NanoPositioning Linear Stages

The NPX Series is a family of compact, long travel piezo-based linear stages providing nanometer resolution motion in one, two or three axis. These versatile stages are ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others.

NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 µm travel range. Due to the frictionless guide principle, NPX stages are maintenance-free and are not subject to wear. Furthermore, the output motion sensitivity is not affected by mechanical friction.

One of the advantages of the NPX piezo-based linear stages over traditional screw driven stages is the rapid response and fast settling performance. This allows them to be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning.

NPX linear stages are available as X, XY, and XYZ motion systems. The multi-axis XY and XYZ devices utilize an advanced parallel motion principle, meaning all actuators act directly on the moving platform. Smaller form factor and lower inertia for faster motion can be achieved as opposed to other PZT systems with serial kinematics such as stacks of individual stages. In addition, the NPXY100 and NPXY200 models feature a large central aperture which makes them particularly suitable for microscopy applications.

All NPX linear stages are available as open-loop (no position feedback) or closed-loop devices with integrated position feedback. In open-loop, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezoelectric ceramic material. The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion. The position feedback compensates also for actuator creep. For highest position stability and most temperature insensitive performance, the sensors are built in a full Wheatstone bridge design. The closed-loop devices can be operated in either open or closed-loop control.

Fastening is accomplished by a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP . Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening. These external forces could damage the stage.

Order controllers or driver card separately. Order one XPS-DRVP1 for each axis of the NPX***-D model number.

Ordering Information

	Model	Description	avail raw	Availability	price raw	Price	Qty.  MULTI ADD
	NPX200	X Nanopositioning stage, 200 µm, open-loop	7	7 Weeks	2651	$2,651.00	ADD
	NPX200-D	X Nanopositioning stage, 200 µm, open-loop, XPS Compatible	99	Call	2651	$2,651.00	ADD
	NPX200SG	X Nanopositioning stage, 200 µm, with strain gauge sensor	99	Call	3474	$3,474.00	ADD
	NPX200SG-D	X Nanopositioning stage, 200 µm, with strain gauge sensor, XPS Compatible	99	Call	3474	$3,474.00	ADD
	NPX400	X Nanopositioning stage, 400 µm, open-loop	99	Call	2681	$2,681.00	ADD
	NPX400-D	X Nanopositioning stage, 400 µm, open-loop, XPS Compatible	99	Call	2681	$2,681.00	ADD
	NPX400SG	X Nanopositioning stage, 400 µm, with strain gauge sensor	0	In Stock	3767	$3,767.00	ADD
	NPX400SG-D	X Nanopositioning stage, 400 µm, with strain gauge sensor, XPS Compatible	0	In Stock	3767	$3,767.00	ADD
	NPXY100	XY Nanopositioning stage, 100 µm x 100 µm, open-loop	99	Call	3055	$3,055.00	ADD
	NPXY100-D	XY Nanopositioning stage, 100 µm x 100 µm, open-loop, XPS Compatible	99	Call	3055	$3,055.00	ADD
	NPXY100SG	XY Nanopositioning stage, 100 µm x 100 µm, with strain gauge sensors	99	Call	4186	$4,186.00	ADD
	NPXY100SG-D	XY Nanopositioning stage, 100 µm x 100 µm, with strain gauge sensors, XPS Compatible	0	In Stock	4186	$4,186.00	ADD
	NPXY200	XY Nanopositioning stage, 200 µm x 200 µm, open-loop	0	In Stock	3817	$3,817.00	ADD
	NPXY200-D	XY Nanopositioning stage, 200 µm x 200 µm, open-loop, XPS Compatible	99	Call	3817	$3,817.00	ADD
	NPXY200SG	XY Nanopositioning stage, 200 µm x 200 µm, with strain gauge sensors	99	Call	5650	$5,650.00	ADD
	NPXY200SG-D	XY Nanopositioning stage, 200x200 µm, with strain gauge sensors, XPS Compatible	99	Call	5650	$5,650.00	ADD
	NPXYZ100	XYZ Nanopositioning stage, 100 x 100 x 100 µm, Open Loop	0	In Stock	3267	$3,267.00	ADD
	NPXYZ100-D	XYZ Nanopositioning stage, 100 x 100 x 100 µm, Open Loop, XPS Compatible	99	Call	3267	$3,267.00	ADD
	NPXYZ100SG	XYZ Nanopositioning stage, 100 x 100 x 100 µm, Strain Gauge Sensors	0	In Stock	5711	$5,711.00	ADD
	NPXYZ100SG-D	XYZ Nanopositioning stage, 100 x 100 x 100 µm, Strain Gauge Sensors, XPS Compatible	0	In Stock	5711	$5,711.00	ADD

Compatible Controllers and Driver Electronics

	Model	Description	avail raw	Availability	price raw	Price	Qty.  MULTI ADD
	XPS-Q8	8-axis Universal Controller/Driver, ethernet	0	In Stock	7883	$7,883.00	ADD
	XPS-DRVP1	NanoPositioning drive module for piezo-stack based products	0	In Stock	868	$868.00	ADD
	NPC3	3-channel piezo stack amplifier, open-loop control	0	In Stock	5731	$5,731.00	ADD
	NPC3SG	3-channel piezo amplifier, strain-gauge position control	0	In Stock	7019	$7,019.00	ADD

Accessories

	Model	Description	avail raw	Availability	price raw	Price	Qty.  MULTI ADD
	NPX-BP	Base Plate for NanoPositioning stages	0	In Stock	85	$85.00	ADD

Vacuum version

	Model	Description	avail raw	Availability	price raw	Price	Qty.  MULTI ADD
	NPX200SGV6	X Nanopositioning stage, 200 µm, with strain gauge sensor, vacuum compatible to 10-6 hPa	99	Call	3812	$3,812.00	ADD
	NPX400SGV6	Vacuum X Nanopositioning stage, 400 µm, with strain gauge sensor	99	Call	4226	$4,226.00	ADD
	NPXY100SGV6	Vacuum XY Nanopositioning stage, 100 µm x 100 µm, with strain gauge sensors	99	Call	4797	$4,797.00	ADD
	NPXYZ100V6	XYZ Nanopositioning stage, 100x100x100 µm, Open Loop, Vacuum	99	Call	4156	$4,156.00	ADD
	NPXYZ100SGV6	XYZ Nanopositioning stage, 100x100x100 µm, Strain Gauge, Vacuum	99	Call	7322	$7,322.00	ADD

Dimensions

NPX200(SG) and NPX400(SG)

NPXY100

NPXY100SG

NPXY200 and NPXY200SG

NPXYZ100 and NPXYZ100SG

Application Notes

• Photoresponse Mapping of Photovoltaic Cells - App Note 40 (5.4 MB)
• Workstation for Laser Direct-Write Processing - App Note 39 (4.4 MB)
• XPS Positioner Mapping Compensation Tech Note (200 KB)

Data Sheets

• NPX Data Sheet (889 KB)

FAQs

• XPS Controller-LMI Initialization FAQ (160 KB)
• XPS Downloading Labview drivers FAQ (143 KB)
• XPS Ethernet Access FAQ (234 KB)
• XPS Hardware Check FAQ (139 KB)

Newport Resource e-Catalogs *

• Newport Resource e-Catalog, pages 512-515 (English)
• Newport Resource e-Catalog, pages 512-515 (French)
• Newport Resource e-Catalog, pages 512-515 (German)

Software

• NewportUSB (358 KB)
• NPC3SG Labview V8.5 (548 KB)
• StageDataBase (1.4 MB)
• StageDataBaseHistory (60 KB)
• XPS-Q8 Standard Installer Pack 30011 (38.4 MB)
• XPS_DRIVERS-64bit (32 KB)
• XPS_GCODE_V1.1.0 (4.9 MB)
• XPSFirmwareHistory (53 KB)

Technical References

• FTP to XPS with newer versions of Internet Explorer (308 KB)
• Motion Tech Note - Homing with XPS (1.8 MB)
• Motion Tech Note - TCL for XPS (250 KB)
• Motion Tech Note-Scaling Acceleration (848 KB)
• Motion Tech Note-Third Party Direct Drive Stage Configuration (1.8 MB)
• RoHS Compliance Certificate (140 KB)

User Manuals

• NanoPositioning NPX & PSM User Manual (140 KB)
• NPC3 & NPC3SG User Manual (852 KB)
• XPS Quick Start (457 KB)
• XPS User Manual V2.6.x (3.7 MB)
• XPS-DRVP1 User Manual E1 (1 MB)
• XPS-Q8 Configuration Wizard Documentation (1.1 MB)
• XPS-Q8 LabVIEW Manual (3 MB)
• XPS-Q8 Programmer Manual (3.9 MB)
• XPS-Q8 Release Note (516 KB)
• XPS-Q8 Software Drivers Manual (244 KB)
• XPS-Q8 TCL Manual (592 KB)
• XPS-Q8 XPSDocumentation (9 MB)

NPxxx-D Series are compatible with XPS Multi-Axis High-Performance Motion Controller/Driver.

XPS Series

NPxxx Series are driven with NPC3/NPC3SG 3-channel Piezo Amplifier

Selection Guides

	Description
	Motorized Linear Stage Guide

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