I-800 Series isolators provide unsurpassed pneumatic vibration isolation for platform loads up to 3200 lbs. Featuring Newport’s unique Stabilizer™ hybrid chamber design, these isolators offer the largest compliance volume and, therefore, best vertical isolation of any isolators in this size range. For machinery with moving loads, damping isolators provide high damping and fast settling with very little compromise of isolation properties. Each I-800 isolator also incorporates Newport’s patented self-centering design to ease manufacturing integration into OEM machinery. Wide selection and modular design capability provide the greatest flexibility to precision machinery designers.
Also available are a variety of valves and damping mechanisms to further tune the system to specific machine needs.
High-Resolution Systems — “A” Series Stabilizer™ Isolators
In many high-resolution systems, such as Steppers, SEMs and Mask Inspection Machines, very low-level vibration noise is the ultimate limitation. The “A” Series Heavy Load Isolators offer the same advanced hybrid chamber technology developed for the research grade S-2000 isolators. The vibration isolation provided by this system is unsurpassed for this size range of pneumatic isolator. The “A” Series is the best choice for most high-resolution applications.
High Throughput Systems — “B” Series Damping Isolators
Building on Newport’s unique Stabilizer technology, “B” Series Damping Isolators offer increased damping and reduced platform-settling time. The “B” Series should be selected for high-resolution systems with increased requirement for releveling speed and stability as loads are moved across the platform.
Damping isolators incorporate high gain valves and constrict the airflow through damping element by 50%. Custom Damping designs can be tuned for specific isolation and moving load requirements.
High Throughput Systems — “C” Series with Horizontal Damping
Systems with high acceleration horizontal loads require increased isolator damping. Based on Newport’s long experience manufacturing fast motion air bearing and linear stages, version “C” adds high horizontal damping to the standard Stabilizer and Damping design elements. Newport horizontal pendulum isolation systems provide superior low-level isolation over friction prone gimbaled and bearing systems. Unique horizontal damping systems dissipate stage motion energy with very little compromise of isolation.
Releveling and Repositioning Accuracy
The standard vertical releveling capability on the Heavy Load Isolator Series is ±0.010 in. (±0.25 mm). However, custom designs with releveling accuracy of 0.002 in. (0.05 mm) are available through our Custom Products Group. The horizontal travel is 0.12 in. (3 mm) with a repositioning accuracy of 0.003 in. (0.08 mm). For more precise positioning, a docking system may be required.
