The ILS-LM series linear motor stages are designed for self-supporting applications with travel ranges from 100 mm to 300 mm. The stages feature a robust design with high performance but at low cost, making them cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing, or laser machining.
Based on industry proven technology of the ILS, the ILS-LM series utilizes an FEMoptimized extruded aluminum body that is extremely stiff, while minimizing bending effects caused by different thermal expansion coefficients of the aluminum body and the steel rails. The rails' positions relative to the profile’s neutral fiber minimize the effect due to bi-metal thermal expansion. The rigidity of the body minimizes deflection under load.
Unlike screw driven stages, the ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor as the driving element. This drive system is absolutely noise-free and has the advantages of higher speed, high acceleration and high system responsiveness without wear associated with motor brushes or drive screws. And because of the fully integrated linear motor, the ILS-LM is more than 150 mm shorter than a comparable screw driven stage. Thus, the ILS-LM is the optimum solution for space constrained applications that require high-throughput, high reliability, and ultra-quiet operation.
Recirculating ball bearing slides provide excellent payload capabilities and long life. The movement is smooth with low noise. Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals are interpolated by Newport’s XPS motion controller with nanometer resolution for outstanding position sensitivity, repeatability, and stability. A home position is incorporated on the same scale, avoiding the use of additional electronics or mechanics for improved reliability and accuracy.
Need Higher Accuracy?
For critical positioning applications, Newport offers micropositioning calibration services. We will create, implement and verify an electronic compensation process to improve the absolute position accuracy of your Newport ILS-LM stages when commanded by our XPS advanced motion control system. Compensation is performed at 20.0 °C, +/-0.2 °C, for linear and non-linear errors, ensuring accuracy of up to 1 µm + 1 µm/100 mm over the middle 80% of travel.
A certificate of calibration per Newport Metrology Procedure A167 and measured error maps are provided. Click here for complete information on our Micropositioning Calibration Services.
Contact Newport to learn about our micropositioning calibration services needed for critical positioning applications. Upon request, we will create, implement and verify an electronic compensation routine to improve the absolute position accuracy of XM stages to 1 µm/100mm when used with our XPS advanced motion control system. A certificate of calibration along with measured error maps is included.
Accuracy of an XMS50 stage with linear error compensation and positioner mapping. The data was taken one day after the calibration and at different positions. The plot shows error readings over five cycles of back and forth motion. The accuracy is 0.3 µm p-p.
Design Details
| Base Material |
FEM-Optimized Extruded Aluminum |
| Bearings |
Recirculating Bearings |
| Drive Mechanism |
3-phase synchronous ironless linear motor
(without Hall effect sensors) |
| Motor Initialization |
Done by the XPS controller.
The XPS controller uses an initialization routine
to limit the stochastic motions of stages initialization and that does not require Hall effect sensors. |
| Motor Commutation |
Done by the XPS controller on encoder signals. |
| Feedback |
Linear steel scale, 20 µm signal period, 1 Vpp |
| Home Switch |
Optical, on encoder’s fiducial track, located at center of travel |
| Cable Length [m (m)] |
5 (5) (included) |
| MTBF (h) |
20,000 |
Specifications
| Model |
ILS100LM
|
ILS200LM
|
ILS300LM
|
| Travel Range (mm) |
100 |
200 |
300 |
| Minimum Incremental Motion, Linear (µm) |
0.01 |
| Uni-directional Repeatability, Guaranteed1 (µm) |
0.45 |
| Bi-directional Repeatability, Guaranteed1 (µm) |
0.7 or ± 0.35 |
| On-Axis Accuracy, Guaranteed1, 2 (µm) |
5 or ± 2.5 |
| Maximum Speed (mm/s) |
5003 |
| Maximum Acceleration, No Load (m/s2) |
20 |
| Max. Force (Cont.) (N) |
15 |
| Max Force (Peak) 4 s (N) |
30 |
| Pitch, Yaw, guaranteed1 (µrad)2, 4 |
300 or ± 150 |
| Load Capacity (N) |
250 (250) |
1 Shown are peak to peak, guaranteed specifications or ± half the value. For the definition of typical specifications which are about 2X better than the guaranteed values, see
Motion Control Metrology Primer2 For a travel of 300 mm
3 With a 48V driver (such as the XPS-DRV02 board of the XPS ontroller)
4 To obtain arcsec units, divide µrad value by 4.8
For the definition of specifications see
Motion Basics and Standards.
Load Characteristics and Stiffness
| Cz, Normal center load capacity on bearings |
250 N |
| kαx, Compliance in roll |
15 µrad/N.m |
| kαy, Compliance in pitch |
10 µrad/N.m |
| kαz, Compliance in yaw |
10 µrad/N.m |
| Q, Off-center load |
QH≤Cz/(1 + D/60) |
| D, cantilever distance in mm |
|
Dimensions
|
Dimension (mm) |
| Model (Metric) |
A |
n1 |
B |
n2 |
C |
Travel |
L |
| ILS100LM
|
3.94 (100) |
2 |
3.0 (76.2) |
2 |
1.08 (27.5) |
3.94 (100) |
11.22 (285) |
| ILS200LM
|
3.94 (100) |
4 |
3.0 (76.2) |
4 |
3.0 (76.2) |
2.78 (70) |
15.16 (385) |
| ILS300LM
|
3.94 (100) |
4 |
3.0 (76.2) |
4 |
5 in. |
3.54 (90) |
19.09 (485) |
Ordering Information
| | Model | Description | avail raw | Availability | price raw | Price | Qty. MULTI ADD |
|---|
|
ILS100LM |
High Performance Linear Stage, 100 mm Travel, Linear Motor, 1/4-20, ILS-LM |
5 |
5 Weeks |
5508 |
$5,508.00 |
ADD |
|
ILS200LM |
High Performance Linear Stage, 200 mm Travel, Linear Motor, 1/4-20, ILS-LM |
5 |
5 Weeks |
6274 |
$6,274.00 |
ADD |
|
ILS300LM |
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, ILS-LM |
0 |
In Stock |
6988 |
$6,988.00 |
ADD |
|
M-ILS100LM |
High Performance Linear Stage, 100 mm Travel, Linear Motor, M6, ILS-LM |
5 |
5 Weeks |
5508 |
$5,508.00 |
ADD |
|
M-ILS200LM |
High Performance Linear Stage, 200 mm Travel, Linear Motor, M6, ILS-LM Series |
5 |
5 Weeks |
6274 |
$6,274.00 |
ADD |
|
M-ILS300LM |
High Performance Linear Stage, 300 mm Travel, Linear Motor, M6, ILS-LM Series |
4 |
4 Weeks |
6988 |
$6,988.00 |
ADD |
Compatible Controllers and Driver Electronics
Note: Check the controller tab to see the compatible controller models
Cable management
Controller Compatibility
All ILS High Precision Linear Stages are compatible with the Universal High-Performance Motion Controller/Driver using XPS-DRV02 Driver Card.
|
Model |
Description |
| XPS-Q2
|
2-axis Universal Controller/Driver, ethernet |
| XPS-Q4
|
4-axis Universal Controller/Driver, ethernet |
| XPS-Q6
|
6-axis Universal Controller/Driver, ethernet |
| XPS-Q8
|
8-axis Universal Controller/Driver, ethernet |
| XPS-DRV02
|
PWM drive module for brushless motors, 5A/44Vpp max. |
