs
  • Highly uniform, large collimated beams
  • Efficient out of band rejection
  • Timed exposures

Product Description Product Detail Drawings Catalog PDF
Product Description
We offer 500 and 1000 W Flood Exposure Sources for the near UV (350 - 450 nm), mid UV (260 - 320 nm) and deep UV (220 - 260 nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm).



Ordering Information

Flood Exposure Sources
 Lamp Type Beam Size
in. (mm)
  Collimation
Angle
 Working Distance
in. (mm)
 Spectral Region
 220 - 260 nm 260 - 320 nm 350 - 450 nm
 Typical Output Model  Price Typical Output Model  Price Typical Output Model  Price
 500 W Hg 2.13 x 2.13 (54 x 54) ± 4.6° 2 (51)         266 mW cm-2 97434  
 4.25 x 4.25 (108 x 108) ± 2.6° 3 (76)         76 mW cm-2 97435  
 6.0 x 6.0 (152 x 152) ± 1.8° 4 (101)         38 mW cm-2 97436  
 8.0 x 8.0 (203 x 203) ± 1.4° 5.5 (140)         22 mW cm-2 97437  
 500 W Hg(Xe) 2.13 x 2.13 (54 x 54) ± 4.6° 2 (51) 28 mW cm-2 97530   121 mW cm-2 97531      
 4.25 x 4.25 (108 x 108) ± 2.6° 3 (76) 8 mW cm-2 97532   35 mW cm-2 97533      
 6.0 x 6.0 (152 x 152) ± 1.8° 4 (101) 4 mW cm-2 97534   17 mW cm-2 97535      
 8.0 x 8.0 (203 x 203) ± 1.4° 5.5 (140) 3 mW cm-2 97536   9 mW cm-2 97537      
 1000 W Hg(Xe) 2.13 x 2.13 (54 x 54) ± 6.6° 2 (51) 59 mW cm-2 92511   224 mW cm-2 92512   305 mW cm-2 92510  
 4.25 x 4.25 (108 x 108) ± 3.8° 3 (76) 17 mW cm-2 92521   64 mW cm-2 92522   87 mW cm-2 92520  
 6.0 x 6.0 (152 x 152) ± 2.5° 4 (101) 8,4 mW cm-2 92531   34 mW cm-2 92532   43 mW cm-2 92530  
 8.0 x 8.0 (203 x 203) ± 2.0° 5.5 (140) 4,9 mW cm-2 92541   18 mW cm-2 92542   25 mW cm-2 92540  
 10.0 x 10.0 (254 x 254) ± 1.6° 7 (178) 3,5 mW cm-2 92551   12 mW cm-2 92552   17 mW cm-2 92550  

Note: These figures are nominal. They are based on integrated spectral radiometric measurements of similar sources. These do not necessarily correspond with measurements by various broadband instruments with varying spectral response.

Beam Uniformity: ± 5% over the specified area. This is measured at a plane at the recommended working distance from the collimating lens. Uniformity will degrade somewhat at other distances.
Oriel Lamp Housings are designed to operate in a typical laboratory environment (typically 68 to 76 degrees F, up to 45% relative humidity). Temperature and humidity outside of typical laboratory range can contribute to cooling and ignition faults. Cooling issues will cause the over temperature sensor to open, and ignition problems will result from high humidity. Contact a Newport Technical Representative for more information if operating outside the suggested range.

Replacement Lamps
 Quantity Model Lamp Type Price
  6285 Replacement Lamp, 500 Watt Mercury 
  66142 Replacement Lamp, 500 Watt Hg(Xe) 
  6293 Replacement Lamp, 1000 Watt Hg(Xe) 
  6295NS Replacement Lamp, 1000 Watt Hg(Xe), Ozone Free 


Calibrated Probes
 Quantity Spectral Range Peak Wavelength Model Price
  320 - 475 nm 400 nm 84416 
  326 - 401 nm 365 nm 84415 
  185 - 320 nm 280 nm 84414 
  185 - 320 nm 240 nm 84413 


Meter
 Quantity Model Description Price
  84410 Power Meter 


Accessories
For 500 W sources, you will also need the 87032 Filter Mounting Assembly; 1000 W sources include a filter mount.
 Quantity Model Description Price
  87032 Filter Mount Assembly
(for 500 W Flood Exposure Sources)
 
  87038 g-line (436 nm) 
  87066 i-line (365 nm) 
  82000 Flood Source 1 Year Extended Care Plan 
  68951 Digital Exposure Controller 
  68945 Digital Exposure Timer, 10 ms to 9999 hours, 10 ms Increments  
  68955 Remote Switch 

Back To Top

 
Founded in 1969, Newport is a pioneering single-source solutions provider of laser and photonics components to the leaders in scientific research, life and health sciences, microelectronics, industrial manufacturing, and homeland security markets.
Home | Products | Support | Markets | About Us | Investors | My Account | Contact Us
Terms of Use | Privacy Policy   Copyright © 1996-2008 Newport Corporation. All rights reserved .