The ILS-LM series linear motor stages are designed for self-supporting applications with travel ranges from 100 mm to 300 mm. The stages feature a robust design with high performance but at low cost, making them cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing, or laser machining. Based on industry proven technology of the ILS, the ILS-LM series utilizes an FEMoptimized extruded aluminum body that is extremely stiff, while minimizing bending effects caused by different thermal expansion coefficients of the aluminum body and the steel rails. The rails' positions relative to the profiles neutral fiber minimize the effect due to bi-metal thermal expansion. The rigidity of the body minimizes deflection under load.Unlike screw driven stages, the ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor as the driving element. This drive system is absolutely noise-free and has the advantages of higher speed, high acceleration and high system responsiveness without wear associated with motor brushes or drive screws. And because of the fully integrated linear motor, the ILS-LM is more than 150 mm shorter than a comparable screw driven stage. Thus, the ILS-LM is the optimum solution for space constrained applications that require high-throughput, high reliability, and ultra-quiet operation.Recirculating ball bearing slides provide excellent payload capabilities and long life. The movement is smooth with low noise. Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals are interpolated by Newports XPS motion controller with nanometer resolution for outstanding position sensitivity, repeatability, and stability. A home position is incorporated on the same scale, avoiding the use of additional electronics or mechanics for improved reliability and accuracy.
For critical positioning applications, Newport offers micropositioning calibration services. We will create, implement and verify an electronic compensation process to improve the absolute position accuracy of your Newport ILS-LM stages when commanded by our XPS advanced motion control system. Compensation is performed at 20.0 °C, +/-0.2 °C, for linear and non-linear errors, ensuring accuracy of up to 1 µm + 1 µm/100 mm over the middle 80% of travel. A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided. Click here for complete information on our Micropositioning Calibration Services.
Contact Newport to learn about our micropositioning calibration services needed for critical positioning applications. Upon request, we will create, implement and verify an electronic compensation routine to improve the absolute position accuracy of XM stages to 1 µm/100mm when used with our XPS advanced motion control system. A certificate of calibration along with measured error maps is included.
All ILS High Precision Linear Stages are compatible with the Universal High-Performance Motion Controller/Driver using XPS-DRV02 Driver Card.