| Stage Architecture |
Single Plane XY Air Bearing / Mechanical Bearing Hybrid |
Single Plane XY Air Bearing / Mechanical Bearing Hybrid |
| Material |
Ceramic (SiC), Granite |
Ceramic (SiC), Granite |
| Drive Mechanism |
Brushless linear servo motor (Y-axis Ironless, X-axis Iron-core) |
Brushless linear servo motor (Y-axis Ironless, X-axis Iron-core) |
| Position Feedback |
Non-contact optical linear encoders
- Standard: Heidenhain LIDA, steel scale with 20 µm signal period
- Optional: Heidenhain LIF, glass scale with 4 µm signal period
- Optional: Renishaw Signum, Invar scale with 20 µm signal period |
Non-contact optical linear encoders
- Standard: Heidenhain LIDA, steel scale with 20 µm signal period
- Optional: Heidenhain LIF, glass scale with 4 µm signal period
- Optional: Renishaw Signum, Invar scale with 20 µm signal period |
| Bearings |
Pressure-Vacuum Air Bearing (XY Carriage and Y-travel), Recirculating ball-bearing (X-travel) |
Pressure-Vacuum Air Bearing (XY Carriage and Y-travel), Recirculating ball-bearing (X-travel) |
| Cable Management |
Fully integrated, clean-room compatible, single point exit/entry, mimimal external force |
Fully integrated, clean-room compatible, single point exit/entry, mimimal external force |
| General Specifications |
|
|
| Travel Range (standard) |
350 mm X-axis |
450 mm X-axis |
| 650 mm Y-axis |
1400 mm Y-axis |
| Footprint (without bridge pillars) |
1200 mm x 765 mm x 375 mm |
2000 mm x 900 mm x 450 mm (with ZTT & Theta) |
| Rated Payload (maintains dynamic specifications) |
14 kg |
30 kg on ZTT & Theta |
| Maximum Load Capacity |
20 kg |
40 kg (without ZTT & Theta) |
| Maximum Velocity (rated payload) |
300 mm/sec X-axis (stepping) |
300 mm/sec X-axis (stepping) |
| 600 mm/sec Y-axis (scanning) |
600 mm/sec Y-axis (scanning) |
| Peak Acceleration (rated payload) |
0.3 G X-axis |
0.15 G X-axis with ZTT & Theta |
| 0.6 G Y-axis |
0.25 G X-axis with ZTT & Theta |
| RMS Acceleration (rated payload) |
0.15 G X-axis |
0.075 G X-axis with ZTT & Theta |
| 0.2 G Y-axis |
0.1 G X-axis with ZTT & Theta |
| Granite Base Thickness |
250 mm |
250 mm |
| Total Weight |
750 kg |
1400 kg |
| Stiffness, First Natural Frequency |
150 Hz |
150 Hz |
| MTBF |
20,000 hrs. |
20,000 hrs. |
| Performance Specifications |
|
|
| Pitch, Yaw, Roll (300 mm by 600 mm travel) |
<15 µrad |
<15 µrad |
| Y-axis Straightness (300 mm line) |
0.6 µm TIR |
1 µm TIR |
| Y-axis Straightness (25 mm line) |
0.1 µm TIR |
0.15 µm TIR |
| Noise on Y-axis Straightness (sampled at >5 Hz.) |
±25 nm |
±25 nm |
| XY Flatness (300mm circle) |
0.6 µm TIR |
0.6 µm TIR |
| Y-axis Position Accuracy over 25 mm |
± 250 nm with 20 µm LIDA scale
± 50 nm with 4 µm LIF scale |
± 100 nm with 20 µm with Invar scale |
| Accuracy in XY (with linear and perpendicularity error compensation) |
± 1,5 µm over 300 x 600 mm with 20 µm LIDA scale
±1.0 µm over 300 x 600 mm with 4 µm LIF scale |
± 3 µm over 1.2 m x 0.4 m with 20 µm Invar Scale |
| Noise on XY Flatness (sampled at > 5Hz) |
±20 nm |
±25 nm |
| XY Orthogonality |
< 10 µrad |
< 20 µrad |
| Y-axis Speed Stability (velocity ripple sampled at 2kHz and 400mm/sec) |
0.1% |
0.1% |
| Step-and-Settle Times (using ND40 Passive Isolators) |
Settling into ±100 nm window
Note: Addition of Reaction Force Compensation System allows same step-and-settle times into
± 40 nm window |
Settling into ±1 µm window
Note: Addition of Reaction Force Compensation System allows same step-and-settle times into ± 0.25 µm window |
| 300 mm step |
< 1300 msec X-axis |
< 1350 msec X-axis |
| < 750 msec Y-axis |
< 900 msec Y-axis |
| 100 mm step |
< 650 msec X-axis |
< 750 msec X-axis |
| < 360 msec Y-axis |
< 500 msec Y-axis |
| 25 mm step |
< 350 msec X-axis |
< 350 msec X-axis |
| < 350 msec X-axis |
< 300 msec X-axis |
| Ideal Interpolated Encoder Resolution |
2 nm |
2 nm |
