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OEM Technology Platforms
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Newport has built upon decades of experience in motion solutions to partner with customers in creating Customized Technology Platforms that cater to application-specific needs. These platforms have been successfully implemented in partnership with OEM's in the the semiconductor industry in wafer inspection and lithography applications, for example. Other applications include flat panel display (FPD) inspection and processing and photovoltaics (PV) inspection and processing.
These Customized Technology Platforms are designed from leading technologies and combine the collective knowledge of Newport in materials, manufacturing, assembly and motion control. Technologies such as air bearings, linear and rotary ball bearings, high resolution direct encoders, linear motors, piezos, flexures, ceramic materials and vibration isolation are optimally integrated into these platforms to address the customer's specific requirements. A major part of this technology knowledge comes from supplying numerous and proven standard motion products over the years to industry, research and defense.
Generally, Newport supports the customer's product development process by engaging early on with collaborative discussions on the requirements and solutions until the optimum platform that meet those requirements is agreed upon. Collaboration continues past stages of development into the actual implementation of the platform into the customer's final product.
Below is a table of three air bearing-based platforms, including the DyanmYX and HybrYX air bearing platforms. Use the links for more details about these platforms. Another platform utilizing more conventional technology, the MAT350, with a high value to performance ratio is illustrated later in this section.
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System |
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see Air Bearing Systems |
These single axis air bearing systems use a combination of a linear motor and an optical linear scale to provide smooth translation and high resolution over a long travel. An aluminum housing encloses the cables and tubes. A separate pneumatic cabinet encloses the air supply conditioning devices and an adjustable safety pressure switch which stops the motion in case of pressure fault. |
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see Air Bearing Systems |
Newport's DynamYX Single-plane Air Bearing Stage is a complete sub-micron positioning system designed for easy integration and high throughput in demanding semiconductor equipment test and process applications. It was specifically designed to reach the high level of performance and reliability required by emerging 300 mm wafer equipment. |
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see HybrYXTM Single Plane XY Hybrid Air Bearing Stage |
The all-new HybrYXTM single plane XY hybrid stage is the latest addition to Newport’s family of air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. The HybrYX stage is well suited for semiconductor wafer inspection systems and emerging maskless lithography applications. The stage is also an excellent choice for use in flat panel display (FPD) inspection and processing tools. |
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Highest level of performance in a traditional XY stacked configuration- Ultra-quiet, recirculating bearing guides minimize XY footprint and eliminate bearing cage migration
- Excellent price-to-performance value for demanding sub-micron semiconductor applications
- High efficiency linear motor drives for high throughput with unsurpassed step-and-settle times
- Up to 360mm by 360mm XY travel with optional integrated Z-theta stage
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The MAT350 is a linear motor driven positioning sub-system designed specifically for use in today's most demanding sub-micron semiconductor processing applications. To maximize throughput, the system is capable of resching speeds up to 350 mm/sec and accelerations up to 0,6g mith minimal settling times. In addition, all components of the system have been chosen to ensure long term reliability (20,000H MTBF).
Each linear axis is driven by a high efficency linear motor. Precision ultra-quiet recirculating guideways mounted and aligned to a light weight aluminum frame provide a flat and straight trajectory over the entier travel. Linear glass scale encoders yield position feedback for each axis, providing exceptional bidirectional repeatability and XY accuracy.
Newport offers a number of accessories and options to further enhance your system capabilities and performance.
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