The NPM140 Piezoelectric micrometer adapter provides nanometer positioning capability for manual products. This adapter mounts to the actuator seat on the stage and is mechanically compatible with all Newport stages, mounts and actuators with Φ 0.375” (Ø 9.5mm) mounting flange*.
Pre-adjustment is done with the manual screw in the same way as without the adapter. Final, fine adjustment relative to the manually set position is accomplished by controlling the piezo voltage of the NPM140. An extraordinary long piezo travel range of 140 µm is provided by a sophisticated wire EDM flexure system. The flexure serves also as a linear guide for the actuator tip. Resolution of the piezoelectric motion is in the sub-nanometer range.
The NPM140 is available as open-loop (means no position feedback) or closed-loop device with integrated position feedback (NPM140SG). In open-loop, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material. The NPM140SG features a high resolution strain-gauge position sensor for highly accurate and repeatable motion. Also, the position feedback compensates for actuator creep. For highest position stability and highest temperature-insensitive performance, the sensor is assembled in a full Wheatstone bridge design. The NPM140SG can be operated in open or closed-loop control.
*Note: The adapter holds the manual screw 22 mm back from its normal position. Hence, in order to use the total travel range provided by the mechanic, actuators with 22 mm longer travel than recommended should be used with all devices.
Application example for using NPM140
Specifications
|
|
NPM140, NPM140-D
NPM140SG, NPM140-D-SG |
| Open loop travel range (± 10%), (µm) (1) |
140 |
| Closed loop travel range (µm) (1, 2) |
90 |
| Open loop resolution (nm) (3) |
0.1 |
| Closed loop resolution (nm) (2) |
1 |
| Typ. Repeatability (nm) (2) |
35 |
| Capacitance (± 20%) (µF) |
1.7 |
| Resonant frequency, without drive (Hz) |
670 |
| Axial stiffness (N/µm) |
0.4 |
| Max. axial load (N) |
100 |
| Weight (g) |
125 |
1) Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range).
2) Applies to NPM140SG in closed-loop control only.
3) Equal to rms noise value measured with NPC3 and NPC3SG controller.
XPS Series
|
Model |
Description |
| XPS-C2
|
Replaced by XPS-Q2. 2-axis Universal Controller/Driver, ethernet |
| XPS-C4
|
Replaced by XPS-Q4. 4-axis Universal Controller/Driver, ethernet |
| XPS-C6
|
Replaced by XPS-Q6. 6-axis Universal Controller/Driver, ethernet |
| XPS-C8
|
Replaced by XPS-Q8. 8-axis Universal Controller/Driver, ethernet |
| XPS-DRVP1
|
NanoPositioning drive module for piezo-stack based products |
Note: XPS is compatible only with NPM140-D and NPM140SG-D models. XPS-DRVP1 is required for each axis.
NPC Series
|
Model |
Description |
| NPC3
|
3-channel piezo stack amplifier, open-loop control |
| NPC3SG
|
3-channel piezo amplifier, strain-gauge position control |
Note: NPM140 is compatible with NPC3. NPM140SG is compatible with NPC3SG.
