For critical positioning applications such as sensor calibration, laser material processing, optical delay lines, or laser direct-lithography, Newport offers micropositioning calibration services. Linear and non-linear errors are determined at 20.0 °C, ±0.2 °C and loaded into the XPS controller. Utilizing the error compensation feature of the XPS controller, the absolute position accurary of linear stages is improved. A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided with the order.
Available for Most Popular Newport Linear Stages
Calibration services are offered for the following stages and must be ordered with an XPS Motion Controller.
Superior Accuracy Guaranteed
Newport’s error compensation and positioner mapping protocol compensate for any repeatable defects, improving accuracy of position considerably. Below we show the improvements that can be realized. See Figures 2 and 3.
Figure 1. XMS50 Linear Stage with no error compensation; accuracy is 3 µm p-p.
Figure 2. XMS50 stage with linear error compensation and positioner mapping; data was taken the next day and at different positions than shown in Figure 1. The plot shows error readings over five cycles of back and forth motion. The accuracy is 0.3 µm p-p.
Specifications
| Accuracy* |
1 µm/100 mm travel, for XM stages and GTS stages
1 µm + 1 µm/100 mm travel, for IMS-LM, IMS-CCHA, ILS-CCHA, and VP-25XL stages |
*Accuracy values are guaranteed over center 80% of travel. For <1 µm accuracy, please contact Newport.
